JPS62297247A - Production of optical element - Google Patents
Production of optical elementInfo
- Publication number
- JPS62297247A JPS62297247A JP13997586A JP13997586A JPS62297247A JP S62297247 A JPS62297247 A JP S62297247A JP 13997586 A JP13997586 A JP 13997586A JP 13997586 A JP13997586 A JP 13997586A JP S62297247 A JPS62297247 A JP S62297247A
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- bonding
- alcoholate
- optical
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 12
- 230000007062 hydrolysis Effects 0.000 claims description 10
- 238000006460 hydrolysis reaction Methods 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 abstract description 14
- 230000001070 adhesive effect Effects 0.000 abstract description 14
- 239000012790 adhesive layer Substances 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 125000001183 hydrocarbyl group Chemical group 0.000 abstract 1
- 239000010408 film Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- 235000019441 ethanol Nutrition 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 235000007173 Abies balsamea Nutrition 0.000 description 1
- 239000004857 Balsam Substances 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 244000018716 Impatiens biflora Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
（産業上の利用分野）
本発明は、透過光学系（ご用いられる光′＃素子、中で
も紫外線領域を対象とした光学素子を、接着剤にＳｉ−
アルコレートを用いて接着することにより光学素子を製
造する方法に関する。Detailed Description of the Invention 3. Detailed Description of the Invention (Field of Industrial Application) The present invention provides a transparent optical system (an optical element used, especially an optical element targeted for the ultraviolet region), which is attached to an adhesive. niSi-
The present invention relates to a method of manufacturing an optical element by bonding using alcoholate.
従来、透過光学系に用いられる光学素子、例えば、レン
ズ、プリズムの接着にはバルサム、エポキシ系、紫外線
硬化型の接着剤が使用されてきた。Conventionally, balsam, epoxy, and ultraviolet curing adhesives have been used to bond optical elements used in transmission optical systems, such as lenses and prisms.
しかし、これらの投＠刑は、紫外線領域（波長２００ｎ
ｍ〜４００ｎｍ ）にあける光透過率か高くないため、
波長３００ｎｍ以下の領域で用いる光学素子に対して使
用できるものはなかった。また、エキシマ・レーザーに
代表される、エネルギーの高い紫外光に対しては、接着
剤が吸収を起こす結果、接着剤の耐光牲が低く、光学素
子の接着ができないという欠点があった。このため、光
学素子の製造過程において、該波長領域で用いる、光学
素子の接着を行なうときにはオプティカル・コンタクト
を用いるのが唯一の方法であった。しかしながら、オプ
ティカル・コンタクトをするためには、梯若面の表面粗
さが波長の１／＋００というように非常に小ざいことが
必要である。そのため、光学素子の表面を十分に平滑に
なるよう研磨しなければならなかったり、光学素子上に
薄膜を設け、この薄膜そ介在するものの場合には接着を
か悪いという欠点があった。However, these injections are in the ultraviolet region (wavelength 200 nm).
Since the light transmittance is not high in the range (m~400nm),
There was nothing that could be used for optical elements used in the wavelength region of 300 nm or less. Furthermore, the adhesive absorbs high-energy ultraviolet light, typified by excimer lasers, resulting in low light resistance of the adhesive and the disadvantage that optical elements cannot be bonded together. For this reason, in the manufacturing process of optical elements, the only method for bonding optical elements used in this wavelength range has been to use optical contacts. However, in order to make optical contact, it is necessary that the surface roughness of the ladder surface be extremely small, such as 1/+00 of the wavelength. Therefore, the surface of the optical element must be polished to be sufficiently smooth, or a thin film is provided on the optical element, and if this thin film is present, the adhesion is poor.
（発明が解決しようとする問題点）
本発明は、上述従来例の欠点を除去するためになされた
ものであり、その目的（よ、紫外域の光を吸収しない接
着層を設けて光学素子を接着できる新規な方法を利用し
た光学素子の製造法を提供することにある。(Problems to be Solved by the Invention) The present invention has been made in order to eliminate the drawbacks of the above-mentioned conventional examples. An object of the present invention is to provide a method for manufacturing an optical element using a new bonding method.
上記の目的は、紫外線領域に用いる光学素子を接着して
貼り合わせる工程を有する光学素子の製造方法において
、該光学素子の接着を、シリコンアルコレートの加水分
解生成物により行なうことにより達成される。The above object is achieved in a method for manufacturing an optical element that includes a step of adhering and bonding optical elements used in the ultraviolet region, by adhering the optical elements using a hydrolysis product of silicon alcoholate.
以下、実施例に従い本発明の詳細な説明する。 Hereinafter, the present invention will be explained in detail according to Examples.
第１図はプリズム・タイプの偏光ビーム・スプリッター
を示す模式図である。この偏光ビーム・スプリッターは
、偏光ビーム・スプリッター膜３か成＠されたプリズム
１ともう一つのプリズム２とかＳｉ−アルコレートの加
水分解生成物４により接着されて形成されたものである
。FIG. 1 is a schematic diagram showing a prism type polarizing beam splitter. This polarizing beam splitter is formed by adhering a polarizing beam splitter film 3 to a formed prism 1 and another prism 2 or a hydrolysis product 4 of Si-alcoholate.
