JPS6229900B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a bonding apparatus that performs wire bonding or die bonding, and particularly to temperature control of a heat block that heats a sample.

As is well known, a bonding apparatus has a heat block that heats a sample, and this heat block includes a heater and a temperature detector. in general,
Turn on the heater power for the heat block and turn it on for about 5 minutes.
After about a minute, the specified temperature of about 150 to 430°C is reached.

Conventionally, to determine whether the heat block has reached the specified temperature, read a meter detected by a temperature detector and then start the bonding equipment, which wastes a lot of waiting time and reduces operating efficiency. Ta. Furthermore, if the heater or temperature detector is damaged or some other trouble occurs and the temperature does not rise no matter how long it takes, there is a drawback that the detection is delayed.

SUMMARY OF THE INVENTION Accordingly, a first object of the present invention is to provide a bonding apparatus that can automatically start as soon as the heat block reaches a predetermined temperature.

A second object of the present invention is to provide a bonding device that can determine troubles in the heater or temperature sensor.

Hereinafter, the present invention will be explained with reference to an illustrated embodiment. A heat block 1 for heating a sample (not shown) has a heater 2 embedded therein and a temperature detector 3 attached thereto. The wiring of the temperature detector 3 is connected to an amplifier 4, which outputs a voltage proportional to the temperature. The output of the amplifier 4 is input to a temperature control section 5, and the temperature of the heater 2 is controlled by this temperature control section 5. Further, the output of the amplifier 4 is connected to one input terminal 6a of the comparator 6, and the other input terminal 6b of the comparator 6 is connected so that the voltage set by the level setter 7 is input. Here, if the voltage of the level setter 7 is set to the output voltage of the amplifier 4 when the temperature of the heat block 1 is the specified temperature, the output of the comparator 6 will be the output of the amplifier 4.
When the output is greater than the output, the output becomes Low, and when the output is smaller, the output becomes High. The output of the comparator 6 is inputted to a start power switch 9 of the bonding apparatus via a computer 8. Also, the output of the comparator 6 and the signal of the timer 10 that outputs a high signal after a certain period of time are connected to an AND circuit 11.
The output of the AND circuit 11 is input to an alarm device 12 that emits a lamp or an alarm, and a computer 8. Also, the temperature control section 5
The heater power switch 13 to the heater power switch 13 and the timer power switch 14 to the timer 10 are interlocked switches.

Next, the operation of this device having such a configuration will be explained. When the timer power switch 13 is turned on, the heater 2 is heated via the temperature control section 5. The temperature of the heat block 1 is detected by a temperature detector 3, and an amplifier 4 outputs a voltage proportional to the detected temperature. Then, the output voltage of the amplifier 4 and the output voltage of the level setter 7 are determined by a comparator 6.
When the output voltage of the amplifier 4 becomes larger than the output voltage of the level setter 7, the comparator 6
The computer 8 judges other conditions, such as the presence or absence of a sample, and if the apparatus start conditions are correct, the apparatus start power switch is activated by the output of the comparator 6. 9 is turned ON and the bonding device starts. In this way, when the heat block 1 reaches the specified temperature, the bonding device is automatically started.

Further, in conjunction with the heater power switch 13, the timer power switch 14 is turned on, and the timer 10 is started. After a certain period of time, timer 10
If the signal becomes High, and at this time the output voltage of the amplifier 4 is higher than the output voltage of the level setter 7, and the output of the comparator 6 becomes Low, then AND
No output from circuit 11. If the output voltage of the amplifier 4 is lower than the output voltage of the level setter 7 and the output of the comparator 6 is not High,
The AND circuit 11 outputs an output, which activates the alarm device 12 to notify the operator that the heat block 1 has not reached the specified temperature even after a certain period of time has passed, and the abnormality is stored in the computer 8.
Thereby, it can be immediately determined that the heater 2 or the temperature detector 3 is abnormal. Also, from the memory of the computer 8, it can be determined which part of the device has the most failures.

As is clear from the above description, according to the bonding apparatus of the present invention, the apparatus automatically starts when the heat block reaches a specified temperature, so there is no waiting time and the operating rate is significantly improved. In addition, troubles in the heat block can be detected immediately, so
From this point of view as well, the operating rate of the device can be increased.

[Brief explanation of the drawing]

The figure is a circuit diagram used in the bonding device according to the present invention. 1...Heat block, 2...Heater, 3...Temperature detector, 6...Comparator, 7...Level setting device, 9
...device start power switch, 10...timer,
11...AND circuit, 12...Alarm device, 13...Heater power switch, 14...Timer power switch.

Claims (1)

[Claims] 1. In a bonding device that starts the device by detecting the temperature of a heat block in which a heater for heating a sample is embedded with a temperature detector, a level setting device sets the output to a constant level equivalent to the specified temperature of the heat block; A comparator that compares the output of the level setting device with the output of the temperature detector, a heater power switch for the heater, a timer power switch that operates in conjunction with the heater power switch, and a timer power switch that operates in conjunction with the heater power switch. 1. A bonding device comprising a timer that outputs an output after a certain period of time, and issuing an alarm depending on the presence or absence of an output from the comparator and the output from the timer.