JPS6231231Y2 - - Google Patents

Description

[Detailed description of the invention] This invention relates to a rotating holding device for a disc-shaped workpiece that holds the workpiece during mirror polishing of the disc-shaped workpiece, and which facilitates the attachment and detachment of the workpiece and allows the workpiece to be held with high precision. The purpose is to rotate the workpiece.

Generally, when mirror-finishing a disc-shaped workpiece such as a magnetic disk used in computer memory, etc., the workpiece is held by a holding device, and at the same time, the workpiece is rotated and a diamond cutting tool is used to polish the workpiece. A high-quality mirror-finished surface with a surface roughness of 0.01 μmRa or less is formed on the workpiece by a method such as cutting or wrapping.

However, in order to ensure a surface roughness of 0.01μmRa or less, the cutting tool and the grinding wheel must be managed to prevent chipping of the tips of the teeth or clogging of the grinding tool, which is extremely troublesome. There is a drawback.

Therefore, as shown in FIG. 1, mirror finishing is performed using a mirror finishing device. That is, in the figure, 1 is a donut-shaped disk-shaped workpiece made of aluminum held by a rotating jig 2, 3 is a tool whose tip has a U-shaped cross section, and 4 is the left and right sides of the tip of tool 3. The abrasive material holder 5 is attached to the inner surface of both holders 4 and is a water-permeable flexible abrasive material with abrasive grains attached, and both abrasive materials 5 are arranged symmetrically. ing. 6 is a machining fluid 7 formed by penetrating the tip of the tool 3 and both holders 4, respectively.
The machining fluid 7 has a surface tension of 60 dyn/cm.
and has the function of suppressing surface oxidation of aluminum materials.

Then, the workpiece 1 is rotated by the jig 2, and the abrasive material 5 arranged symmetrically on both sides of the workpiece 1 is pressed, and the machining fluid 7 is passed from the supply channel 6 through the abrasive material 5 onto the surface of the workpiece 1. The workpiece 1 is mirror-finished by moving the abrasive 5 together with the tool 3 in one direction or in a reciprocating direction perpendicular to the rotation axis of the jig 2.

Therefore, while surface oxidation of the aluminum material that is the workpiece 1 is suppressed by the machining fluid 7, minute cuts are made by the abrasive grains attached to the abrasive material 5, and the scraped machining debris is made to have water permeability. Since it is discharged through the abrasive material 5, clogging of the abrasive material 5 is suppressed, and since the flexible abrasive material 5 has elasticity, vibrations of the workpiece 1, tool 3, etc. are absorbed, and the workpiece caused by vibrations is The distribution of surface roughness and the amount of processing can be made uniform over the entire surface.

By the way, in order to obtain a high-quality mirror surface with a surface roughness of 0.01 μmRa or less, it is of course important to suppress clogging of the abrasive material 5, and in addition to this, it is important to hold the workpiece 1 with high precision. In the case of the device shown in Fig. 1, the workpiece 1 is
Although the workpiece 1 is held accurately without wobbling during rotation, the workpiece 1 cannot be easily attached or detached, resulting in a low production efficiency.

This invention was made with the above points in mind, and includes a fitting chamber formed at the end of a rotating jig with a magnet embedded inside, and a fitting chamber that is attached to the end surface of the jig via a spring. A disc-shaped workpiece is held between the pressed ring-shaped body, the holding body attracted by the magnet and fitted into the fitting chamber, and the ring-shaped body formed on the circumferential surface of the holding body. The present invention provides a holding device for rotation of a disc-shaped workpiece, which is equipped with a locking portion for rotating a disc-shaped workpiece.

Therefore, according to the holding device for rotating a disc-shaped workpiece of this invention, the end of the rotating jig is attracted by a magnet embedded inside the insertion chamber, and is inserted into the insertion chamber. By providing a holder and forming a locking part on the circumferential surface of the holder to clamp the disk-shaped workpiece between the annular body and the annular body, the holder can be attached to the magnet and released from the magnet. The holding body can be attracted to and released from the jig, making it possible to easily attach and detach the workpiece, making it easy to handle, and attaching the annular body to the end surface of the jig via a spring. By mounting the workpiece, it is possible to hold the workpiece with high precision, eliminate wobbling of the workpiece during rotation, and rotate the workpiece with high precision.

Next, this invention will be explained in detail with reference to the drawings from FIG. 2 showing one embodiment thereof.

