JPS6236075U - - Google Patents

Info

Publication number

JPS6236075U

JPS6236075U JP12096585U JP12096585U JPS6236075U JP S6236075 U JPS6236075 U JP S6236075U JP 12096585 U JP12096585 U JP 12096585U JP 12096585 U JP12096585 U JP 12096585U JP S6236075 U JPS6236075 U JP S6236075U

Authority

JP

Japan

Prior art keywords

gas

reactor

vapor phase

analysis device

phase growth

Prior art date

1985-08-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007789 gas Substances 0.000 claims description 3
• 239000012495 reaction gas Substances 0.000 claims description 3
• 238000004868 gas analysis Methods 0.000 claims description 2
• 238000001947 vapour-phase growth Methods 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 description 1
• 230000006698 induction Effects 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1