JPS6237629Y2 - - Google Patents

Description

[Detailed description of the invention] <Industrial application field> The present invention is a lapping method in which the lapping surface plate and the workpiece are independently rotated, and the flat surface of the workpiece is lapped using a lapping agent between the lapping surface plate and the workpiece. It is related to the device.

<Prior art> A conventional wrap device is capable of moving forward and backward in a direction perpendicular to a spindle head supported on an extension of the fixed base above a wrap surface plate that is rotatably supported around an axis perpendicular to a fixed base. The upper surface of the work holder main body, on which the shaft is supported and the workpiece fixed to the lower surface, is provided with a protrusion that has an insertion hole into which the reciprocating shaft can be inserted, and by inserting the retractable shaft into the insertion hole, the The workpiece was prevented from flying out due to the rotation of the surface plate.

However, in conventional machines, the work holder body rotates around the axis of the advance/retreat axis as the lap surface plate rotates, which results in irregular machining of the workpiece and the machining surface of the workpiece is not uniform. Moreover, since the work holder body cannot be raised or lowered along with the forward/backward axis, there is a risk that the machined surface may be damaged by the lapping agent when the lapping surface plate starts and stops rotating, which is an obstacle to improving processing accuracy. .

<Purpose of the invention> The object of the invention is to provide a wrap device that can rotate, raise and lower a workpiece with a main shaft that can rotate and move back and forth, and that can be easily connected and disconnected from the main shaft.

<Structure of the invention> The wrap device according to the invention has a pin that protrudes in the radial direction and is fixed to the main shaft that rotates and moves up and down.
A protrusion having an insertion hole and a long groove into which the main shaft and pin can be inserted is provided on the upper surface of the work holder main body, which fixes the work on the lower surface, and a through hole and a long groove corresponding to the insertion hole and the long groove are provided on the upper part of the protrusion. It is constructed by attaching the formed cap so that it can only be rotated.

<Example> Hereinafter, an example of the present invention will be described based on the drawings. In FIG. 1, 10 is a fixed base;
A turntable 11 is supported on the fixed base 10 so as to be rotatable about a vertical axis, and is rotatably driven by a drive device (not shown). A ring-shaped lap surface plate 12 having a lap surface formed on the upper surface is fixed on the turntable 11. It is immersed in a lapping liquid contained in a liquid bath. A support stand 13 is installed on the fixed base 10, and a support rail 15 having a guide surface 14 parallel to the lap surface of the wrap surface plate 12 is fixed on the support stand 13. A base 16 is mounted movably along the guide surface 14. A spindle head 17 is fixed to the front surface of the slide base 16, and a reciprocating member 18 is fitted into the spindle head 17 so as to be movable back and forth in an axial direction perpendicular to the spindle head 17. Moving member 18
A main shaft 19 is supported rotatably around a vertical axis. A forward/backward drive motor 20 is fixed to the spindle head 17 and a rotary drive motor 21 is fixed to the slide base 16. It is designed to be rotated.

In FIGS. 2 and 3, a pin 22 is fixed to the lower end of the main shaft 19 so as to protrude to both sides in the radial direction. The work holder main body 40 is a disk-shaped work holder main body, and a cylindrical protrusion 41 is protruded from the center of the upper surface of the work holder main body 40 .
The protrusion 41 is formed with an insertion hole 42 into which the main shaft 19 can be inserted from above and a radially long groove 43 into which the pin 22 can be inserted. Due to the engagement between the pin 22 and the long groove 43, the rotational power of the main shaft 19 is transmitted to the work holder body 40. A vibration absorbing rubber 23 that is slidably fitted into the insertion hole 42 of the protrusion 41 is fixed to the lower end of the main shaft 19 . A cylindrical stepped member 44 is slidably fitted onto the outer periphery of the protrusion 41 , and a ring-shaped puller screwed onto the outer periphery of the upper end of the protrusion 41 is provided on the upper inner periphery of the stepped member 44 . A large diameter portion 47 is formed so that the hanging member 46 can be inserted therethrough. Large diameter portion 4 of stepped member 44
A flange member 48 is screwed onto the hook 7 by sandwiching the hook member 46 therebetween. Stepped member 44 and flange member 48
The cap 49 is rotatable with respect to the protrusion 41 and the hooking member 46, and
6 prevents it from coming off. A through hole 54 is formed in the flanged member 48 so that the main shaft 19 can be inserted into the insertion hole 42 of the protrusion 41 from above the flanged member 48, and a through hole 54 is formed in the radial direction so that the pin 22 can be inserted into the long groove 43 of the protrusion 41. A long groove 50 is formed. A plurality of weights 51 whose centers are cut out so as not to interfere with the cap 49 are placed on the workholder body 40, and the weights 51 are attached to the workholder body 4 by a plurality of bolts 52 screwed into the workholder body 40.
It is fixed at 0. A work W is fixed to the lower surface of the work holder main body 40 with an adhesive or the like. The work holder 53 includes the work holder main body 40,
It is composed of a protrusion 41 and a cap 49.

