JPS6236624A - Scanning type optical microscope - Google Patents

Abstract

PURPOSE:To obtain a dark field image at a low cost by forming a means for removing the zeroth-ordr diffracted light out of detected light in a detecting optical system for detecting light obtained from a substance. CONSTITUTION:A laser beam 34 is transmitted through a beam splitter 35, reflected by a galvanometer mirror 36 arranged on a conjugate position with an pupil of an objective lens in the Y direction and then reflected by a mirror 39 in the X direction to scan sample in the X-Y direction through an objective lens 42. The reflected light of the sample is returned and reflected to/by the splitter 35, the zeroth-order light out of the detected beam is cut off by inserting a doucer 53 forming a light shielding small black point on a glass plate on a converging position due to a condenser lens 51 to obtain a dark field image and then a differential image is obtained by arranging detectors 54, 55 symmetrically about the the optical axis. Thus, the dark field image can be obtained at a low cost.

Description

[Detailed description of the invention] Yonaooka-mi The present invention relates to a scanning optical microscope.

Prior Art Conventional microscopes use a light source and an appropriate condenser lens to illuminate the entire observation area of a specimen as uniformly as possible, and an objective lens to magnify the specimen image for observation or photography through an eyepiece. However, because the entire observation area is illuminated, there are many flares, etc., and despite conventional efforts, it is impossible to obtain the theoretical resolution limit, and low-contrast samples, etc. It was very difficult to see. In addition, when performing special microscopy methods such as phase contrast method and differential interferometry to observe phase objects, or when performing dark field observation, special expensive optics dedicated to each microscopy method are required. Parts were needed.

Therefore, in order to solve one of the drawbacks of the above-mentioned conventional optical microscope, which is that the theoretical resolution limit cannot be achieved due to flare etc., a point light projection type microscope has been proposed. This method uses a point light source to irradiate the observation sample in a point-like manner, and then the i3 excess light or reflected light from the irradiated sample is re-imaged into a point-like image, and a detector with a pinhole aperture is used to obtain density information of the image. This method is almost the same as the small hole/improved photometry method currently used in microdensitometers. However, this only provides concentration information at the point irradiated with point light, so the sample is
It was designed to perform mechanical raster scanning in the two dimensions of Y and form an image on a CRT in synchronization with it for observation.

This microscope will be explained based on an example described in US Pat. No. 3,013,467. FIG. 14 is a schematic diagram of this, in which a point light source is formed by the light 1fG (1) and the pinhole 2, and the point light source is imaged as a point on the sample 4 by the objective lens 3 whose aberrations are well corrected. , the sample 4 is illuminated.Furthermore, the point light on the sample 4 is re-imaged as a point on the pinhole 6 by the condenser lens 5 whose aberrations are well corrected, and the formed point light is passed through the pinhole 6. On the other hand, the drive circuit 8 scans the sample 4 like a Lasque scan on a television.
- Mechanically scan in two dimensions of Y.

In this way, if the image signal from the detector 7 is displayed on the storage type CRT 9 which is converted into a periodic signal by the drive circuit 8,
The image of sample 4 can be observed.Since the sample is illuminated with point light and the signal is detected with a point detector, images with less flare can be obtained compared to ordinary microscopes. This results in improved resolution.

Therefore, in such a scanning optical microscope, the 15th
As shown in the figure, a method has been proposed in which the reflected light reflected by a sample is collected by a fiber placed around the sample and guided to a detector for dark-field microscopy. This is because light from a point light source IO such as a laser is irradiated onto the sample 12 by the objective lens 11, and the light 13 scattered by the sample 12 is collected by an optical fiber appropriately placed around the sample 12 or the objective lens 11. The light was collected by a light device 14 and detected by a detector 15, but this method requires expensive optical components using optical fibers when performing dark field microscopy.
In view of the above-mentioned problems, it is an object of the present invention to provide a scanning optical microscope that can realize dark-field microscopy at low cost.

