JPS6232407B2 - - Google Patents
Info
- Publication number
- JPS6232407B2 JPS6232407B2 JP9064180A JP9064180A JPS6232407B2 JP S6232407 B2 JPS6232407 B2 JP S6232407B2 JP 9064180 A JP9064180 A JP 9064180A JP 9064180 A JP9064180 A JP 9064180A JP S6232407 B2 JPS6232407 B2 JP S6232407B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- standard
- magnetic detector
- piston
- magnetically altered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 239000007769 metal material Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/50—Devices characterised by the use of electric or magnetic means for measuring linear speed
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
【発明の詳細な説明】
本発明は、種々の機械の移動部材の位置、移動
速度等を検出するための変位検出装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a displacement detection device for detecting the position, moving speed, etc. of moving members of various machines.
一般に、移動する移動部材の位置を検出し、移
動部材が設定位置にくると、その移動を停止させ
たりするための変位検出装置においては、前記移
動部材に対向する部分にマイクロスイツチ等の位
置検出部材を設け、このマイクロスイツチの接触
子を移動部材上に形成された突起で動かしてマイ
クロスイツチを作動させるようにしていた。 Generally, in a displacement detection device for detecting the position of a moving member and stopping the movement when the moving member reaches a set position, a position detection device such as a micro switch is installed in a part facing the moving member. A member is provided, and the contactor of the microswitch is moved by a protrusion formed on the movable member to operate the microswitch.
ところが、マイクロスイツチ等の変位検出装置
においては、移動部材の移動速度は検出できな
い。また時間の経過に対応する移動部材の変位を
検出できないばかでなく、移動部材上に突起を形
成する等その製作に手間がかゝる。 However, displacement detection devices such as microswitches cannot detect the moving speed of the moving member. Moreover, it is not only impossible to detect the displacement of the moving member over time, but also requires time and effort to manufacture the moving member, such as by forming protrusions on the moving member.
本発明は、かゝる点に鑑み、製作が簡単で、し
かも取扱いが容易であるばかりでなく、移動部材
の移動速度あるいは加速度を容易に検出できるよ
うな変位検出装置を提供することを目的とする。 In view of the above, an object of the present invention is to provide a displacement detection device that is not only easy to manufacture and handle, but also can easily detect the moving speed or acceleration of a moving member. do.
以下、図面を参照して本発明の実施例について
説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図において、シリンダケース１内には、ピ
ストン２が左右に摺動自在に収納され、このピス
トン２の一端にはピストン軸３が取付けられてい
る。 In FIG. 1, a piston 2 is housed in a cylinder case 1 so as to be slidable left and right, and a piston shaft 3 is attached to one end of the piston 2. As shown in FIG.
前記ピストン２の周面には、リング状に磁気変
質部４、４〜４が所定間隔で形成されている。ま
た、前記シリンダケース１には凹部５が設けら
れ、この凹部５内に磁気検出器６が収納され、磁
気検出器６の先端は前記磁気変質部４に対向して
いる。 On the circumferential surface of the piston 2, ring-shaped magnetically altered parts 4, 4-4 are formed at predetermined intervals. Further, the cylinder case 1 is provided with a recess 5 , and a magnetic detector 6 is housed in the recess 5 , with the tip of the magnetic detector 6 facing the magnetically altered portion 4 .
前記磁気変質部４は、第２図に示すように、金
属材からなるピストン２の周面にレーザ光線ある
いは電子線Ｂを収束させて局部的に照射すること
により形成される。すなわち、レーザ光線あるは
電子線はエネルギー密度が非常に高く、狭い部分
を加熱できるので、磁気変質部４の大きさ、形状
あるいはそれらの間隔を正確に調整できる。レー
ザ光線あるいは電子線の照射により金属材の表面
は瞬間的に非常に高温度になり、その照射を停止
すると急速に自己冷却され、磁気的特性が変化す
る。 As shown in FIG. 2, the magnetically altered portion 4 is formed by locally irradiating the circumferential surface of the piston 2 made of a metal material with a focused laser beam or electron beam B. That is, since the laser beam or electron beam has a very high energy density and can heat a narrow area, the size and shape of the magnetically altered portion 4 or the spacing thereof can be adjusted accurately. The surface of a metal material instantaneously becomes extremely high in temperature when irradiated with a laser beam or electron beam, and when the irradiation is stopped, it rapidly self-cools and its magnetic properties change.
