JPS6232531U - - Google Patents
Info
- Publication number
- JPS6232531U JPS6232531U JP12431285U JP12431285U JPS6232531U JP S6232531 U JPS6232531 U JP S6232531U JP 12431285 U JP12431285 U JP 12431285U JP 12431285 U JP12431285 U JP 12431285U JP S6232531 U JPS6232531 U JP S6232531U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- treatment
- tank
- processing
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 22
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12431285U JPS6232531U (pt) | 1985-08-13 | 1985-08-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12431285U JPS6232531U (pt) | 1985-08-13 | 1985-08-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6232531U true JPS6232531U (pt) | 1987-02-26 |
Family
ID=31016209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12431285U Pending JPS6232531U (pt) | 1985-08-13 | 1985-08-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6232531U (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09181034A (ja) * | 1995-12-18 | 1997-07-11 | Lg Semicon Co Ltd | 半導体ウェーハ洗浄装置及び方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5744685U (pt) * | 1980-08-15 | 1982-03-11 |
-
1985
- 1985-08-13 JP JP12431285U patent/JPS6232531U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5744685U (pt) * | 1980-08-15 | 1982-03-11 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09181034A (ja) * | 1995-12-18 | 1997-07-11 | Lg Semicon Co Ltd | 半導体ウェーハ洗浄装置及び方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6232531U (pt) | ||
JPH02146428U (pt) | ||
JPH02113331U (pt) | ||
JPS637171U (pt) | ||
JPH0197335U (pt) | ||
JPS61195050U (pt) | ||
JPS62194761U (pt) | ||
JPS6329934U (pt) | ||
JPH0379872U (pt) | ||
JPH0338629U (pt) | ||
JPS6419740A (en) | Substrate holding jig for wet processor | |
JPS63127126U (pt) | ||
JPS625637U (pt) | ||
JPH03109328U (pt) | ||
JPS63159825U (pt) | ||
JPH01112050U (pt) | ||
JPH01147264U (pt) | ||
JPH0231624U (pt) | ||
JPS63162528U (pt) | ||
JPH01140824U (pt) | ||
JPH0459135U (pt) | ||
JPS59461U (ja) | 浸漬式表面処理装置 | |
JPS61166530U (pt) | ||
JPH0179970U (pt) | ||
JPH0328723U (pt) |