各プリズムは合成石英から成り、一方のプリズム］上に
設けられた偏光ビーム・スプリッター膜３は誘電体の多
層膜から成り、真室蒸着、スパッター、イオンブレーテ
ィング等により形成されたものである。この偏光ビーム
・スプリッターの分光特性を藁２図に示す、蔦２図で、
５は反射率のＰ成分、６は反射率のＳ成分を示す。なあ
、この偏光ビーム・スプリッターはＫｒＦ・ニキシマ・
レーザー用のものである。Each prism is made of synthetic quartz, and the polarizing beam splitter film 3 provided on one of the prisms is made of a multilayer dielectric film, and is formed by vacuum evaporation, sputtering, ion blating, or the like. The spectral characteristics of this polarizing beam splitter are shown in Figure 2 and Figure 2.
5 indicates the P component of the reflectance, and 6 indicates the S component of the reflectance. Hey, this polarizing beam splitter is KrF, Nikima,
It is for laser use.
上記偏光ど−ム・スプリッターの両プリズムを接着する
ために本発明ではＳｌ−アルコレートを用いる。Ｓｌ−
アルコレートは、加水分解されることにより、ガラス状
のＳｉＯ２となつ接着能を呈し、且つ紫外領域の光を実
質的に吸収しないものとなるので、このように接着剤と
して利用できる。しかもＳｉアルコレートの加水分解生
成物とプリズムを構成する石英ガラスとは同じ成分であ
るので、両者の屈折率が一デタする上に両者の親和性も
高く強い接着力を示す。In the present invention, Sl-alcoholate is used to bond both prisms of the polarizing beam splitter. Sl-
When alcoholate is hydrolyzed, it exhibits the adhesive ability of forming glass-like SiO2 and does not substantially absorb light in the ultraviolet region, so it can be used as an adhesive in this way. Moreover, since the hydrolyzed product of Si alcoholate and the quartz glass constituting the prism have the same components, their refractive indexes are one digit apart and their affinity is high and they exhibit strong adhesive strength.
Ｓｉ−アルコレートは種々のものが利用できるけれども
例えばエチルシリケート
Ｓ ｉ５０．＋（ＯＣ２Ｈ５） ＋□等を選択すればよ
い。ただし他にもシリコンテトラエトキサイド： ５ｉ
（ｏｃ２＋５）４ｖの５ｉｎＯｎ−＋（ＯＣ２Ｈｓ）２
ｎ＋２に代表される５１ｎＯｎ−＋ＣＯＲ＞２ｎ＋２（
Ｒは言換または非茸換の炭化水素基、ｎは１以上）やＲ
，ｔｓｉ（ＯＲ）４−、等のＳ１アルコラードが使用で
きる。Various Si-alcoholates are available, such as ethyl silicate Si50. +(OC2H5) +□ etc. may be selected. However, there is also silicon tetraethoxide: 5i
(oc2+5)4v5inOn-+(OC2Hs)2
51nOn-+COR>2n+2(
R is a substituted or non-replaced hydrocarbon group, n is 1 or more) or R
, tsi(OR)4-, etc. can be used.
上に例示されたようなＳｉ−アルコレートの加水分解の
条件、触媒は特に制限はなく、常法に従って加水分解を
実施すればよい。The conditions and catalyst for hydrolyzing the Si-alcoholate as exemplified above are not particularly limited, and the hydrolysis may be carried out according to a conventional method.
加水分解後には溶媒のアルコール、もしくはエステルが
残留するが、低沸点のアルコール、エステル、（例えば
、エチルアルコール、硫酸エステル等）は、接着後揮発
する。より積極的にこれを除去するならば、加熱するが
真空にすることで処理できる。また接着に際して接着面
にゴミ、ホコリ等の異物や不純物か存在すると、接着強
度か低下したり、レーザー損傷の原因になることがら、
接着においでは、接着面を十分クリーニングするととも
に、接着剤を口遇して用いるなど、不純物の除去が必要
である。特に作業環境としては、クリーンルームが適し
ている。After hydrolysis, the alcohol or ester of the solvent remains, but the alcohol or ester with a low boiling point (for example, ethyl alcohol, sulfuric ester, etc.) evaporates after adhesion. If you want to remove it more aggressively, you can do it by heating or creating a vacuum. In addition, if there are foreign substances or impurities such as dirt or dust on the bonding surface during bonding, it may reduce the bond strength or cause laser damage.
In adhesion, it is necessary to thoroughly clean the adhesion surface and remove impurities, such as by using an adhesive. A clean room is particularly suitable as a work environment.
