JPS6239059Y2 - - Google Patents

Info

Publication number
JPS6239059Y2
JPS6239059Y2 JP974981U JP974981U JPS6239059Y2 JP S6239059 Y2 JPS6239059 Y2 JP S6239059Y2 JP 974981 U JP974981 U JP 974981U JP 974981 U JP974981 U JP 974981U JP S6239059 Y2 JPS6239059 Y2 JP S6239059Y2
Authority
JP
Japan
Prior art keywords
reaction tube
gas
conductive member
attached
gas inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP974981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57125733U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP974981U priority Critical patent/JPS6239059Y2/ja
Publication of JPS57125733U publication Critical patent/JPS57125733U/ja
Application granted granted Critical
Publication of JPS6239059Y2 publication Critical patent/JPS6239059Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Hydrogen, Water And Hydrids (AREA)
  • Chemical Vapour Deposition (AREA)
  • Furnace Details (AREA)
JP974981U 1981-01-28 1981-01-28 Expired JPS6239059Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP974981U JPS6239059Y2 (en, 2012) 1981-01-28 1981-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP974981U JPS6239059Y2 (en, 2012) 1981-01-28 1981-01-28

Publications (2)

Publication Number Publication Date
JPS57125733U JPS57125733U (en, 2012) 1982-08-05
JPS6239059Y2 true JPS6239059Y2 (en, 2012) 1987-10-05

Family

ID=29807862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP974981U Expired JPS6239059Y2 (en, 2012) 1981-01-28 1981-01-28

Country Status (1)

Country Link
JP (1) JPS6239059Y2 (en, 2012)

Also Published As

Publication number Publication date
JPS57125733U (en, 2012) 1982-08-05

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