JPS6232051U - - Google Patents

Info

Publication number
JPS6232051U
JPS6232051U JP12295185U JP12295185U JPS6232051U JP S6232051 U JPS6232051 U JP S6232051U JP 12295185 U JP12295185 U JP 12295185U JP 12295185 U JP12295185 U JP 12295185U JP S6232051 U JPS6232051 U JP S6232051U
Authority
JP
Japan
Prior art keywords
substrate
belt
conveyor belt
guide
conveyor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12295185U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12295185U priority Critical patent/JPS6232051U/ja
Publication of JPS6232051U publication Critical patent/JPS6232051U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Structure Of Belt Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Description

【図面の簡単な説明】
第１図ａは本考案の実施例の平面図、第１図ｂ
は同図ａのＢ―Ｂ線断面を矢印方向から見た断面
図、第２図は、本考案の装置の角部を示す平面図
、第３図ａは従来例の平面図、第３図ｂは同図ａ
のＢ―Ｂ線断面を矢印方向から見た断面図、第４
図は従来例の装置の角部を示す平面図である。 第１図ないし第２図において、１１は搬送ベル
ト、１２はウエハ、１３は搬送用モータ、１４は
搬送路、１５はガイド部、１６はガイドベルト、
１７はガイドベルト用モータ、１８はプーリ、１
９はガイドプーリである。

Claims (1)

  1. 【実用新案登録請求の範囲】 基板１２を搬送する搬送ベルト１１および該搬
    送ベルト１１を駆動する搬送用モータ１３を具え
    、 基板１２の搬送路１４に沿つて設けられたガイ
    ド部１５に搬送ベルト１１と同速度で動くガイド
    ベルト１６を設けて成ることを特徴とする基板搬
    送装置。
JP12295185U 1985-08-10 1985-08-10 Pending JPS6232051U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12295185U JPS6232051U (ja) 1985-08-10 1985-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12295185U JPS6232051U (ja) 1985-08-10 1985-08-10

Publications (1)

Publication Number Publication Date
JPS6232051U true JPS6232051U (ja) 1987-02-25

Family

ID=31013615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12295185U Pending JPS6232051U (ja) 1985-08-10 1985-08-10

Country Status (1)

Country Link
JP (1) JPS6232051U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0331146U (ja) * 1989-08-04 1991-03-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0331146U (ja) * 1989-08-04 1991-03-26

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