JPS6233159U - - Google Patents
Info
- Publication number
- JPS6233159U JPS6233159U JP12496685U JP12496685U JPS6233159U JP S6233159 U JPS6233159 U JP S6233159U JP 12496685 U JP12496685 U JP 12496685U JP 12496685 U JP12496685 U JP 12496685U JP S6233159 U JPS6233159 U JP S6233159U
- Authority
- JP
- Japan
- Prior art keywords
- flange
- screw
- tip
- positioning mechanism
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は実施例の斜視図、第２図はその方向
の分解斜視図、第３図ないし第５図はねじ受部の
正面図、第６図は全体の垂直断面図、第７図は従
来のＣＭＡの斜視図、第８図はその方向矢視図
である。
各図中、同一符号は同一または相当部分を示し
、１はＣＭＡ本体、６はフランジ、７はシヤフト
、８はベローズ、１１はホルダ、１２はねじ、１
３は溝、１４はねじ受部、１６はばねである。
Fig. 1 is a perspective view of the embodiment, Fig. 2 is an exploded perspective view in that direction, Figs. 3 to 5 are front views of the screw receiver, Fig. 6 is a vertical sectional view of the whole, Fig. 7 is A perspective view of a conventional CMA, and FIG. 8 is a view taken along the direction of the arrow. In each figure, the same reference numerals indicate the same or equivalent parts, 1 is the CMA body, 6 is the flange, 7 is the shaft, 8 is the bellows, 11 is the holder, 12 is the screw, 1
3 is a groove, 14 is a screw receiving portion, and 16 is a spring.
Claims (1)
を貫通して移動可能に伸びるシヤフト、この大気
側に設けられて被調整物と一体の動きをするホル
ダ、このホルダにねじ込まれてフランジ側に伸び
かつ直角方向に３個配置された調整用のねじ、お
よびこのねじの先端と係合しかつねじ込みによる
先端の移動を許容するようにフランジに固定され
たねじ受部を備えた真空装置における位置合せ機
構。 (2) ねじ受部がねじの先端と係合する溝を有す
るものである実用新案登録請求の範囲第１項記載
の位置合せ機構。 (3) シヤフトがフランジとの間にベローズを有
する実用新案登録請求の範囲第１項または第２項
記載の位置合せ機構。[Claims for Utility Model Registration] (1) A shaft extending movably from an object to be adjusted that is provided on the vacuum side through a flange, a holder that is provided on the atmosphere side and moves in unison with the object to be adjusted; Three adjustment screws that are screwed into this holder, extend toward the flange, and are arranged at right angles, and a screw that engages with the tip of this screw and is fixed to the flange to allow movement of the tip by screwing. A positioning mechanism in a vacuum device equipped with a receiving part. (2) The positioning mechanism according to claim 1, wherein the screw receiving portion has a groove that engages with the tip of the screw. (3) The positioning mechanism according to claim 1 or 2, wherein the shaft has a bellows between it and the flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12496685U JPH0425804Y2 (en) | 1985-08-14 | 1985-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12496685U JPH0425804Y2 (en) | 1985-08-14 | 1985-08-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6233159U true JPS6233159U (en) | 1987-02-27 |
| JPH0425804Y2 JPH0425804Y2 (en) | 1992-06-22 |
Family
ID=31017451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12496685U Expired JPH0425804Y2 (en) | 1985-08-14 | 1985-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425804Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11176376A (en) * | 1997-12-09 | 1999-07-02 | Jeol Ltd | Energy filter supporting device |
-
1985
- 1985-08-14 JP JP12496685U patent/JPH0425804Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11176376A (en) * | 1997-12-09 | 1999-07-02 | Jeol Ltd | Energy filter supporting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425804Y2 (en) | 1992-06-22 |