JPS6239033B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The purpose of the present invention is to quickly remove dissolved substances, particles, minute pieces, etc. dissolved or floating in a processing liquid in a multi-stage processing tank, and to improve processing efficiency. do.

First, a multi-stage (cascade) type processing tank will be described as a conventional example. The case of cleaning will be described below for simplicity. The cleaning liquid includes chemicals, organic solvents, water, and the like.

As shown in the perspective view of Fig. 1, the processing tank consists of at least two tanks, and one of the four walls 4 surrounding the first tank 1 is made slightly low, so that the cleaning solution overflows beyond this. The water then flows into the intermediate tank 5 located between the first tank 1 and the second tank 2. The upper end of the boundary wall 6 between the intermediate tank 5 and the second tank 2 is higher than the outflow wall 4 of the first tank, and the lower end is provided with an opening 7 so that the cleaning liquid flows between the boundary wall 6 and the bottom surface. One of the four walls around the second tank 2, that is, the upper end of the outflow wall 8 of the second tank is located at a lower position than the upper end of the outflow wall 4 of the first tank, and the lower end is connected to the bottom surface. . The cleaning solution is A:
It is first supplied to the first tank 1 via the supply pipe 3, B: it passes over the outflow wall 4 of the first tank and enters the intermediate tank 5, C: it passes through the opening 7 under the boundary wall 6 of the second tank and enters the intermediate tank 5. D: Further, it overflows the outflow wall 8 of the second tank and is discharged. The same thing can be considered even if the number of treatment tanks increases to three or more.

To perform cleaning using this cleaning tank, preliminary cleaning is performed in the second tank 2, and then the main cleaning is performed in the first tank 1. By doing so, the cleaning liquid can be saved and the cleaning effect can be improved. By the way, the conventional cleaning tank shown in FIG. 1 has the following drawbacks: As a result of cleaning in the first tank, dissolved substances are dissolved or suspended in the cleaning solution.
Reaction products, particles, and minute pieces (hereinafter referred to as cleaning products) flow out from the first tank 1 to the intermediate tank 5 together with the cleaning liquid, and these cleaning products that enter there are
If the specific gravity is lower than that of the cleaning liquid or if it exists near the liquid surface due to surface tension, it will be difficult to discharge it to the outside of the tank via the second tank 2. However, the second
It is not the case that these cleaning products do not flow into tank 2 at all; rather, over a long period of time, they gradually absorb water, become heavier, and their surface tension decreases. By sinking, it enters the second tank. Therefore, the cleaning liquid in the second tank is not cleaned at any time, which results in impeding the cleaning effect.

The present invention provides a processing tank having a structure that eliminates the above-mentioned drawbacks.

FIG. 2 shows a perspective view of a processing tank that is an embodiment of the present invention. The feature is that the surface layer of the cleaning liquid that has entered the intermediate tank 5 from the first tank 1 is discharged by providing an overflow part, for example, a notch 9 in the intermediate tank. As a result, the cleaning products floating or present on the surface of the cleaning liquid are discarded together with a small amount of the cleaning liquid, and the cleaning products are prevented from entering the second tank 2.

The depth of the notch 9, ie, the position of the bottom 10, is made approximately the same as the height of the outflow wall 8 of the second tank. The relationship between the two also relates to the flow rate of the cleaning liquid supplied to the first tank. When the flow rate is high, the cut is made shallow, that is, the bottom part 10 is set high, and when the flow rate is low, the cut is made deep, that is, the bottom part 10 is placed in a low position.The amount discharged from the intermediate tank 5 and the amount sent to the second tank 2 are reduced. balance. When the flow rate fluctuates rapidly, it is practically convenient to have a structure in which the vertical position of the bottom can be adjusted. Further, the lateral positional relationship of the cut portion is preferably a certain distance X from the outflow wall 4 of the first tank, as shown in a partially enlarged view in FIG. When the cleaning liquid exceeds the outflow wall 4, the liquid level 11 is at a distance Y from the wall depending on surface tension and flow rate.
It swells up and forms. The relationship between the two is X>Y
By doing so, it is possible to prevent the cleaning liquid from inadvertently spreading laterally and being discharged when it passes over the outflow wall. In FIG. 2, elements common to those in FIG. 1 are given the same symbols to avoid redundant explanation.

As described above, according to the present invention, by quickly discharging the cleaning products generated in the cleaning liquid in the first tank, almost no cleaning products enter the second tank, increasing the cleanliness of the cleaning liquid in the second tank. The cleaning effect and efficiency can be significantly improved.

Although the present invention has been described above in the case of cleaning, it can also be applied to various treatments using solutions, etc. with the same gist. Moreover, a liquid overflow hole may be provided in the side wall instead of the notch as the liquid overflow part.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a conventional example, FIG. 2 is a perspective view of an embodiment of the present invention, and FIG. 3 is a partially enlarged sectional view of FIG. 2. 1... First tank, 2... Second tank, 4... Outflow wall of the first tank, 5... Intermediate tank, 6... Boundary wall, 8... Outflow wall of the second tank.

Claims (1)

[Scope of Claims] 1. A processing liquid is configured to be sent from a first processing tank to a second processing tank, and a product generated in the first processing tank and existing near the surface of the processing liquid. A multi-stage processing tank, characterized in that a discharge means is provided between the first processing tank and the second processing tank for causing the substances to flow out to the outside together with the surface layer of the processing liquid. 2. The multi-stage type according to claim 1, characterized in that an intermediate tank is provided as a discharge means between the first processing tank and the second processing tank, and an overflow part is provided on the side wall of the intermediate tank. Processing tank.