JPS62298423A - Dehumidifier for air - Google Patents
Dehumidifier for airInfo
- Publication number
- JPS62298423A JPS62298423A JP61139882A JP13988286A JPS62298423A JP S62298423 A JPS62298423 A JP S62298423A JP 61139882 A JP61139882 A JP 61139882A JP 13988286 A JP13988286 A JP 13988286A JP S62298423 A JPS62298423 A JP S62298423A
- Authority
- JP
- Japan
- Prior art keywords
- air
- chamber
- dehumidified
- water vapor
- pressurized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 27
- 229920005597 polymer membrane Polymers 0.000 claims description 11
- 239000012466 permeate Substances 0.000 claims 1
- 238000007791 dehumidification Methods 0.000 abstract description 12
- 239000012528 membrane Substances 0.000 abstract 3
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
〔産業上の利用分野〕
本発明は、電磁弁・工業計器等の計装用、工作機械・包
装機械・空気工具等の機械装置の作動用、半導体工業等
において使用されるエアーブロー用、プラスチック粉体
等の粉体の搬送用、塗装用として供給される加圧空気を
除湿する装置に関する。詳しくは、除湿対象空気を加圧
してその空気中の水蒸気分圧を高める加圧装置と、水蒸
気を選択的に透過可能な高分子膜で仕切られた２つの室
のうちの一方の室に前記加圧装置からの加圧空気を供給
することにより、両室間での水蒸気分圧差をもって加圧
空気中の水蒸気を高分子膜を通して他方の室に移行させ
て、加圧空気を除湿する水蒸気透過装置とを設けてある
空気の除湿装置に関する。[Detailed Description of the Invention] 3. Detailed Description of the Invention [Field of Industrial Application] The present invention is applicable to instrumentation such as solenoid valves and industrial instruments, and to operation of mechanical devices such as machine tools, packaging machines, and pneumatic tools. The present invention relates to an apparatus for dehumidifying pressurized air supplied for air blowing used in the semiconductor industry, for conveying powder such as plastic powder, and for painting. Specifically, a pressurizing device that pressurizes the air to be dehumidified to increase the partial pressure of water vapor in the air, and a pressurizing device that pressurizes the air to be dehumidified to increase the partial pressure of water vapor in the air, and a By supplying pressurized air from a pressurizing device, water vapor in the pressurized air is transferred to the other chamber through a polymer membrane using a water vapor partial pressure difference between the two chambers, and the pressurized air is dehumidified. The present invention relates to an air dehumidifying device, which is provided with an air dehumidifying device.
高分子膜を利用した除湿装置としては、本出願人が先に
提出したもの１．つまり、前記水蒸気透過装置における
一方の室からの除湿空気を常圧に減圧し、この減圧され
た空気の一部を他方の室に供給するように構成したもの
がある（特開昭６０−２３８１１９号公報）。これは、
除湿された空気を他方の室に供給することにより、例え
ば、他方の室に外気を供給する場合に比較して、両室間
での水蒸気分圧差を大きくし、除湿性能を向上すること
を目的として開発されたものである。As a dehumidification device using a polymer membrane, the one previously submitted by the applicant is 1. In other words, there is a water vapor permeation device configured to reduce the pressure of dehumidified air from one chamber to normal pressure and supply a part of this reduced pressure to the other chamber (Japanese Patent Laid-Open No. 60-238119 Publication No.). this is,
By supplying dehumidified air to the other room, the purpose is to increase the water vapor partial pressure difference between the two rooms and improve dehumidification performance, compared to, for example, supplying outside air to the other room. It was developed as.
しかしながら、前記の従来装置は、空調用等の常圧空気
の除湿を目的として開発されたものであって、除湿対象
の空気を加圧するものの、これは、あくまでも、除湿対
象空気の水蒸気分圧を高めて高分子膜による除湿性能の
向上を図ることを目的としたものである。However, the above-mentioned conventional device was developed for the purpose of dehumidifying normal pressure air for air conditioning, etc., and although it pressurizes the air to be dehumidified, it only reduces the water vapor partial pressure of the air to be dehumidified. The purpose of this is to improve the dehumidification performance of the polymer membrane by increasing the dehumidification performance of the polymer membrane.
