JPS6231857U - - Google Patents

Info

Publication number

JPS6231857U

JPS6231857U JP12439785U JP12439785U JPS6231857U JP S6231857 U JPS6231857 U JP S6231857U JP 12439785 U JP12439785 U JP 12439785U JP 12439785 U JP12439785 U JP 12439785U JP S6231857 U JPS6231857 U JP S6231857U

Authority

JP

Japan

Prior art keywords

target

ion source

perforated

metal

plasma chamber

Prior art date

1985-08-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 150000002500 ions Chemical class 0.000 claims 2
• 239000002184 metal Substances 0.000 claims 1
• 229910021645 metal ion Inorganic materials 0.000 claims 1
• 238000007737 ion beam deposition Methods 0.000 description 2
• 238000010884 ion-beam technique Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1