JPS6237074A - 回転円盤型高電圧発生装置 - Google Patents

回転円盤型高電圧発生装置

Info

Publication number
JPS6237074A
JPS6237074A JP17179885A JP17179885A JPS6237074A JP S6237074 A JPS6237074 A JP S6237074A JP 17179885 A JP17179885 A JP 17179885A JP 17179885 A JP17179885 A JP 17179885A JP S6237074 A JPS6237074 A JP S6237074A
Authority
JP
Japan
Prior art keywords
voltage side
high voltage
rotating disk
inductor electrode
side inductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17179885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0150188B2 (enExample
Inventor
Riichi Kikuchi
菊池　理一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP17179885A priority Critical patent/JPS6237074A/ja
Publication of JPS6237074A publication Critical patent/JPS6237074A/ja
Publication of JPH0150188B2 publication Critical patent/JPH0150188B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP17179885A 1985-08-06 1985-08-06 回転円盤型高電圧発生装置 Granted JPS6237074A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17179885A JPS6237074A (ja) 1985-08-06 1985-08-06 回転円盤型高電圧発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17179885A JPS6237074A (ja) 1985-08-06 1985-08-06 回転円盤型高電圧発生装置

Publications (2)

Publication Number Publication Date
JPS6237074A true JPS6237074A (ja) 1987-02-18
JPH0150188B2 JPH0150188B2 (enExample) 1989-10-27

Family

ID=15929897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17179885A Granted JPS6237074A (ja) 1985-08-06 1985-08-06 回転円盤型高電圧発生装置

Country Status (1)

Country Link
JP (1) JPS6237074A (enExample)

Also Published As

Publication number Publication date
JPH0150188B2 (enExample) 1989-10-27

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