JPS6234432U - - Google Patents
Info
- Publication number
- JPS6234432U JPS6234432U JP12569885U JP12569885U JPS6234432U JP S6234432 U JPS6234432 U JP S6234432U JP 12569885 U JP12569885 U JP 12569885U JP 12569885 U JP12569885 U JP 12569885U JP S6234432 U JPS6234432 U JP S6234432U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- semiconductor
- testing
- prober
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12569885U JPS6234432U (tr) | 1985-08-19 | 1985-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12569885U JPS6234432U (tr) | 1985-08-19 | 1985-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6234432U true JPS6234432U (tr) | 1987-02-28 |
Family
ID=31018822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12569885U Pending JPS6234432U (tr) | 1985-08-19 | 1985-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6234432U (tr) |
-
1985
- 1985-08-19 JP JP12569885U patent/JPS6234432U/ja active Pending