JPS62298704A - 光学式測長装置 - Google Patents
光学式測長装置Info
- Publication number
- JPS62298704A JPS62298704A JP14176386A JP14176386A JPS62298704A JP S62298704 A JPS62298704 A JP S62298704A JP 14176386 A JP14176386 A JP 14176386A JP 14176386 A JP14176386 A JP 14176386A JP S62298704 A JPS62298704 A JP S62298704A
- Authority
- JP
- Japan
- Prior art keywords
- main scale
- lens array
- light
- scale
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14176386A JPS62298704A (ja) | 1986-06-18 | 1986-06-18 | 光学式測長装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14176386A JPS62298704A (ja) | 1986-06-18 | 1986-06-18 | 光学式測長装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62298704A true JPS62298704A (ja) | 1987-12-25 |
JPH0418252B2 JPH0418252B2 (enrdf_load_stackoverflow) | 1992-03-27 |
Family
ID=15299614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14176386A Granted JPS62298704A (ja) | 1986-06-18 | 1986-06-18 | 光学式測長装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62298704A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6703601B2 (en) | 1997-02-21 | 2004-03-09 | Fanuc, Ltd. | Motion detection of an optical encoder by converging emitted light beams |
JP2007108089A (ja) * | 2005-10-17 | 2007-04-26 | Ricoh Co Ltd | 相対位置検出装置、回転体走行検出装置及び画像形成装置 |
JP2013096757A (ja) * | 2011-10-28 | 2013-05-20 | Mitsutoyo Corp | 変位検出装置、変位検出方法及び変位検出プログラム |
JP2017053672A (ja) * | 2015-09-08 | 2017-03-16 | 株式会社ミツトヨ | エンコーダ |
-
1986
- 1986-06-18 JP JP14176386A patent/JPS62298704A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6703601B2 (en) | 1997-02-21 | 2004-03-09 | Fanuc, Ltd. | Motion detection of an optical encoder by converging emitted light beams |
JP2007108089A (ja) * | 2005-10-17 | 2007-04-26 | Ricoh Co Ltd | 相対位置検出装置、回転体走行検出装置及び画像形成装置 |
JP2013096757A (ja) * | 2011-10-28 | 2013-05-20 | Mitsutoyo Corp | 変位検出装置、変位検出方法及び変位検出プログラム |
JP2017053672A (ja) * | 2015-09-08 | 2017-03-16 | 株式会社ミツトヨ | エンコーダ |
Also Published As
Publication number | Publication date |
---|---|
JPH0418252B2 (enrdf_load_stackoverflow) | 1992-03-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4079252A (en) | Photoelectric grating displacement measuring apparatus | |
US5448358A (en) | Optical apparatus and displacement-information measuring apparatus using the same | |
US3175093A (en) | Photosensitive device for digital measurement of the displacement of an object | |
JPH05240613A (ja) | 変位測定装置及び方法 | |
US3483389A (en) | Electro-optical encoder having fiber optic coupling | |
US5113071A (en) | Encoder in which single light source projects dual beams onto grating | |
JPS6023282B2 (ja) | 相対変位測定装置 | |
JPH0652170B2 (ja) | 光結像式非接触位置測定装置 | |
JPH048724B2 (enrdf_load_stackoverflow) | ||
US5066129A (en) | Optical linear encoder with light quantity calabration | |
US5011287A (en) | Interferometer object position measuring system and device | |
JPS62298704A (ja) | 光学式測長装置 | |
US4395123A (en) | Interferometric angle monitor | |
JP2941953B2 (ja) | 基準位置の検出方法および回転検出計 | |
JP5069364B2 (ja) | 光電式インクリメンタル型エンコーダ | |
JPS6117016A (ja) | 平均化回折モアレ位置検出器 | |
JPS6370110A (ja) | 距離測定装置 | |
JPS61712A (ja) | 光学スケ−ル読取装置 | |
JPS63263412A (ja) | 非接触変位計 | |
DE102018112204A1 (de) | Verlagerungsdetektionsvorrichtung | |
JPH0799325B2 (ja) | 微小変位測定方法および微小変位測定装置 | |
SU1126812A1 (ru) | Устройство дл измерени деформаций диффузно отражающих объектов | |
JP2827250B2 (ja) | 位置検出装置 | |
JPH0212017A (ja) | 平均化回折モアレ位置検出器 | |
JPS59224513A (ja) | 光学式リニアエンコ−ダ |