The processing order will be explained based on the above-described configuration. Place the work W on each of the plurality of work holders 53 at a place where it is easy to work other than on the lap surface plate 12.
are fixed, and one of the work holders 53 is moved above the lap surface plate 12. Turn the cap 49 to align the long grooves 43 and 50. The work holder 53 is lifted to the main shaft 19 where the reciprocating member 18 is at the upper end position, and the main shaft 19 is inserted into the insertion hole 42 and the through hole 54, and the pin 22 is inserted into the long grooves 43 and 50. After insertion, the cap 49 is turned to shift the positions of the long grooves 43 and 50 as shown in FIG. By lowering the work holder 53, the flanged member 4
8 comes into contact with the pin 22, and the work holder 5
3 is suspended from the main shaft 19. In this state, the lap surface plate 12 is rotated, and the main shaft 19 is rotated by the rotary drive motor 21 while the main shaft 19 is lowered by the forward/backward drive motor 20. Lap surface plate 12 by rotation of lap surface plate 12
When the work W is floating due to a film of lapping liquid formed between the work holder and the work W, and when the pin 22 is between the work holder main body 40 and the flange member 48, the advance/retreat drive motor 20 is stopped. Work W due to only the gravitational action of the work holder 53 and the weight 51
The pressing force on the lap surface plate 12 and the pressure on the lap surface plate 12
The lapping process is performed by the lapping agent in the lapping liquid due to the relative movement between the workpiece and the work W. After processing, the forward/backward drive motor 20 is operated to raise the main shaft 19. The lower surface of the flange member 48 and the pin 22 come into contact with each other, and the work holder 53 is raised while rotating while hanging from the main shaft 19. When the advancing/retracting member 18 is moved to the upper end position, the advancing/retracting drive motor 20 and the rotary drive motor 21 are stopped. Turn the cap 49 to align the long grooves 43 and 50,
The work holder 53 is removed from the main shaft 19. Thereafter, similar processing is performed on the unprocessed workpiece W by repeating the above-described order.

<Effects of the invention> As described above, the present invention has a rotating lap surface plate and a main shaft that rotates and moves up and down above the lap surface plate, and fixes pins that protrude in the radial direction, and fixes a workpiece to the lower surface. A protruding part having an insertion hole and a long groove into which the main shaft and pin can be inserted is provided on the upper surface of the work holder main body, and a cap having a through hole and a long groove corresponding to the insertion hole and the long groove is formed on the upper part of the protruding part. The work holder can be lowered or raised while rotating, which prevents the lapping agent from damaging the machined surface when the lapping surface plate starts and stops rotating. Improves accuracy. Furthermore, since the rotation of the main shaft can be transmitted to the work holder, uniform machining can be performed on the work. In addition, a long groove is formed in the work holder to allow vertical movement of the work holder relative to the spindle, so vertical force from the spindle does not act on the work holder, and even a constant force due to the work holder's own weight can move the work holder. can be pressed against the lap surface plate, making it possible to process the workpiece more uniformly. Furthermore, since the work holder can be moved up and down with respect to the spindle, there is an advantage that there is no need to strictly control the lowering position of the spindle in response to changes in the thickness of the workpiece. Moreover, the work holder can be connected to or disconnected from the spindle simply by turning the cap, which has the advantage of improving work efficiency.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention; Fig. 1 shows the main parts of the wrapping device, Fig. 2 is an enlarged cross-sectional view of the work holder in Fig. 1, and Fig. 3 shows an enlarged view of the work holder in Fig. 1.
The figure is a view seen from the direction in FIG. 2. 10...Fixed base, 11...Turntable, 12...Lap surface plate, 13...Support stand, 15
...Support rail, 16...Slide base, 17
... Spindle head, 18... Advance/retreat member, 19... Main shaft,
20... forward/backward drive motor, 21... rotary drive motor, 22... pin, 40... work holder body,
41... Projection, 42... Insertion hole, 43... Long groove, 49... Cap, 50... Long groove, 54...
Through hole.

Claims (1)

[Scope of utility model registration request] A main shaft is provided above the lap surface plate, which is rotatably supported around an axis perpendicular to the fixed base, so that it can rotate and move forward and backward in the vertical direction. On the upper surface of the work holder main body, which fixes the work, there is provided a protrusion having an insertion hole and a long groove into which the main shaft and pin can be inserted, and a cap is attached to the upper part of the protrusion so that it can only rotate, and the cap is attached to the protrusion. A wrap device characterized by forming a through hole and a long groove corresponding to the insertion hole and long groove of the part.