JPS6237081U - - Google Patents
Info
- Publication number
- JPS6237081U JPS6237081U JP12734685U JP12734685U JPS6237081U JP S6237081 U JPS6237081 U JP S6237081U JP 12734685 U JP12734685 U JP 12734685U JP 12734685 U JP12734685 U JP 12734685U JP S6237081 U JPS6237081 U JP S6237081U
- Authority
- JP
- Japan
- Prior art keywords
- transmitting window
- chamber
- light transmitting
- gate valve
- airtight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12734685U JPS6237081U (ro) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12734685U JPS6237081U (ro) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237081U true JPS6237081U (ro) | 1987-03-05 |
Family
ID=31022008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12734685U Pending JPS6237081U (ro) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237081U (ro) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6220873A (ja) * | 1985-07-19 | 1987-01-29 | Sumitomo Electric Ind Ltd | 光ｃｖｄ薄膜製造の装置および方法 |
-
1985
- 1985-08-20 JP JP12734685U patent/JPS6237081U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6220873A (ja) * | 1985-07-19 | 1987-01-29 | Sumitomo Electric Ind Ltd | 光ｃｖｄ薄膜製造の装置および方法 |