JPS6235277B2 - - Google Patents
Info
- Publication number
- JPS6235277B2 JPS6235277B2 JP8738878A JP8738878A JPS6235277B2 JP S6235277 B2 JPS6235277 B2 JP S6235277B2 JP 8738878 A JP8738878 A JP 8738878A JP 8738878 A JP8738878 A JP 8738878A JP S6235277 B2 JPS6235277 B2 JP S6235277B2
- Authority
- JP
- Japan
- Prior art keywords
- high voltage
- discharge
- voltage
- pulse
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000001052 transient effect Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
Description
【発明の詳細な説明】
本発明は、ガスレーザ装置、特に放電路を二系
統以上有するパルス出力ガスレーザ装置の改良に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a gas laser device, particularly a pulse output gas laser device having two or more discharge paths.
従来、パルス出力のガスレーザ装置、たとえば
炭酸ガスレーザ装置は第１図に示すように、レー
ザ管１の中にアノード２とカソード３，４を設け
放電路を２系統有するようにしている。カソード
３，４とアース間にはバラスト抵抗７，８が接続
されており、アノード２とアース間に高圧直流電
源６が接続されている。この高圧直流電源６には
パルス発生器１３が接続され、高圧直流電源６に
パルス電圧を供給している。いま、パルス発生器
１３からパルスが供給されると、高圧直流電源６
は数kVから数10kVまで電圧が上昇し、レーザ管
１のアノード２、カソード３，４間で放電を開始
する。その際放電開始時の過渡現象によりバラス
ト抵抗７，８に過大電流が流れるため、レーザ管
１のカソード３，４は10数kVの高電圧となり、
カソード３，４とミラー５，５′との耐圧が破れ
て放電が起りカソード部品、ミラー等の劣化を招
くという問題があつた。また高電圧直流電源６は
パルスが供給されてから数10kVになるまでに約
50〜100ms程度かかり、放電開始までに相当の時
間を要すること、さらに各放電路の放電電流は、
各放電路の不均一性により放電路ごとに異なるた
め、レーザ出力が不安定となるなどの欠点があつ
た。 BACKGROUND ART Conventionally, a pulse output gas laser device, for example, a carbon dioxide laser device, has an anode 2 and cathodes 3, 4 disposed in a laser tube 1, and has two discharge paths, as shown in FIG. Ballast resistors 7 and 8 are connected between the cathodes 3 and 4 and the ground, and a high voltage DC power supply 6 is connected between the anode 2 and the ground. A pulse generator 13 is connected to this high voltage DC power supply 6 and supplies pulse voltage to the high voltage DC power supply 6. Now, when a pulse is supplied from the pulse generator 13, the high voltage DC power supply 6
The voltage increases from several kV to several tens of kV, and discharge begins between the anode 2 and cathodes 3 and 4 of the laser tube 1. At this time, an excessive current flows through the ballast resistors 7 and 8 due to a transient phenomenon at the start of discharge, so the cathodes 3 and 4 of the laser tube 1 become at a high voltage of several tens of kV.
There was a problem in that the withstand voltage between the cathodes 3, 4 and the mirrors 5, 5' was broken and discharge occurred, leading to deterioration of the cathode parts, mirrors, etc. In addition, the high voltage DC power supply 6 has a voltage of about 10 kV after the pulse is supplied.
It takes about 50 to 100ms, and it takes a considerable amount of time to start the discharge, and the discharge current of each discharge path is
Since each discharge path is different due to non-uniformity of each discharge path, there are drawbacks such as instability of laser output.
本発明の目的は放電開始の遅れが少なく、かつ
カソード電圧が規定値以上に上昇しないように制
御され、レーザ出力も安定でカソード部品、ミラ
ー等の劣化も起り難いパルス出力のガスレーザ装
置を提供することにある。 An object of the present invention is to provide a pulse output gas laser device in which there is little delay in the start of discharge, the cathode voltage is controlled so as not to rise above a specified value, the laser output is stable, and deterioration of cathode parts, mirrors, etc. is unlikely to occur. There is a particular thing.