A scanning optical microscope according to the present invention includes a light source, an objective lens that focuses light emitted from the light source onto an object, and a detector that receives light from the object. By providing a means for removing the O-order diffracted light of the detection light in the optical system, it is possible to simply use inexpensive optical components such as a light shielding plate.

, La, fi Below, the present invention will be described in detail based on an illustrated embodiment. FIG. A laser beam 16 from a light source is transmitted to a beam splinter 17. The light passes through the objective lens 18 and is focused onto the sample 19. The light (detection beam 24) reflected and scattered by the sample 19 passes through the objective lens 18° beam splitter 17 and is focused by the condenser lens 20 to form a point image 21. The point image 21
The O-th order diffracted light or the light in the central part is removed by a light shielding plate 22, and the light is detected by a detector 23 located behind the shielding plate 22.

The second diagram shows the second method, and is an example where the width of the detection beam 24 is wider than the width of the laser beam 16.

In FIGS. 1 and 2, it is desirable that the size of the light shielding plate 22 be equal to or larger than the size of the Airy disk.

FIG. 3 is a diagram showing the third method, which is sample 19.
Sample 19 in detection beam 24 reflected or scattered from
This is an example in which the components directly reflected by the light are removed by the light shielding plate 25. In this case, the condenser lens 20 is not necessarily required.

As described above, by providing a means (shading plate) for removing the 0th-order diffracted light component of the detection light, that is, the direct reflection light from the sample, from the detection light, dark field microscopy can be realized at low cost in a scanning optical microscope. was completed.

Next, FIG. 4 shows an optical system of a first embodiment employing the above first method. A laser beam 34 from a laser light source, which will be described in detail later, passes through a beam splitter 35 and enters a galvanometer mirror 36 of an optical deflector provided at a position conjugate with the pupil position of the objective lens. Here, laser beam 5
4 is deflected and scanned in the Y direction by a zero-order pupil transmission lens 37.degree. 38, and enters a galvanometer mirror 39, which is also provided at a position conjugate with the pupil position of the objective lens. Here, the laser beam 34 is deflected and further scanned in the X direction. In addition, on the drawing, galvanometer mirror 3
6.39 is shown as if the laser beam 34 is deflected in the same direction, but in reality, the laser beam 34 is scanned in the Y and It is now possible to scan. The two-dimensionally scanned laser beam 34 is transmitted to the pupil projection lens 40. The light passes through the imaging lens 41 and enters the pupil of the objective lens 42 .

Then, a laser spot limited by diffraction is generated on the sample 43, and the laser spot moves the sample 43 in the X-Y direction.
Scan in two dimensions. Here, when performing scanning observation, the prism 44 for visual observation and the beam splinter 45 for epi-illumination are removed from the optical path. Otherwise,
This is dangerous because the laser beam may enter your eyes, and it can also cause flare. The pupil projection lens 40 is a lens that projects the pupil of the objective lens onto the objective mirror 39, but since the pupil position of the objective lens may vary greatly depending on the type, the pupil position of each type of objective lens may vary. The structure is such that a plurality of types of pupil projection lenses that can accurately project images onto the galvanometer mirror 39 can be easily exchanged. Of course, a zoom type lens that adjusts the pupil projection distance while keeping the image position unchanged may also be used.

Next, detection in a transmission system will be explained. The laser beam that has scanned and passed through the sample 43 is passed through the condenser lens 46. 13 Beam splitter 4 for overillumination for visual observation
7 and is detected by detectors 48 and 49. Note that the detectors 48, 49 are arranged symmetrically with respect to the optical axis at positions conjugate with the pupil. And detectors 48 and 4
When an image is formed using the sum of 9 signals, fF! A normal transmitted image can be obtained, and a differential image can be obtained by using the signal difference.Also, if both signals are weighted and the sum and difference are calculated, or if only one side of No. 18 is used, it is possible to obtain a differential image. Needless to say, an image in which the image and the differential image overlap can be obtained.

