JPS6237926U - - Google Patents

Info

Publication number
JPS6237926U
JPS6237926U JP13035185U JP13035185U JPS6237926U JP S6237926 U JPS6237926 U JP S6237926U JP 13035185 U JP13035185 U JP 13035185U JP 13035185 U JP13035185 U JP 13035185U JP S6237926 U JPS6237926 U JP S6237926U
Authority
JP
Japan
Prior art keywords
rotating body
wafer
wafer drying
support shaft
air introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13035185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH046206Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985130351U priority Critical patent/JPH046206Y2/ja
Publication of JPS6237926U publication Critical patent/JPS6237926U/ja
Application granted granted Critical
Publication of JPH046206Y2 publication Critical patent/JPH046206Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1985130351U 1985-08-27 1985-08-27 Expired JPH046206Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985130351U JPH046206Y2 (enrdf_load_stackoverflow) 1985-08-27 1985-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985130351U JPH046206Y2 (enrdf_load_stackoverflow) 1985-08-27 1985-08-27

Publications (2)

Publication Number Publication Date
JPS6237926U true JPS6237926U (enrdf_load_stackoverflow) 1987-03-06
JPH046206Y2 JPH046206Y2 (enrdf_load_stackoverflow) 1992-02-20

Family

ID=31027765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985130351U Expired JPH046206Y2 (enrdf_load_stackoverflow) 1985-08-27 1985-08-27

Country Status (1)

Country Link
JP (1) JPH046206Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196532A (en) * 1981-05-27 1982-12-02 Toshiba Corp Drying device for wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196532A (en) * 1981-05-27 1982-12-02 Toshiba Corp Drying device for wafer

Also Published As

Publication number Publication date
JPH046206Y2 (enrdf_load_stackoverflow) 1992-02-20

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