JPS6237921U - - Google Patents
Info
- Publication number
- JPS6237921U JPS6237921U JP12974985U JP12974985U JPS6237921U JP S6237921 U JPS6237921 U JP S6237921U JP 12974985 U JP12974985 U JP 12974985U JP 12974985 U JP12974985 U JP 12974985U JP S6237921 U JPS6237921 U JP S6237921U
- Authority
- JP
- Japan
- Prior art keywords
- opposing electrodes
- chamber
- impedance
- cvd apparatus
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 238000000354 decomposition reaction Methods 0.000 claims 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12974985U JPS6237921U (sv) | 1985-08-26 | 1985-08-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12974985U JPS6237921U (sv) | 1985-08-26 | 1985-08-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6237921U true JPS6237921U (sv) | 1987-03-06 |
Family
ID=31026600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12974985U Pending JPS6237921U (sv) | 1985-08-26 | 1985-08-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6237921U (sv) |
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1985
- 1985-08-26 JP JP12974985U patent/JPS6237921U/ja active Pending