JPS6229885U - - Google Patents
Info
- Publication number
- JPS6229885U JPS6229885U JP1985117199U JP11719985U JPS6229885U JP S6229885 U JPS6229885 U JP S6229885U JP 1985117199 U JP1985117199 U JP 1985117199U JP 11719985 U JP11719985 U JP 11719985U JP S6229885 U JPS6229885 U JP S6229885U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- optical system
- workpiece stands
- scan optical
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 4
- 238000009966 trimming Methods 0.000 claims 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117199U JPS6229885U (enExample) | 1985-08-01 | 1985-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117199U JPS6229885U (enExample) | 1985-08-01 | 1985-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6229885U true JPS6229885U (enExample) | 1987-02-23 |
Family
ID=31002490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985117199U Pending JPS6229885U (enExample) | 1985-08-01 | 1985-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6229885U (enExample) |
-
1985
- 1985-08-01 JP JP1985117199U patent/JPS6229885U/ja active Pending
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