JPS623055U - - Google Patents
Info
- Publication number
- JPS623055U JPS623055U JP9499185U JP9499185U JPS623055U JP S623055 U JPS623055 U JP S623055U JP 9499185 U JP9499185 U JP 9499185U JP 9499185 U JP9499185 U JP 9499185U JP S623055 U JPS623055 U JP S623055U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- rotating disk
- horizontal
- rotating
- shadows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図、第２図はそれぞれ本考案の実施例を示
す断面図および平面図である。１……ターンテー
ブル、２……軸受、３……台盤、４……ネオンラ
ンプ光源、５……反射板、６……スリツト、７…
…グリーンシート。
FIGS. 1 and 2 are a sectional view and a plan view, respectively, showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Turntable, 2...Bearing, 3...Base, 4...Neon lamp light source, 5...Reflector, 6...Slit, 7...
...green sheet.
Claims (1)
る光源を設け、回転円板上のシート状試料に水平
かあるいは若干の角度を持たせた光を照射するこ
とにより、試料表面の欠陥の陰影を試料を回転さ
せながら観察可能に構成したことを特徴とするグ
リーンシート表面検査装置。 A light source with a horizontal slit is installed at one end of the outside of the rotating disk, and by irradiating the sheet sample on the rotating disk with horizontal or slightly angled light, it is possible to eliminate the shadows of defects on the sample surface. A green sheet surface inspection device characterized by being configured to enable observation while rotating a sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9499185U JPS623055U (en) | 1985-06-21 | 1985-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9499185U JPS623055U (en) | 1985-06-21 | 1985-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS623055U true JPS623055U (en) | 1987-01-09 |
Family
ID=30653899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9499185U Pending JPS623055U (en) | 1985-06-21 | 1985-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS623055U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59141915U (en) * | 1983-03-11 | 1984-09-21 | 日本酸素株式会社 | Electric heating vacuum double bottle |
-
1985
- 1985-06-21 JP JP9499185U patent/JPS623055U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59141915U (en) * | 1983-03-11 | 1984-09-21 | 日本酸素株式会社 | Electric heating vacuum double bottle |
| JPS63192Y2 (en) * | 1983-03-11 | 1988-01-06 |
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