特に鉄系合金、特殊なアルミニウム合金等は外
観上は全く変化がなくても磁気的特性、特に導磁
性を数倍から10数倍にも変化させることが可能で
ある。 In particular, iron-based alloys, special aluminum alloys, etc. can have their magnetic properties, particularly magnetic permeability, changed several times to more than 10 times, even if their appearance does not change at all.
金属材料の中でも磁性材料として名高いFe25
％−Ni75％の合金についてその特性を調べてみ
ると第３図のようになる。図の横軸は磁界の強さ
Ｈを、縦軸は磁化の強さＢを示し、曲線L1は前
記合金をレーザ光線で900℃に加熱した後、自己
冷却させた場合の特性を示し、曲線L2は同様の
処理をしたものを炉内で徐冷した場合の特性を示
したものである。 Fe25 is famous as a magnetic material among metal materials.
%-Ni75% alloy, the characteristics are as shown in Figure 3. The horizontal axis of the figure shows the magnetic field strength H, the vertical axis shows the magnetization strength B, and the curve L1 shows the characteristics when the alloy is heated to 900 ° C. with a laser beam and then allowed to self-cool. Curve L2 shows the characteristics when a similarly treated material is slowly cooled in a furnace.
変位検出装置として利用する際には、磁界の強
さが小さい範囲に限定されており、本合金におい
て、１エルステツド以下の場合における急速冷却
素材の透磁率（μ＝Ｂ／Ｈ）は徐冷素材のそれの４〜
５倍になつている。このように、金属材料を所定
温度以上に加熱して急速冷却すればその磁気的特
性を大幅に変えることができる。 When used as a displacement detection device, the magnetic field strength is limited to a small range, and in this alloy, the magnetic permeability (μ = B/H) of the rapidly cooled material when the strength is 1 oersted or less is lower than that of the slowly cooled material. It has become 4 to 5 times that of the previous year. In this way, by heating a metal material above a predetermined temperature and rapidly cooling it, its magnetic properties can be significantly changed.
次に、本発明の作用について説明する。 Next, the operation of the present invention will be explained.
第４図において、ピストン２の表面に一定間隔
で磁気変質部４を数個設けることにより基準尺を
形成し、この基準尺の移動変位を前記磁気検出器
６で検出する。すなわち、前記磁気検出器６に対
向する位置に磁気変質部４がくると、磁気検出器
６がそれを検出し、図示しないい制御装置に信号
を発する。この制御装置は基準位置からいくつ磁
気変質部４が磁気検出器６を通過したかを検知し
てピストン２を停止せしめたり、あるいは各磁気
変質部４が磁気検出器６を通過する時間を測定す
ることにより、ピストンの移動速度を制御したり
する。また、ピストン２の移動時の加速度も検出
できる。 In FIG. 4, a standard scale is formed by providing several magnetically altered parts 4 at regular intervals on the surface of the piston 2, and the displacement of this standard scale is detected by the magnetic detector 6. That is, when the magnetically altered portion 4 comes to a position facing the magnetic detector 6, the magnetic detector 6 detects it and issues a signal to a control device (not shown). This control device detects how many magnetically altered parts 4 have passed through the magnetic detector 6 from the reference position and stops the piston 2, or measures the time it takes for each magnetically altered part 4 to pass through the magnetic detector 6. By doing so, the moving speed of the piston can be controlled. Furthermore, the acceleration of the piston 2 during movement can also be detected.
なお、前記実施例においては、移動部材として
のピストン２に磁気変質部４を形成したが、固定
部材側に磁気変質部を形成するとともに移動部材
側に磁気検出器６を取付けてもよい。 In the above embodiment, the magnetically altered portion 4 was formed on the piston 2 as a moving member, but the magnetically altered portion 4 may be formed on the fixed member side and the magnetic detector 6 may be attached to the moving member side.
レーザ光線あるいは電子線による熱処理による
磁気変質部の形成は、機械的な基準尺の加工方法
と異なり、短時間で安価に製作でき、しかも基準
尺の磁気変質部は硬度が高く容易に摩耗したり、
破損したりすることがないので、工作機械、産業
機械、車輛、航空機等に使用される際に付着する
塵埃、油脂、金属粉等の影響を受けることが少な
い。また、機器の金属部分には容易に磁気変質部
を形成できるので汎用性が高い。 Unlike mechanical standard processing methods, forming a magnetically altered part by heat treatment with a laser beam or electron beam can be produced in a short time and at low cost.Moreover, the magnetically altered part of the standard is highly hard and does not wear out easily. ,
Since it will not be damaged, it is less affected by dust, oil, metal powder, etc. that adhere when used in machine tools, industrial machinery, vehicles, aircraft, etc. In addition, since magnetically altered parts can be easily formed on metal parts of devices, it is highly versatile.