本発明の目的は、前記水蒸気透過装置の一方の室に除湿
対象空気を加圧して供給する点に着目して、前記一方の
室からの除湿空気の一部を他方の室に供給することによ
り除湿性能を向上する前述手法を加圧空気の除湿に有効
利用し、もって、加圧空気の除湿性能に勝れた除湿装置
を提供する点にある。An object of the present invention is to focus on supplying pressurized air to be dehumidified to one chamber of the water vapor permeation device, and supply a part of the dehumidified air from the one chamber to the other chamber. The object of the present invention is to provide a dehumidifier that has excellent dehumidification performance for pressurized air by effectively utilizing the above-described method for improving dehumidification performance for dehumidifying pressurized air.
本発明による空気の除湿装置の特徴構成は、前記一方の
室からの除湿空気の一部を常圧に減圧して前記他方の室
に供給する供給路を設けてある点にあり、それによる作
用・効果は次の通りである。A characteristic configuration of the air dehumidifying device according to the present invention is that a supply path is provided to reduce the pressure of a part of the dehumidified air from the one chamber to normal pressure and supply it to the other chamber.・The effects are as follows.
水蒸気透過装置の一方の室に除湿対象空気を加圧し、除
湿対象空気の水蒸気分圧を高めて供給し、他方の室に前
記一方の室からの除湿空気の一部を常圧に減圧して供給
するため、両室間での水蒸気分圧量を大きくし、除湿性
能を向上できる。しかも、一方の室からの除湿空気の一
部を常圧に減圧して他方の室に供給するにあたり、一方
の室からの除湿空気の全部を常圧に減圧し、この減圧さ
れた除湿空気の一部を他方の室に供給するのではなく、
一方の室からめ除湿空気の一部を取出し、この取出した
一部の除湿空気を減圧して他方の室に供給するため、前
記一方の室からの除湿空気の一部を減圧して他方の室に
供給するといった除湿性能に勝れた除湿形態を採りなが
らも、一方の室からの除湿空気の大部分を加圧状態に維
持できる。したがって、用途に応じて必要とされる圧力
に、他方の室への供給等、水蒸気透過装置での除湿に起
因した圧力低下分を加味した圧力で除湿対象空気を一方
の室に供給するようにすることによって、除湿空気に対
する爾後の加圧が不要である。The air to be dehumidified is pressurized into one chamber of the water vapor permeation device, and the water vapor partial pressure of the air to be dehumidified is increased and supplied, and a part of the dehumidified air from the one chamber is reduced to normal pressure to the other chamber. Therefore, the amount of water vapor partial pressure between both chambers can be increased, and dehumidification performance can be improved. Furthermore, when depressurizing a portion of the dehumidified air from one chamber to normal pressure and supplying it to the other chamber, all of the dehumidified air from one chamber is depressurized to normal pressure, and the dehumidified air that has been depressurized is Rather than supplying some to the other chamber,
A portion of the dehumidified air is taken out from one chamber, and the dehumidified air is depressurized and supplied to the other chamber. While adopting a form of dehumidification with superior dehumidification performance, such as supplying air to both chambers, most of the dehumidified air from one chamber can be maintained in a pressurized state. Therefore, the air to be dehumidified is supplied to one chamber at a pressure that takes into account the pressure drop caused by dehumidification in the water vapor permeation device, such as supplying to the other chamber, in addition to the pressure required depending on the application. By doing so, subsequent pressurization of the dehumidified air is not necessary.
したがって、本発明によれば、加圧空気の除湿を十分に
行え、しかも、除湿対象空気を加圧してその空気中の水
蒸気分圧を高める装置をもって空気の加圧装置を兼用さ
せて、コストの低減化を図り得る空気の除湿装置を提供
できるようになった。Therefore, according to the present invention, it is possible to sufficiently dehumidify pressurized air, and moreover, the device that pressurizes the air to be dehumidified and increases the partial pressure of water vapor in the air also serves as an air pressurizing device, thereby reducing costs. It is now possible to provide an air dehumidification device that can reduce humidity.