In those drawings, 8 is a rotating jig, 9 is a fitting chamber formed at the left end of the jig 8, 10 is a ring-shaped body for pressing, and a cylindrical body 11 is integrally formed with the ring-shaped body 10. is inserted into the insertion chamber 9 to form a ring-shaped body 10
is attached to the left end surface of the jig 8.

Reference numeral 12 denotes a plurality of springs whose both ends are respectively locked to the left end surface of the jig 8 and the right side surface of the ring-shaped body 10.
3 and 14 are magnets having N pole and S pole, respectively, which are alternately buried in the inner wall of the deep part of the insertion chamber 9;
5 is a workpiece holder, which includes a base 16 and a collar 1
The base 16 is inserted into a through hole in the center of the workpiece 1 and fitted into the fitting chamber 9.

18 and 19 are magnets having N and S poles, respectively, which are alternately buried in the circumferential surface of the right end of the base 16;
A locking part 21 that clamps the workpiece 1 between the two is a butterfly-shaped gripping part, which is formed on the left side of the holder 15, and the holder 15 is rotated when the gripping part 21 is gripped. .

Then, the base 16 of the holder 15 is inserted into the through hole of the workpiece 1, and the peripheral edge of the through hole is brought into contact with the locking part 20 to attach the workpiece 1 to the holder 15, and the base 16 is fitted. When inserted into the insertion chamber 9 and rotated the holder 15 so that the magnets 18 and 19 on the holder 15 side are attracted to the magnets 14 and 13 on the insertion chamber 9 side, each magnet 18, 19, 14, and 13 is attracted. The holding body 15 is attracted to the jig 8 by the force.

At this time, due to the adsorption of the holding body 15, the annular body 1
0 is pushed toward the insertion chamber 9 side against each spring 12, the ring-shaped body 10 is urged toward the holding body 15 side by each spring 12, and the ring-shaped body 10 is strongly pressed against the workpiece 1, and the workpiece 1 is held between the locking part 20 and the annular body 10 without play, and by rotating the jig 8 in the direction of the arrow in FIG. 3b in this state, the workpiece 1 is Rotate.

In addition, when removing the workpiece 1 from the holding body 15, the holding part 21 is rotated to rotate the holding body 15,
By shifting the magnets 18, 19 on the holder 15 side from the magnets 14, 13 on the insertion chamber 9 side to release the suction state, the adsorption of the holder 15 to the jig 8 is released, and the workpiece 1 can be easily moved. can be removed.

Therefore, according to the embodiment, the holding body 15
Insert the side magnets 18 and 19 into the insertion chamber 9 side magnets 14 and 1.
3, the holding body 15 can be attracted to and released from the jig 8, and the workpiece 1 can be easily attached and detached.
Handling becomes easier and productivity can be improved.

In addition, when the holding body 15 is attracted, the annular body 10 is urged by each spring 12 and is strongly pressed against the workpiece 1, so the workpiece 1 can be held with high precision, and the workpiece 1 can be held with high precision without wobbling. It becomes possible to rotate and form a high quality mirror surface.

In addition, the magnets 13, 14, 18, 19 are inserted into the insertion chamber 9.
It may be provided only on either the side or the holding body 15 side.

[Brief explanation of the drawing]

Fig. 1 shows a general mirror finishing device, in which Fig. a is a front view, Fig. b is a right side view, and Fig. 2 and the following drawings are an embodiment of the holding device for rotation of a disc-shaped workpiece of this invention. Fig. 2 is a perspective view, Fig. 3 a is a partially cutaway front view of the ring-shaped body attached to the jig, and Fig. 3 b is a partially cutaway front view.
4A is a left side view of FIG. 4A, FIG. 4A is a partially cutaway front view of the holder, and FIG. 4B is a left side view of FIG. 4A. 1... Disc-shaped workpiece, 8... Jig, 9... Fitting chamber, 10... Ring-shaped body, 12... Spring, 13, 14
... Magnet, 15 ... Holding body, 20 ... Locking part.

Claims (1)

[Scope of utility model registration request] A fitting chamber formed at the end of the rotating jig and having a magnet embedded therein; a pressing ring attached to the end surface of the jig via a spring; A holding device for rotating a disk-shaped workpiece, comprising a holding body fitted into an insertion chamber, and a locking part formed on the circumferential surface of the holding body and holding the disk-shaped workpiece between the ring-shaped body. .