本発明によれば、放電路を二系統以上有するレ
ーザ装置において、放電路ごとのカソード側に定
電流回路を接続し、アノード側には高圧パルス電
源と高圧直流電源とを直列に接続し、定電流回路
と高圧パルス電源に同期パルスを供給するための
パルス発生器を接続した構成を有し、放電開始の
時間遅れを少なくし、放電開始持のカソード側に
おける高電圧の発生を防止するとともに放電中は
各放電路が一定電流になるようにしたパルス出力
ガスレーザ装置が得られる。 According to the present invention, in a laser device having two or more discharge paths, a constant current circuit is connected to the cathode side of each discharge path, and a high voltage pulse power source and a high voltage DC power source are connected in series to the anode side. It has a configuration in which a pulse generator for supplying synchronous pulses is connected to a current circuit and a high-voltage pulse power supply, which reduces the time delay in starting discharge, prevents the generation of high voltage on the cathode side of the discharge start terminal, and A pulse output gas laser device is obtained in which each discharge path has a constant current.
以下、第２図に示した実施例について本発明を
具体的に説明する。第２図のレーザ管１は従来と
同様にアノード２とカソード３，４を有し、放電
路が２系統形成される。そしてカソード３，４と
アース間にはそれぞれ高耐圧の３極真空管を用い
た定電流回路１１，１２が接続されており、また
アノード２とアース間には一組の直列接続された
高圧パルス電源１０と高圧直流電源６とが接続さ
れている。そして定電流回路１１，１２と高圧パ
ルス電源１０にはパルス発生器１３の出力が供給
される。 The present invention will be specifically described below with reference to the embodiment shown in FIG. The laser tube 1 shown in FIG. 2 has an anode 2 and cathodes 3, 4 as in the conventional case, and two discharge paths are formed. Constant current circuits 11 and 12 using high-voltage triode vacuum tubes are connected between the cathodes 3 and 4 and the ground, respectively, and a set of high-voltage pulse power supplies connected in series is connected between the anode 2 and the ground. 10 and a high voltage DC power supply 6 are connected. The output of the pulse generator 13 is supplied to the constant current circuits 11 and 12 and the high voltage pulse power supply 10.
このような構成において、高圧電源６は、レー
ザ管１のアノード２、カソード３，４間の放電維
持電圧約10数kVより低い10kV程度に設定してお
き、パルス発生器１３よりパルスを供給すると、
高圧パルス電源１０が働いて、そのパルス電圧が
直流電圧に重畳されてアノードに供給される。こ
のため出力電圧は約数10μＳ〜数100μＳで10数
kV〜数10kVまで上昇し、レーザ管１のアノード
２とカソード３，４間で放電が開始する。そして
放電を開始した時の過渡現象により、定電流回路
１１，１２のカソード３，４間に過大電圧が発生
しそうになるが、パルス発生器１３の出力が高圧
パルス電源への供給パルスと同期して定電流回路
１１，１２にも供給されているので、過渡現象に
応じた過渡電流が定電流回路１１，１２に流れ、
レーザ管１のカソード３，４間の電圧は規定値に
制御され、レーザ管１のアノード２、カソード
３，４間はパルス発生器１３の出力に応じて、安
定に断続放電し、安定なパルスレーザ出力９が得
られる。 In such a configuration, the high-voltage power supply 6 is set to about 10 kV, which is lower than the discharge sustaining voltage of about 10-odd kV between the anode 2, cathode 3, and 4 of the laser tube 1, and when pulses are supplied from the pulse generator 13. ,
The high voltage pulse power supply 10 is activated, and the pulse voltage is superimposed on the DC voltage and supplied to the anode. Therefore, the output voltage is approximately several 10 μS to several 100 μS.
kV to several tens of kV, and discharge begins between the anode 2 and cathodes 3 and 4 of the laser tube 1. Then, due to a transient phenomenon when the discharge starts, an excessive voltage is likely to occur between the cathodes 3 and 4 of the constant current circuits 11 and 12, but the output of the pulse generator 13 is synchronized with the pulse supplied to the high voltage pulse power supply. Since the current is also supplied to the constant current circuits 11 and 12, a transient current corresponding to the transient phenomenon flows to the constant current circuits 11 and 12.
