JPS6237079U - - Google Patents

Info

Publication number
JPS6237079U
JPS6237079U JP12931885U JP12931885U JPS6237079U JP S6237079 U JPS6237079 U JP S6237079U JP 12931885 U JP12931885 U JP 12931885U JP 12931885 U JP12931885 U JP 12931885U JP S6237079 U JPS6237079 U JP S6237079U
Authority
JP
Japan
Prior art keywords
molecular beam
shutter
shutter plate
cell
crystal growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12931885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH033580Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985129318U priority Critical patent/JPH033580Y2/ja
Publication of JPS6237079U publication Critical patent/JPS6237079U/ja
Application granted granted Critical
Publication of JPH033580Y2 publication Critical patent/JPH033580Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985129318U 1985-08-23 1985-08-23 Expired JPH033580Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985129318U JPH033580Y2 (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985129318U JPH033580Y2 (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Publications (2)

Publication Number Publication Date
JPS6237079U true JPS6237079U (enrdf_load_stackoverflow) 1987-03-05
JPH033580Y2 JPH033580Y2 (enrdf_load_stackoverflow) 1991-01-30

Family

ID=31025789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985129318U Expired JPH033580Y2 (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Country Status (1)

Country Link
JP (1) JPH033580Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694730A (en) * 1979-12-28 1981-07-31 Nec Corp Preparation method of compound semiconductor thin film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694730A (en) * 1979-12-28 1981-07-31 Nec Corp Preparation method of compound semiconductor thin film

Also Published As

Publication number Publication date
JPH033580Y2 (enrdf_load_stackoverflow) 1991-01-30

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