JPH033580Y2 - - Google Patents

Info

Publication number
JPH033580Y2
JPH033580Y2 JP1985129318U JP12931885U JPH033580Y2 JP H033580 Y2 JPH033580 Y2 JP H033580Y2 JP 1985129318 U JP1985129318 U JP 1985129318U JP 12931885 U JP12931885 U JP 12931885U JP H033580 Y2 JPH033580 Y2 JP H033580Y2
Authority
JP
Japan
Prior art keywords
cell
shutter plate
growth chamber
opening
molecular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985129318U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237079U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985129318U priority Critical patent/JPH033580Y2/ja
Publication of JPS6237079U publication Critical patent/JPS6237079U/ja
Application granted granted Critical
Publication of JPH033580Y2 publication Critical patent/JPH033580Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985129318U 1985-08-23 1985-08-23 Expired JPH033580Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985129318U JPH033580Y2 (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985129318U JPH033580Y2 (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Publications (2)

Publication Number Publication Date
JPS6237079U JPS6237079U (enrdf_load_stackoverflow) 1987-03-05
JPH033580Y2 true JPH033580Y2 (enrdf_load_stackoverflow) 1991-01-30

Family

ID=31025789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985129318U Expired JPH033580Y2 (enrdf_load_stackoverflow) 1985-08-23 1985-08-23

Country Status (1)

Country Link
JP (1) JPH033580Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694730A (en) * 1979-12-28 1981-07-31 Nec Corp Preparation method of compound semiconductor thin film

Also Published As

Publication number Publication date
JPS6237079U (enrdf_load_stackoverflow) 1987-03-05

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