JPS623055U - - Google Patents

Info

Publication number
JPS623055U
JPS623055U JP9499185U JP9499185U JPS623055U JP S623055 U JPS623055 U JP S623055U JP 9499185 U JP9499185 U JP 9499185U JP 9499185 U JP9499185 U JP 9499185U JP S623055 U JPS623055 U JP S623055U
Authority
JP
Japan
Prior art keywords
sample
rotating disk
horizontal
rotating
shadows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9499185U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9499185U priority Critical patent/JPS623055U/ja
Publication of JPS623055U publication Critical patent/JPS623055U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図、第２図はそれぞれ本考案の実施例を示
す断面図および平面図である。１……ターンテー
ブル、２……軸受、３……台盤、４……ネオンラ
ンプ光源、５……反射板、６……スリツト、７…
…グリーンシート。 FIGS. 1 and 2 are a sectional view and a plan view, respectively, showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Turntable, 2...Bearing, 3...Base, 4...Neon lamp light source, 5...Reflector, 6...Slit, 7...
...green sheet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転円板の外部の一端に水平なスリツトを有す
る光源を設け、回転円板上のシート状試料に水平
かあるいは若干の角度を持たせた光を照射するこ
とにより、試料表面の欠陥の陰影を試料を回転さ
せながら観察可能に構成したことを特徴とするグ
リーンシート表面検査装置。 A light source with a horizontal slit is installed at one end of the outside of the rotating disk, and by irradiating the sheet sample on the rotating disk with horizontal or slightly angled light, it is possible to eliminate the shadows of defects on the sample surface. A green sheet surface inspection device characterized by being configured to enable observation while rotating a sample.
JP9499185U 1985-06-21 1985-06-21 Pending JPS623055U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9499185U JPS623055U (en) 1985-06-21 1985-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9499185U JPS623055U (en) 1985-06-21 1985-06-21

Publications (1)

Publication Number Publication Date
JPS623055U true JPS623055U (en) 1987-01-09

Family

ID=30653899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9499185U Pending JPS623055U (en) 1985-06-21 1985-06-21

Country Status (1)

Country Link
JP (1) JPS623055U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141915U (en) * 1983-03-11 1984-09-21 日本酸素株式会社 Electric heating vacuum double bottle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59141915U (en) * 1983-03-11 1984-09-21 日本酸素株式会社 Electric heating vacuum double bottle
JPS63192Y2 (en) * 1983-03-11 1988-01-06

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