JPS6235349U - - Google Patents
Info
- Publication number
- JPS6235349U JPS6235349U JP12757385U JP12757385U JPS6235349U JP S6235349 U JPS6235349 U JP S6235349U JP 12757385 U JP12757385 U JP 12757385U JP 12757385 U JP12757385 U JP 12757385U JP S6235349 U JPS6235349 U JP S6235349U
- Authority
- JP
- Japan
- Prior art keywords
- developer
- resist
- processed
- heating
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000008016 vaporization Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12757385U JPS6235349U (enExample) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12757385U JPS6235349U (enExample) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6235349U true JPS6235349U (enExample) | 1987-03-02 |
Family
ID=31022453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12757385U Pending JPS6235349U (enExample) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6235349U (enExample) |
-
1985
- 1985-08-20 JP JP12757385U patent/JPS6235349U/ja active Pending