以上説明したように、本発明は、レザ−ビーム
あるいは電子線のような高エネルギー密度のビー
ムによつて金属材の表面を熱処理し、金属材の表
面の所定位置に局部的に磁気変質部を設けて基準
尺を形成し、この基準尺に対向して磁気特性を検
出する磁気検出器を設け、前記基準尺と磁気検出
器との相対変位移動を検出するようにしたので、
移動部材の位置、移動速度および加速度を正確に
検出でき、しかも基準尺の製作は単に高エネルギ
ー密度のビームを照射するのみでよいので、機器
の殆んどの部分に容易にできて安価であり、汎用
性が大であるという効果を奏する。 As explained above, the present invention heat-treats the surface of a metal material with a high-energy-density beam such as a laser beam or an electron beam to locally create magnetically altered portions at predetermined positions on the surface of the metal material. A magnetic detector is provided opposite to the standard to form a standard, and a magnetic detector for detecting magnetic characteristics is provided to detect relative displacement between the standard and the magnetic detector.
The position, moving speed, and acceleration of a moving member can be accurately detected, and the standard can be manufactured by simply irradiating a beam with high energy density, so it can be easily applied to most parts of equipment and is inexpensive. It has the effect of being highly versatile.
第１図は、本発明を適用した作動シリンダの縦
断面図、第２図は磁気変質部の製造方法説明図、
第３図は磁気特性比較グラフ、第４図は本発明の
作用説明図である。
１……シリンダケース、２……ピストン、４…
…磁気変質部、６……磁気検出器。
FIG. 1 is a longitudinal sectional view of an operating cylinder to which the present invention is applied, FIG. 2 is an explanatory diagram of a method for manufacturing a magnetically altered part,
FIG. 3 is a magnetic property comparison graph, and FIG. 4 is an explanatory diagram of the operation of the present invention. 1...Cylinder case, 2...Piston, 4...
...Magnetic alteration part, 6...Magnetic detector.
Claims (1)
ルギービームによつて金属材の表面を熱処理し、
金属材の表面の所定位置に局部的に磁気変質部を
設けて基準尺を形成し、この基準尺に対向して磁
気特性を検出する磁気検出器を設け、前記基準尺
と磁気検出器との相対変位移動を検出することを
特徴とする変位検出装置。1 Heat-treating the surface of a metal material with a high-energy beam such as a laser beam or an electron beam,
A magnetically altered portion is locally provided at a predetermined position on the surface of a metal material to form a standard, a magnetic detector for detecting magnetic properties is provided opposite to the standard, and the magnetic detector is connected to the standard. A displacement detection device characterized by detecting relative displacement movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9064180A JPS5716309A (en) | 1980-07-04 | 1980-07-04 | Displacement detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9064180A JPS5716309A (en) | 1980-07-04 | 1980-07-04 | Displacement detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5716309A JPS5716309A (en) | 1982-01-27 |
| JPS6232407B2 true JPS6232407B2 (en) | 1987-07-14 |
Family
ID=14004122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9064180A Granted JPS5716309A (en) | 1980-07-04 | 1980-07-04 | Displacement detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5716309A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4486545A (en) * | 1982-04-02 | 1984-12-04 | Shinagawa Refractories, Co., Ltd. | SIO2 -CaO Based low cubically expansive flame-spraying material |
| JPS6283620A (en) * | 1985-10-09 | 1987-04-17 | Sumitomo Metal Ind Ltd | Magnetic scale |
| JP2824059B2 (en) * | 1987-08-31 | 1998-11-11 | 三菱電機株式会社 | Manufacturing method of heat resistant magnetic scale |
| JPH03265704A (en) * | 1990-11-30 | 1991-11-26 | Taiyo Ltd | Fluid pressure cylinder |
| JP3237138B2 (en) * | 1991-08-13 | 2001-12-10 | カヤバ工業株式会社 | Magnetic scale steel bar |
| JP2886131B2 (en) * | 1996-04-25 | 1999-04-26 | 日本原子力研究所 | Manufacturing method of heat resistant magnetic scale |
-
1980
- 1980-07-04 JP JP9064180A patent/JPS5716309A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5716309A (en) | 1982-01-27 |
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