次に本発明の実施例を示す。 Next, examples of the present invention will be shown.
除湿され、かつ、加圧された空気を発生する除湿加圧発
生装置を構成するに、第２図に示すように、空気（ａ、
）中の水蒸気分圧を高める加圧装置（１）と、これから
の加圧空気（ａ２）を冷却するターラ（２）と、これか
らの加圧冷却空気（ａ３）のレシーバ−タンク（３）と
、これからの加圧冷却空気（ａ４）に対して除塵を行う
プレフィルタ（４）と、これからの除塵空気（ａ、）に
対して除湿を行う除湿器（５）と、これからの除湿空気
（ａ６）に対して除塵を行って除湿加圧空気（ａ、）を
消費装置（図外）に供給するファイナルフィルタ（６）
を設けてある。As shown in FIG.
), a pressurizing device (1) that increases the water vapor partial pressure in the air, a tala (2) that cools the pressurized air (a2), and a receiver tank (3) for the pressurized cooling air (a3). , a pre-filter (4) that removes dust from the pressurized cooling air (a4), a dehumidifier (5) that dehumidifies the dust-removed air (a,), and a dehumidified air (a6). final filter (6) that removes dust from the air (a) and supplies dehumidified pressurized air (a,) to the consumer device (not shown)
is provided.
前記除湿器（５）は、第１図に示すように、水蒸気を選
択的に透過させる高分子膜（８ａ）で仕切られた２つの
室（８Ａ） 、 （８Ｂ）のうちの一方の室（８Ａ）に
前記除塵空気（ａ％）を供給することにより、両室（８
Ａ） 、 （８Ｂ）間での水蒸気分圧差をもって前記除
塵空気（ａ、）中の水蒸気を他方の室（８Ｂ）に高分子
膜（８ａ）を通して移行させて除塵空気（ａｓ）を除湿
する水蒸気透過装置（８）を設けるとともに、これから
の除湿空気（ａ、）の一部を減圧弁（９）で常圧に減圧
してその減圧空気（ａｓ）を前記他方の室（８Ｂ）に供
給する供給路（１０）を設け、かつ、前記他方の室（８
Ｂ）の圧力を常圧に維持するように、前記供給路（１０
）からの減圧空気（ａ、）の供給に伴りて他方の室（８
Ｂ）から吸湿空気（ａ、）を排出する排出路（１１）を
設けて、構成されている。As shown in FIG. 1, the dehumidifier (5) has one of two chambers (8A) and (8B) partitioned by a polymer membrane (8a) that selectively transmits water vapor. By supplying the dust-removed air (a%) to both chambers (8A),
A) and (8B) The water vapor in the dust-removed air (a,) is transferred to the other chamber (8B) through the polymer membrane (8a) using the water vapor partial pressure difference between them to dehumidify the dust-removed air (as). A permeation device (8) is provided, and a part of the dehumidified air (a,) is reduced to normal pressure by a pressure reducing valve (9), and the reduced pressure air (as) is supplied to the other chamber (8B). A supply path (10) is provided, and the other chamber (8
The supply path (10
) is supplied with reduced pressure air (a,) from the other chamber (8).
A discharge path (11) is provided for discharging hygroscopic air (a,) from B).
前記水蒸気透過装置（８）は、除塵空気（ａｓ）と減圧
空気（ａ、）とを向流状態で高分子膜（８ａ）に沿９て
流動させるものである。The water vapor permeation device (8) causes dust-removed air (as) and reduced pressure air (a,) to flow along the polymer membrane (8a) in a countercurrent state.
以下、本発明の別実施例を示す。 Another embodiment of the present invention will be shown below.
第３図に示すように、前記実施例において、前記排出路
（１１）に、真空ポンプ（１２）を設ける。As shown in FIG. 3, in the embodiment described above, a vacuum pump (12) is provided in the discharge path (11).