Next, a case of detection using a reflection system, such as when observing an Ic specimen, will be explained. The light beam is reflected by the sample 43 and passes through the objective lens 42 . Imaging lens 41, pupil projection lens, galvanometer mirror 39° pupil transmission lenses 38, 37. Beam splitter 35 through galvanometer mirror 36
come back to.

In other words, the entire beam 50 returns through the same optical path in the opposite direction as when it entered sample 1443. The detection beam 50 reflected by the beam splinter 35 is focused into a point by the condensing lens 51. A pinhole is placed at this position. A high-resolution screen is obtained by inserting a light shielding plate 52 and detecting it with the detector behind it.Furthermore, a sunspot light shielding plate 53 with small black spots on the glass plate is inserted to detect the focused detection beam. When the zero-order light is cut off, a dark-field image is obtained.Also, since the detectors 54 and 55 are installed symmetrically with respect to the optical axis where the light beam spreads, a differential image is obtained.

Here, it will be explained that when using a method of scanning a light beam, dark field microscopy according to the present invention becomes possible by arranging a light deflection member such as a galvanometer mirror at the pupil position of the objective lens. FIG. 5 is a diagram showing the arrangement of the light deflection members in consideration of the pupil, in which a light beam 60 from a laser, which is considered to be an equivalent point light source, passes through a beam splitter 61 and enters a first light deflector 62. do. This optical deflector 62
is placed at a pupil position conjugate with the pupil 64 of the objective lens 63.

Without deflection, the light beam 60 travels along an optical axis 65. When performing deflection, that is, when scanning the light beam 60, since the light deflector 62 is provided at the pupil position, the direction of the light beam 60 coincides with the off-axis chief ray 66, and the light beam 60
These zero-order light beams, whose center is also lost to the off-axis principal ray 66, pass through pupil transmission lenses 67 and 68 and enter a second optical deflector 89 disposed at the pupil position. Assuming that the optical deflector 69 performs scanning in the X direction in two-dimensional scanning,
The previous optical deflector will scan in the Y direction. X-Y
If you use an optical deflector that can deflect in both directions,
One optical deflector is sufficient. The light beam two-dimensionally scanned by the optical deflectors 62 and 69 is made incident on the pupil 64 of the objective lens 63 by the pupil projection lens 70 and the imaging lens 71. Since the direction and center of the off-axis light beam formed by the optical deflectors 62 and 69 coincide with the off-axis principal ray 66, the off-axis light beam also accurately enters the pupil 64 of the objective lens 63. . These light beams then produce point lights on the sample 72 that are limited by diffraction by the objective lens 63. By scanning the sample 72 two-dimensionally in the X-Y direction by the optical deflectors 62 and 69, the point light scans the sample 72 two-dimensionally.

The light beam reflected from the sample 72 passes through the objective lens 63 and its 1lI64, and further passes through the imaging lens 61 to form an image at one end. This imaging plane is the plane on which images are observed with a normal optical microscope. Furthermore, the light beam is returned onto the optical deflector 69 by the pupil projection lens 70. In this way, the reflected beam returns to the zoom splinter 61 through exactly the same path as when it entered the sample, and is extracted by the beam splitter 61 to become the detection beam 77. The reflected beam passes through the optical deflector 6
Since it passes through 9.62 and returns, the detection beam 77 does not move even if it scans off-axis. Therefore, the detection beam 7
7 can be condensed into a point by a condensing lens 78.

Therefore, if a sunspot-like 8-light object 80 is provided at this dot-like focused position 79, the dark-field image can easily be ttl! Can be measured.

Note that 81 and 82 are detectors placed at positions where the light beam is spread.

