JPS6230342U - - Google Patents
Info
- Publication number
- JPS6230342U JPS6230342U JP12183485U JP12183485U JPS6230342U JP S6230342 U JPS6230342 U JP S6230342U JP 12183485 U JP12183485 U JP 12183485U JP 12183485 U JP12183485 U JP 12183485U JP S6230342 U JPS6230342 U JP S6230342U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- semiconductor pellet
- pellet
- suction
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims 9
- 238000001179 sorption measurement Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Description
第１図は本考案の一実施例を示す正面図、第２
図は同実施例のペレツト認識状態を示す正面図、
第３図は同実施例のペレツト吸着状態を示す正面
図、第４図は従来のペレツト吸着装置のブロツク
図、第５図は第４図の吸着ツールの駆動部を示す
斜視図、第６図は角錐型の吸着ツールの断面図、
第７図は円筒型の吸着ツールの断面図である。
１…テーブル、３…ペレツト、３′…被吸着ペ
レツト、４…粘着シート、１１…光学系、１２…
画像処理装置、１３…制御装置、１４…テーブル
駆動機構、１５…吸着ツール、２１…押し上げツ
ール。
Figure 1 is a front view showing one embodiment of the present invention;
The figure is a front view showing the pellet recognition state of the same example.
Fig. 3 is a front view showing the pellet adsorption state of the same embodiment, Fig. 4 is a block diagram of a conventional pellet adsorption device, Fig. 5 is a perspective view showing the drive section of the adsorption tool shown in Fig. 4, and Fig. 6. is a cross-sectional view of a pyramid-shaped suction tool,
FIG. 7 is a sectional view of a cylindrical suction tool. DESCRIPTION OF SYMBOLS 1...Table, 3...Pellet, 3'...Adsorbed pellet, 4...Adhesive sheet, 11...Optical system, 12...
Image processing device, 13...control device, 14...table drive mechanism, 15...suction tool, 21...pushing tool.
Claims (1)
レツトを載置するテーブルと、前記複数の半導体
ペレツトのうち被吸着半導体ペレツトの位置を画
像認識する認識装置と、前記画像認識の情報に基
づきテーブルを移動して被吸着半導体ペレツトを
吸着位置に合致させるテーブル駆動装機構と、吸
着位置に合致された被吸着半導体ペレツトを吸着
してピツクアツプする吸着ツールとを備えてなる
半導体ペレツトの吸着装置において、被吸着半導
体ペレツトの認識位置には、シートの裏側から被
吸着半導体ペレツトを水平に維持したまま押し上
げる押し上げツールが設けられていることを特徴
とする半導体ペレツトの吸着装置。 A table on which a plurality of semiconductor pellets arranged and adhered to the surface of a sheet is placed; a recognition device that image-recognizes the position of the semiconductor pellet to be attracted among the plurality of semiconductor pellets; A semiconductor pellet suction device comprising a table driving mechanism that moves to match the semiconductor pellet to the suction position, and a suction tool that suctions and picks up the semiconductor pellet that has been matched to the suction position. A device for sucking semiconductor pellets, characterized in that a push-up tool for pushing up the semiconductor pellet to be sucked from the back side of the sheet while maintaining it horizontally is provided at a position for recognizing the sucked semiconductor pellet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12183485U JPS6230342U (en) | 1985-08-08 | 1985-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12183485U JPS6230342U (en) | 1985-08-08 | 1985-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6230342U true JPS6230342U (en) | 1987-02-24 |
Family
ID=31011466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12183485U Pending JPS6230342U (en) | 1985-08-08 | 1985-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6230342U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS635230U (en) * | 1986-06-20 | 1988-01-14 |
-
1985
- 1985-08-08 JP JP12183485U patent/JPS6230342U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS635230U (en) * | 1986-06-20 | 1988-01-14 |
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