JPS6237926U - - Google Patents

Info

Publication number
JPS6237926U
JPS6237926U JP13035185U JP13035185U JPS6237926U JP S6237926 U JPS6237926 U JP S6237926U JP 13035185 U JP13035185 U JP 13035185U JP 13035185 U JP13035185 U JP 13035185U JP S6237926 U JPS6237926 U JP S6237926U
Authority
JP
Japan
Prior art keywords
rotating body
wafer
wafer drying
support shaft
air introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13035185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH046206Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985130351U priority Critical patent/JPH046206Y2/ja
Publication of JPS6237926U publication Critical patent/JPS6237926U/ja
Application granted granted Critical
Publication of JPH046206Y2 publication Critical patent/JPH046206Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1985130351U 1985-08-27 1985-08-27 Expired JPH046206Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985130351U JPH046206Y2 (ko) 1985-08-27 1985-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985130351U JPH046206Y2 (ko) 1985-08-27 1985-08-27

Publications (2)

Publication Number Publication Date
JPS6237926U true JPS6237926U (ko) 1987-03-06
JPH046206Y2 JPH046206Y2 (ko) 1992-02-20

Family

ID=31027765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985130351U Expired JPH046206Y2 (ko) 1985-08-27 1985-08-27

Country Status (1)

Country Link
JP (1) JPH046206Y2 (ko)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196532A (en) * 1981-05-27 1982-12-02 Toshiba Corp Drying device for wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196532A (en) * 1981-05-27 1982-12-02 Toshiba Corp Drying device for wafer

Also Published As

Publication number Publication date
JPH046206Y2 (ko) 1992-02-20

Similar Documents

Publication Publication Date Title
JPS6237926U (ko)
JPS6330622U (ko)
JPH01156806U (ko)
JPH0224124U (ko)
JPH0414144U (ko)
JPS62114190U (ko)
JPS6291918U (ko)
JPS6444201U (ko)
JPH02145990U (ko)
JPS61131518U (ko)
JPH02114225U (ko)
JPS62132293U (ko)
JPS6453499U (ko)
JPH02122430U (ko)
JPH0274382U (ko)
JPS61191189U (ko)
JPS62154767U (ko)
JPH01160463U (ko)
JPS63148641U (ko)
JPS6267458U (ko)
JPH0314943U (ko)
JPS6287713U (ko)
JPS62175455U (ko)
JPS6262413U (ko)
JPS61166368U (ko)