Next, the detection section will be explained in detail. The detectors 54 and 55 shown in FIG. 4 are placed at the divergent locations of the light beams, and the differential image obtained as a difference signal at these locations is related to the phase of the sample. These two detectors 5
4.55 to the position where the light is focused by the condenser lens 51. If the point-shaped light is divided and detected by two detectors 54 and 55 to obtain a difference signal, a differential image with respect to the amplitude of the sample can be obtained. In this case, it is necessary to make the gap between the two detectors 54.55 very small in order to divide the small focused spot, but the gap between the two detectors 54.55
It is difficult to reduce this gap by lining up the 6th
It is preferable to use a prism mirror 83 as shown in the figure.

In addition, when a photomultiplier tube is used for the detectors 54 and 55, the spread of the luminous flux is ili! Alternatively, when detecting at the pupil position, a configuration as shown in FIG. 6 is preferable.

Also, interference i! An It m mirror can be constructed. Fourth
In the figure, a mirror 84, which is normally removed from the optical path, is placed in the optical path. A laser beam 34 from a laser light source 33 is reflected by a beam splitter 33 and then reflected by a mirror 84. Further, the component transmitted through the beam splitter 35 overlaps with the detection beam 50 reflected from the sample 43 and returned. If the pinhole 52 is placed in the optical path and adjusted so that both beams pass through the pinhole 52, interference fringes can be easily obtained.

Moreover, a polarizing microscope can also be constructed. In FIG. 4, a linearly polarized beam from a laser light source 33 is projected onto a sample, and is detected by a detector through a polarizing plate 85 or 86. Further, by changing the polarization direction of the polarizing plate 85 or 86, more different polarization states can be observed. Further, the laser beam from the laser light source 33 may be circularly polarized.

Fluorescence observation can also be performed. For example, A,, ° laser 4
It is also possible to excite the FITC-colored sample with a wavelength of 88 nm and observe the fluorescence. In this case, it is sufficient to insert a barrier filter 87 into the detection beam. Needless to say, this observation method can be combined with the various microscopy methods described above.

In FIG. 5, reference numeral 88 is an epi-illuminated light source for visual observation using a normal microscope, and a beam splitter 45 is placed in the optical path.
Prism 44. It is designed to be observed through an eyepiece lens 89. 90 is a light source for transmitted illumination. In addition, the i! ff Special microscopic examination can also be performed. It goes without saying that special microscopy can be performed using these optical components as they are during scanning-type observation.

FIG. 7 is a detailed view of the optical system of the laser light source 33, in which case two lasers 94°95 are used. 96.
97 is an acousto-optical modulator that modulates the intensity of the laser beam. 98.99 is a condenser lens, 100.101 is a spatial filter (pinhole), and 102 and 103 are collimators that convert the beam diameter into an appropriate diameter. The optical path of the light that has passed through the collimators 102 and 103 is selected by a switching mirror 104 to form a laser beam 34 in the figure. Note that the beam diameter variable converter lens (not shown in FIG. 7) can change the light intensity distribution incident on the pupil from a uniform distribution to a Gaussian distribution, and thereby the focal point a degree during laser beam scanning observation can be changed. You can change the

FIG. 8 shows the optical system of the laser light source when a color image is obtained using a scanning laser W4 mirror. 105,
106 and 107 are respectively the previous laser light source (A, ' laser, wavelength 488na+), green laser light source (A, ' laser, wavelength 514.50 m), and red laser light source (H, -H
, laser, wavelength 633 nm), and the laser beams emitted from these are synthesized into one beam using Guikroi/Cumira-108, 109, and are incident on the spatial filter 111 via the L and 'tL optical lenses 110, and then the collimator 11
2 to form a laser beam 34. In the case of Fig. 7, the two lasers are combined after passing through a spatial filter, so adjustment is easy, but in the case of Fig. 8, the three lasers are combined and then passed through the spatial filter. Therefore, it is difficult to make adjustments. However, color shift can be prevented by eliminating three-color point light sources.