これによるときは、真空ポンプ（１２）の吸引によって
他方の室（８Ｂ）の圧力を絶対圧で３８０ｍＨｇとする
と、例えば、実施例のように他方の室（８Ｂ）の圧力を
常圧とする場合に比較して、他方の室（８Ｂ）への減圧
空気（ａ、）の供給量をほぼｌ／２に減少させながらも
、同等の除湿性能を発揮できる。In this case, if the pressure in the other chamber (8B) is set to 380 mHg in absolute pressure by the suction of the vacuum pump (12), for example, when the pressure in the other chamber (8B) is set to normal pressure as in the example. Compared to the above, the same dehumidifying performance can be achieved even though the amount of decompressed air (a,) supplied to the other chamber (8B) is reduced to approximately 1/2.
また、この場合、一方の室（８Ａ）に空気を加圧して供
給することで両室（８＾） 、 （８Ｂ）間での水蒸気
分圧差を大きくしであるため、他方の室（８Ｂ）を高真
空にする要がな（、真空ポンプ（１２）として、通常の
市販品を用いることができる。なお、他の構造は実施例
と同じであるため、同一符号を付すことによってその構
造説明は省略する。In addition, in this case, by supplying pressurized air to one chamber (8A), the water vapor partial pressure difference between the two chambers (8^) and (8B) is increased, so the other chamber (8B) There is no need to apply a high vacuum to the vacuum pump (12).A normal commercially available product can be used as the vacuum pump (12).The other structures are the same as those in the example, so the same reference numerals are used to explain the structure. is omitted.
図面は本発明に係る空気の除湿装置の実施例を示し、第
１図は要部構成の概略断面図、第２図は除湿加圧空気発
生装置の原理図であり、第３図は別実施例を示す要部構
成の概略断面図である。
（１）・・・・・・加圧装置、（８ａ）・・・・・・高
分子膜、（８Ａ） 、 （８Ｂ）・・・・・・室、（８
）・・・・・・水蒸気透過装置、（１０）・・・・・・
供給路、（１１）・・・・・・排出路、（１２）・・・
・・・真空ポンプ。The drawings show an embodiment of the air dehumidifying device according to the present invention, FIG. 1 is a schematic sectional view of the main part configuration, FIG. 2 is a principle diagram of the dehumidifying pressurized air generator, and FIG. 3 is a diagram showing a different embodiment. FIG. 2 is a schematic cross-sectional view of a main part configuration showing an example. (1)... Pressure device, (8a)... Polymer membrane, (8A), (8B)... Chamber, (8
)... Water vapor permeation device, (10)...
Supply channel, (11)...Discharge channel, (12)...
···Vacuum pump.
Claims (3)
を高める加圧装置（１）と、水蒸気を選択的に透過可能
な高分子膜（８ａ）で仕切られた２つの室（８Ａ）、（
８Ｂ）のうちの一方の室（８Ａ）に前記加圧装置（１）
からの加圧空気を供給することにより、両室（８Ａ）、
（８Ｂ）間での水蒸気分圧差をもって加圧空気中の水蒸
気を高分子膜（８ａ）を通して他方の室（８Ｂ）に移行
させて、加圧空気を除湿する水蒸気透過装置（８）とを
設けてある空気の除湿装置であって、前記一方の室（８
Ａ）からの除湿空気の一部を常圧に減圧して前記他方の
室（８Ｂ）に供給する供給路（１０）を設けてある空気
の除湿装置。(1) A pressurizing device (1) that pressurizes the air to be dehumidified to increase the water vapor partial pressure in the air, and two chambers (8A) partitioned by a polymer membrane (8a) that can selectively permeate water vapor. ), (
The pressurizing device (1) is placed in one chamber (8A) of the chamber (8B).
By supplying pressurized air from both chambers (8A),
A water vapor permeation device (8) is provided to dehumidify the pressurized air by transferring water vapor in the pressurized air to the other chamber (8B) through the polymer membrane (8a) using the water vapor partial pressure difference between the two chambers (8B). an air dehumidifying device, wherein said one chamber (8
The air dehumidifier is provided with a supply path (10) for reducing a portion of the dehumidified air from A) to normal pressure and supplying the dehumidified air to the other chamber (8B).