The voltage between the cathodes 3 and 4 of the laser tube 1 is controlled to a specified value, and a stable intermittent discharge occurs between the anode 2 and cathodes 3 and 4 of the laser tube 1 according to the output of the pulse generator 13, resulting in a stable pulse. A laser output of 9 is obtained.
以上説明したように、本発明によれば、レーザ
管１のアノード２、カソード３，４間の放電電流
が、定電流回路１１，１２によつて過渡的にも定
常的にも均一に保たれるので、レーザ出力９のモ
ードも安定に保たれ、安定なパルスレーザ出力９
が得られる。また、レーザ管１のカソード３，４
の電圧は規定値に制御されカソード３，４とミラ
ー５，５′との耐圧が破れることなく、カソード
部品ミラー等の劣化も起り難い。 As explained above, according to the present invention, the discharge current between the anode 2 and cathode 3, 4 of the laser tube 1 is kept uniform both transiently and steadily by the constant current circuits 11, 12. As a result, the mode of laser output 9 is also kept stable, and stable pulsed laser output 9 is maintained.
is obtained. In addition, the cathodes 3 and 4 of the laser tube 1
The voltage is controlled to a specified value, so that the withstand voltage between the cathodes 3, 4 and the mirrors 5, 5' is not broken, and deterioration of the cathode components, such as the mirror, is unlikely to occur.
第１図は従来のガスレーザ装置を示すブロツク
図、第２図は本発明のガスレーザ装置の一実施例
を示すブロツク図である。
１…ガスレーザ管、２…アノード、３，４…カ
ソード、５，５′…ミラー、６…高圧直流電源、
７，８…バラスト抵抗、９…レーザ出力、１０…
高圧パルス電源、１１，１２…定電流回路、１３
…パルス発生器。
FIG. 1 is a block diagram showing a conventional gas laser device, and FIG. 2 is a block diagram showing an embodiment of the gas laser device of the present invention. 1... Gas laser tube, 2... Anode, 3, 4... Cathode, 5, 5'... Mirror, 6... High voltage DC power supply,
7, 8...Ballast resistance, 9...Laser output, 10...
High voltage pulse power supply, 11, 12...constant current circuit, 13
...Pulse generator.
Claims (1)
おいて、前記放電路ごとのカソード側に定電流回
路を設けるとともに、アノード側に高圧パルス電
源と高圧直流電源を直列に接続し、前記定電流回
路と高圧パルス電源に同期パルスを供給するパル
ス発生器を接続してなるガスレーザ装置。1. In a gas laser device having two or more discharge paths, a constant current circuit is provided on the cathode side of each discharge path, and a high voltage pulse power source and a high voltage DC power source are connected in series on the anode side, and the constant current circuit and the high voltage pulse power source are connected in series to the anode side. A gas laser device consisting of a pulse generator connected to a power supply that supplies synchronous pulses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8738878A JPS5513970A (en) | 1978-07-17 | 1978-07-17 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8738878A JPS5513970A (en) | 1978-07-17 | 1978-07-17 | Gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5513970A JPS5513970A (en) | 1980-01-31 |
| JPS6235277B2 true JPS6235277B2 (en) | 1987-07-31 |
Family
ID=13913500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8738878A Granted JPS5513970A (en) | 1978-07-17 | 1978-07-17 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5513970A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4457122A (en) * | 1981-08-21 | 1984-07-03 | W. R. Grace & Co., Cryovac Div. | Vacuum packaging goods in heat shrinkable plastic bags using flexible diaphragms |
| CA1247515A (en) * | 1981-09-14 | 1988-12-28 | Richard R. Perdue | Method and apparatus for vacuum packaging goods in heat shrinkable plastic bags |
| US4550548A (en) * | 1983-05-26 | 1985-11-05 | W. R. Grace & Co., Cryovac Div. | Method and apparatus for vacuum packaging with preshrinking |
| JPS6358885A (en) * | 1986-08-29 | 1988-03-14 | Mitsubishi Electric Corp | Silent discharge type gas laser device |
| JPS6358884A (en) * | 1986-08-29 | 1988-03-14 | Mitsubishi Electric Corp | Silent discharge type gas laser device |
-
1978
- 1978-07-17 JP JP8738878A patent/JPS5513970A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5513970A (en) | 1980-01-31 |
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