Figure 9 shows a color image of RlG,B using the light source in Figure 8.
(This shows the optical system for obtaining No. 8.

The detection beam 50 is condensed using a condensing lens 71 to form a point-like beam, and detection using a pinhole 52 is possible. After that, the beam is sent to the guichroic mirror 113.
At step 114, the light is divided into three colors, R, G, and B, and each color is detected by a detector.

FIG. 1O shows a block diagram of an electric circuit when a microcomputer is used. 115 is a galvanometer control circuit controlled by a microcomputer 116, which controls two galvanometers 119.12 for X deflection and Y deflection via servo amplifiers 117.118.
Operate 0. Operation modes include X-Y two-dimensional scanning, star scanning, and scanning only in the X direction for obtaining normal images as a scanning laser microscope. Alternatively, there is a coordinate designation mode that irradiates the laser to only one arbitrary point in the image. The signals of the transmission system detectors 48 and 49 are sent to the preamplifier 1.
21, 122 and offset.

Amplifiers 123 and 124 with variable gain adjustment are provided to adder/subtractor 125. Adder/subtractor 125 adds or subtracts two signals, and inputs the result to multiplexer 126. Signals from detectors 54 and 55 of the 0 reflection detection system are sent to multiplexer 1 through a similar circuit.
A multiplexer 126 that is input to the input signal 26 selects a transmission system signal and a reflection system signal according to a command from the microcomputer 116. The image signal selected by the multiplexer 126 is stored in the frame memory 128 by the sample hold/A/D conversion circuit 127 which is cycled by the galvano control circuit 115. The stored image signal is sent to the monitor 13 through the display D/A conversion circuit 129.
Displayed as 0. Reference numeral 131 is an amplifier used to form an image by observing physical phenomena caused by light scanned onto a sample.
The signal is stored in the frame memory 133 through the /Di conversion circuit 132 and displayed on the monitor 130. Examples of forming images by observing physical phenomena caused by light scanned onto a sample include observing the photoexcited current generated when light is incident on the P N i1 junction of a semiconductor, or using photoacoustic waves. There are things that can be detected, but in this case, it can be displayed in pseudo color by superimposing it on a normal image.

Reference numeral 134 denotes an acousto-optic modulation element drive circuit, which drives the acousto-optic modulation element 96. This is done by using the mouse 135 to arbitrarily select a point on the image displayed on the monitor 130 according to the mark displayed on the monitor 130, fixing the position of the galvanometer 119° 120 at that coordinate, and instantaneously Used when irradiating laser light to Additionally, this can be used when making holes in microscopic objects such as cells using laser light. That is, an image is displayed using a weak output observation laser, a position where a hole is to be made is specified using the mouse 135, and a powerful laser is instantaneously irradiated using an acousto-optic modulator. Note that +36 is an image processing unit connected to the frame memory, and 137 is a console of the microcomputer 116.

FIGS. 11A and 11B3 show the case where a low-contrast image signal 13B is changed to a high-contrast image signal 139 using amplifiers 121 and 122 with offset and variable gain adjustment. There is.

FIGS. 12(A) and 12(B) show a front view and a side view, respectively, of the optical system of the second embodiment, and this is an example in which an acousto-optic deflector is used as an optical deflector.

A laser beam 140 from a light source enters an acousto-optical deflection element L41 placed at the pupil position. Acoustic optical deflection element 141
The beam 142 diffracted by the adjusting mirror 143
The beam 144 is reflected by the pupil transmission lens 1
45. Beam 144 reflected by mirror 146 passes through pupil transmission lens 147 and becomes beam 14B. The laser beam 148 is diffracted into a beam 150 by an acousto-optic deflection element 149 placed at the pupil position.

