JPS6237082U - - Google Patents

Info

Publication number

JPS6237082U

JPS6237082U JP12792885U JP12792885U JPS6237082U JP S6237082 U JPS6237082 U JP S6237082U JP 12792885 U JP12792885 U JP 12792885U JP 12792885 U JP12792885 U JP 12792885U JP S6237082 U JPS6237082 U JP S6237082U

Authority

JP

Japan

Prior art keywords

plasma gas

extract

thin film

base material

utility

Prior art date

1985-08-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004519 manufacturing process Methods 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
• 230000001133 acceleration Effects 0.000 description 1
• 230000008020 evaporation Effects 0.000 description 1
• 238000001704 evaporation Methods 0.000 description 1
• 239000000126 substance Substances 0.000 description 1

Cited By (1)