JPS6236538U - - Google Patents
Info
- Publication number
- JPS6236538U JPS6236538U JP12690285U JP12690285U JPS6236538U JP S6236538 U JPS6236538 U JP S6236538U JP 12690285 U JP12690285 U JP 12690285U JP 12690285 U JP12690285 U JP 12690285U JP S6236538 U JPS6236538 U JP S6236538U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- performs
- centering
- positioning device
- coarse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12690285U JPS6236538U (sv) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12690285U JPS6236538U (sv) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236538U true JPS6236538U (sv) | 1987-03-04 |
Family
ID=31021142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12690285U Pending JPS6236538U (sv) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236538U (sv) |
-
1985
- 1985-08-20 JP JP12690285U patent/JPS6236538U/ja active Pending