JPS6235349U - - Google Patents
Info
- Publication number
- JPS6235349U JPS6235349U JP12757385U JP12757385U JPS6235349U JP S6235349 U JPS6235349 U JP S6235349U JP 12757385 U JP12757385 U JP 12757385U JP 12757385 U JP12757385 U JP 12757385U JP S6235349 U JPS6235349 U JP S6235349U
- Authority
- JP
- Japan
- Prior art keywords
- developer
- resist
- processed
- heating
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000008016 vaporization Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
Description
図面は、この考案のレジスト現像装置の１実施
例を示し、第１図は切断正面図、第２図は一部の
平面図である。
１……容器、４……現像液、５……ヒータ、７
……マスク基板、９……レジスト膜、１０……基
板ホルダ。
The drawings show one embodiment of the resist developing device of this invention, with FIG. 1 being a cutaway front view and FIG. 2 being a partial plan view. 1... Container, 4... Developer, 5... Heater, 7
...Mask substrate, 9...Resist film, 10...Substrate holder.
Claims (1)
して蒸気化する加熱手段と、表面のレジスト膜に
潜像の形成された被処理体と、前記被処理体を前
記現像液の蒸気中に保持した保持手段とを備えた
レジスト現像装置。 A developer poured into a container, a heating means for heating and vaporizing the developer, an object to be processed on which a latent image is formed on the resist film on the surface, and the object to be processed is placed in the vapor of the developer. A resist developing device comprising: a holding means held by a resist member;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12757385U JPS6235349U (en) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12757385U JPS6235349U (en) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6235349U true JPS6235349U (en) | 1987-03-02 |
Family
ID=31022453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12757385U Pending JPS6235349U (en) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6235349U (en) |
-
1985
- 1985-08-20 JP JP12757385U patent/JPS6235349U/ja active Pending