気とを向流状態で高分子膜（８ａ）に沿って流動させる
ものである特許請求の範囲第（１）項に記載の空気の除
湿装置。(2) Claim 1, wherein the water vapor permeation device (8) causes pressurized air and decompressed air to flow along the polymer membrane (8a) in a countercurrent state. Air dehumidifier.
からの排出路（１１）に真空ポンプ（１２）を備えたも
のである特許請求の範囲第（１）項または第（２）項に
記載の空気の除湿装置。(3) The water vapor permeation device (8) is located in the other chamber (8B)
The air dehumidifying device according to claim 1 or 2, further comprising a vacuum pump (12) in a discharge path (11) from the air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61139882A JPS62298423A (en) | 1986-06-16 | 1986-06-16 | Dehumidifier for air |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61139882A JPS62298423A (en) | 1986-06-16 | 1986-06-16 | Dehumidifier for air |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62298423A true JPS62298423A (en) | 1987-12-25 |
Family
ID=15255772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61139882A Pending JPS62298423A (en) | 1986-06-16 | 1986-06-16 | Dehumidifier for air |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62298423A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63209731A (en) * | 1987-02-26 | 1988-08-31 | Ube Ind Ltd | Production of compressed air for measuring instrument and apparatus driven by air |
| JPH01224029A (en) * | 1988-03-04 | 1989-09-07 | Ube Ind Ltd | Method for dehumidifying gas |
| JPH0370724U (en) * | 1989-11-08 | 1991-07-16 | ||
| US5205842A (en) * | 1992-02-13 | 1993-04-27 | Praxair Technology, Inc. | Two stage membrane dryer |
-
1986
- 1986-06-16 JP JP61139882A patent/JPS62298423A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63209731A (en) * | 1987-02-26 | 1988-08-31 | Ube Ind Ltd | Production of compressed air for measuring instrument and apparatus driven by air |
| JPH01224029A (en) * | 1988-03-04 | 1989-09-07 | Ube Ind Ltd | Method for dehumidifying gas |
| JPH0370724U (en) * | 1989-11-08 | 1991-07-16 | ||
| US5205842A (en) * | 1992-02-13 | 1993-04-27 | Praxair Technology, Inc. | Two stage membrane dryer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0537599B1 (en) | Membrane gas separation | |
| KR930018255A (en) | Two stage membrane dryer | |
| US6344069B2 (en) | System for energy recovery in a vacuum pressure swing adsorption apparatus | |
| EP0547387A1 (en) | Membrane air drying and separation operations | |
| EP0411254A1 (en) | Production of dry, high purity nitrogen | |
| KR900017904A (en) | Improved method and apparatus for the manufacture of dry high purity nitrogen | |
| JPH10103540A (en) | Valve sealing system, check valve closing element used in valve sealing system, and check valve using valve sealing system | |
| EP2353699A1 (en) | Sweep gas for membrane-based dehydration modules | |
| KR101954772B1 (en) | Adsorbed air dryer system | |
| US20090151557A1 (en) | Dehumidification system and dehumidification method in booster piping | |
| JPS62298423A (en) | Dehumidifier for air | |
| TWI680791B (en) | Purification method and purification system for helium gas | |
| JP2003089508A (en) | System for generating ozone | |
| CN113905804A (en) | Compressor system and method for supplying compressed gas | |
| JPH11260791A (en) | Drying method of semiconductor wafer and drying equipment | |
| EP0695574A1 (en) | Gas separation with fractional purge for pre- or post-purification | |
| JPS60238119A (en) | Air dehumidification apparatus | |
| JP2898741B2 (en) | Treatment method of exhaust gas containing organic vapor | |
| JPS6249929A (en) | Dehumidifier | |
| JPH01143626A (en) | Method for dehumidifying gas | |
| JPH01143624A (en) | Method for dehumidifying gases for instruments or driving devices | |
| JP2000189743A (en) | Dry gas supply actuating method and system therefor | |
| JPH01143625A (en) | Method for dehumidifying gases | |
| JPH0262421A (en) | Pneumatic circuit for static-pressure gas bearing | |
| JPH01224028A (en) | Method for dehumidifying gas |