Beam 150 is reflected by adjustment mirror 151 to become beam 152 and enters pupil projection lens 153 . The beam that has passed through the pupil projection lens 153 enters the pupil of an objective lens (not shown), producing a spot on the sample. Here, the laser beams 140, 142, 144, 1 in the figure
48,150°152 represents the center of the light beam deflected as axial light, and corresponds to the so-called optical axis.

As shown in FIG. 13, the acousto-optic deflection elements 141 and 149 consist of a medium 158 that transmits sound waves and a piezoelectric element 159. When a high frequency voltage (100 MI (around z) is applied to the piezoelectric element 159, sound waves are generated within the medium 158. When the laser beam 160 is incident on the diffraction grating, the 0th order diffraction light 16
1 and primary diffracted light 162 are generated. By changing the frequency of the high frequency wave applied to the piezoelectric element, the direction of the first-order diffracted light can be continuously changed from direction 163 to direction 164. This is the optical deflection method in the acousto-optic deflection element. Therefore, the direction corresponding to the optical axis is 162, the off-axis direction is 163, and the direction corresponding to the optical axis is 164. Therefore, in FIG. 12, the off-axis light is deflected by the acoustic light deflector 141 in directions 154 and 155 above and below the optical axis 142. Note that the pupil transmission lenses 145, 147, and 153 correspond to the pupil transmission lenses 67°, 68, and 70 in FIG. 5, respectively. The two acousto-optical deflection elements 141 and 149 placed at the pupil position correspond to the optical deflectors 62 and 69 in FIG.

Scan the laser beam in the Y direction. As a result, the laser beam is scanned in a raster pattern over the sample.

From the viewpoint of adjusting the optical system, when the optical system is arranged three-dimensionally, it is desirable that the optical axes of the optical system are perpendicular or parallel. However, the acousto-optic deflection element 14
1 has an angle θ which is not 90′ with respect to the incident light 140. For example, the angle θ is about 4°. Then, the laser beam is scanned while changing the diffraction angle by about ±2° before and after this. Therefore, in order to keep the optical axis of the optical system perpendicular, it is preferable to provide an adjustment mirror 143 to reflect the diffracted beam 142 and make it enter the pupil transmission lens 145 as a laser beam 144 perpendicular to the incident laser beam 140. . This includes an acousto-optical deflection element 149 and an adjustment mirror 15.
The same holds true for the relationship 1 and the relationship between the laser beam 148 and the laser beam 152. Note that the lens 156 is a cylindrical lens that corrects the lens effect of the acousto-optical deflection element 149. By providing the acousto-optical deflection element at the pupil position in this way, it is possible to set up a light beam scanning optical system that takes the pupil into consideration.

The light reflected from the sample passes through an objective lens (not shown) and a pupil projection lens 153. Acoustic optical deflection element 149, pupil transmission lens 147.145. The light passes through the acousto-optical deflection element 141 and returns to the detection system (not shown). The detection system has a configuration similar to that shown in FIG. 5, and is separated from the laser input system by a beam splitter 61 and condensed onto a focal point 79 by a condensing lens 78. By providing a pinhole at this position, a high resolution image can be obtained, by providing a sunspot plate a dark field image, and by using the divided detectors 81 and 82 a differential image can be obtained.

Moreover, if the processing circuit is configured as shown in FIG. 10, various types of processing can be performed. However, 115 is an acousto-optical deflection element control circuit, 117.118 is a high frequency generation circuit, and 119.
120 is an acousto-optical deflection element.

As mentioned above, by using an acousto-optic deflection element, TV
It is now possible to scan a laser beam at a speed equivalent to that of the previous one, and by arranging the acousto-optical deflection element with the pupil in mind, differential images can be easily obtained using two detectors even in a scanning optical microscope that scans a laser beam. High-resolution images and dark-field images can also be easily obtained. Furthermore, the above configuration was made possible not only by using the acousto-optic deflection element for laser beam projection, but also by passing the reflected light through the acousto-optic deflection element again.

In addition to mirrors and acousto-optic elements, various deflectors such as prisms and glass locks may be used as the light deflecting member.

Further, in the above description, an example of a light beam scanning type microscope in which a laser beam is scanned is shown, but it goes without saying that a scanning type microscope in which a laser beam is fixed and a stage is scanned may also be used.

As mentioned above, the scanning microscope according to the present invention has the important advantage of being able to realize a dark field microscope at low cost.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing one method of dark field microscopy in a scanning optical microscope according to the present invention, FIGS. 2 and 3 are diagrams showing the second method and third method, respectively, and FIG. 4 is a diagram showing the above method. FIG. 5 is a diagram showing the arrangement of the light deflection member in consideration of the pupil;
6/UA is a diagram showing a modification of the detection system of the first embodiment, FIG. 6 is a diagram showing the optical system of the laser light source, and FIG. 8 is a diagram showing the optical system of the laser light source when obtaining a color image. Figure, No. 9
10 is a block diagram of the electric circuit of the first embodiment, FIG. 11 is a graph showing enhancement of the contrast of the image signal, and FIG. 12 is a diagram showing the detection system for obtaining a color image. FIG. 13 is a cross-sectional view of an acousto-optical deflection element, FIG. 14 is a diagram showing an optical system of a conventional example, and FIG. 15 is a diagram showing a dark field observation method in the conventional example. be. 16... Laser beam, 17... Beam splinter, 1B... Objective lens, 19... Sample, 2
0... Condensing lens, 21... Point-like image, 22...
... light shielding plate, 23 ... detector, 24 ... detection beam. O1EJ 1st Day 28 Figure 4 I! 7 Figure 18 Figure 19 Figure 110 Figure 11 (A) (B) To! Figure 14 Figure 15 Procedural amendment (voluntary) 6 1985
June 27th 1, Incident Display Patent Application No. 60-62264 2, Issued
Name of scanning optical microscope 4, generation
Rito 5-19 Shinbashi, Minato-ku, Tokyo 105
Contents of the amendment +11 Correct "periodicized with a periodic signal" on page 3, line 15 of the specification to "j synchronized with a periodic signal." (2) "Not necessary" on page 6, line 9 of the specification is corrected. "
It is not necessary, and the method shown in FIGS. 1 and 3,
It goes without saying that the methods shown in FIG. 3 and FIG. 3 may be implemented at the same time.
is corrected as "r-pupil projection lens 40". ) "Obtained" on page 8, line 17 of the specification is "obtained". Correct it to 1. (5) The “pupil projection lens” on page 9, line 4 of the specification is r.
Pupil projection lens 40" is corrected. (6) "Visual field speculum becomes possible" on page 1, line 1 of the specification is changed to "the performance of visual field speculum is further improved."
"Light deflector 89" in line 4 is corrected as "light deflector 69J.") "Place for obtaining an image" in line 12 on page 15 of the specification is changed to "Place for obtaining image." rA r' on the 14th line of the same page
The laser, wavelength 488 nmJ is corrected to 'He-Cd radar, wavelength 441.6 nm.' (8) In the drawings, Figure 4, Figure 1O, and Figure 12 (A
) shall be corrected as attached. ;1'4 Cause S49 Figure 10 Figure 12 (A) Intermediate procedural amendment (method) % formula % ■, Indication of case Japanese Patent Application No. 60-62264 2, Title of invention Scanning optical microscope 4, Agent Person 196, Shinbashi 5, Minato-ku, Tokyo 105, column for a brief explanation of the drawings in the specification subject to amendment. 7. Contents of the amendment (11. "Figure 6" on page 24, line 16 of the specification is corrected to "Figure 7 j.

Claims (1)

[Claims] (1) In a scanning optical microscope that has a light source, an objective lens that focuses the light emitted from the light source onto an object, and a detector that receives the light from the object, the O-order of the detected light is in the detection optical system. A scanning optical microscope characterized by having a means for removing folded light.