両プリズムを接着するために、Ｓｉ−アルコレートの加
水分解生成物を両プリズムの貼り合わせ面にコーティン
グする必要があるが、そのために例えば貼り合わせ面に
滴下、塗布して接着するなどの一般的な方法も利用でき
るけれども、接着層を１ｕ程度にまで薄くするために次
の方法が好適である。即ち、両プリズムを接合し、その
隙間にＳｉアルコレートの加水分解生成物を注射器等を
利用して注入して、毛細管現象により両プリズムの接合
面全体に加水分解生成物を行き渡らせる方法である。こ
の方法において、Ｓ１アルコレ一トヲ接合面上にうまく
広げ、かつ膜厚、膜の形成速度をコントロールするため
にはＳｉ−アルコレートに適当な粘性をもたらすことが
必要である。これは金属アルコレートを適当に選択した
溶液に溶解することにより実現できる。この溶液として
は、例えばブチルアルコール等の高沸点アルコールやエ
スデルが利用できる。In order to bond both prisms together, it is necessary to coat the bonded surfaces of both prisms with a hydrolyzed product of Si-alcoholate. Although other methods can be used, the following method is suitable for making the adhesive layer as thin as about 1 μ. That is, this is a method in which both prisms are joined, and a hydrolysis product of Si alcoholate is injected into the gap using a syringe or the like, and the hydrolysis product is spread over the entire joint surface of both prisms by capillary action. . In this method, it is necessary to provide the Si-alcoholate with an appropriate viscosity in order to properly spread the S1 alcoholate on the bonding surface and to control the film thickness and film formation rate. This can be achieved by dissolving the metal alcoholate in an appropriately selected solution. As this solution, for example, high boiling point alcohol such as butyl alcohol or esdel can be used.
一般にＳｉ−アルコレートは、加水分解後、加熱するこ
とによって、脱水、重合が進み５ｉ０２非晶貨膜へ変化
し、光学素子の材質により近くものとなる。しかし、本
発明、特にこの笑施例では、加熱を行なわなくても、接
着層は加熱をした場合と同等の光学的特性を示し且つ実
用上十分な接着能を呈するので、加熱の必要はない。In general, when Si-alcolate is heated after hydrolysis, dehydration and polymerization proceed, changing to a 5i02 amorphous film, which more closely resembles the material of optical elements. However, in the present invention, especially in this embodiment, even without heating, the adhesive layer exhibits the same optical properties as in the case of heating, and exhibits practically sufficient adhesion ability, so there is no need for heating. .
本発明を、グラン・トムソン、グラン・ティラー、ウォ
ラストン・プリズム等の製造に適用し、その構成部品を
Ｓｉ−アルコレートの加水分解生成物により接着するこ
とにより、従来よりも短波長領域まで使用できる各種の
プリズムを提供することができる。By applying the present invention to the production of Glan-Thomson, Glan Tiller, Wollaston prisms, etc., and bonding their components with a hydrolysis product of Si-alcoholate, it is possible to use them in a shorter wavelength range than before. Various types of prisms can be provided.
また、光学部品同士を接着した光学素子のみでなく、本
発明は、光学部品と金属等からなる光学素子の製造にも
適用できる。Moreover, the present invention is applicable not only to the production of optical elements in which optical parts are bonded together, but also to the manufacture of optical elements made of optical parts and metal, etc.
なあ、本発明で貼り合わされる光学素子とは光を集光、
反射、屈折、干渉等させる作用を果たすもの全てを含み
、レンズ、プリズムの他に例えばミラー、グレーティン
グ等を含む、従って、本発明で完成される光学素子は貼
り合わせの工程を製造過程中にもつものを広く含む。By the way, the optical elements bonded together in the present invention are used to condense light,
It includes everything that performs functions such as reflection, refraction, and interference, and includes mirrors, gratings, etc. in addition to lenses and prisms. Therefore, the optical element completed by the present invention has a bonding process during the manufacturing process. Includes a wide range of things.
（発明の効果〕
以上詳細に説明したように、光学素子の接着剤として、
Ｓｉ−アルコレートを用いた本発明では接着力が強く、
しかも接着層と接着基体との屈折率が調和し、その上接
着層による紫外光の吸収がなく透過率が低下しない光学
素子が製造できる。また、本発明では、オプティカル・
コンタクトを利用した場合に比べて、光学部品の接着力
が接着面の粗さに杉響を受けにくいので、本発明は広開
な光学素子の製造に適用できる。(Effect of the invention) As explained in detail above, as an adhesive for optical elements,
The present invention using Si-alcoholate has strong adhesive strength,
Furthermore, an optical element can be manufactured in which the refractive indexes of the adhesive layer and the adhesive base are harmonized, and furthermore, the adhesive layer does not absorb ultraviolet light and the transmittance does not decrease. In addition, in the present invention, optical
Compared to the case where a contact is used, the adhesive force of an optical component is less affected by the roughness of the adhesive surface, so the present invention can be applied to the manufacture of a wide range of optical elements.
第１図は、本発明の一実施例により製造されたプリズム
・タイプの偏光ビーム・スブリ・ンターの断面図、第２
図は、第１図の偏光ど一ム・スプリッターの分光特性を
示す図である。
１．２はプリズム、３はプリズム］上に形王された偏光
ビーム・スプリッター膜、４はＳｌ−アルコレートの加
水分解生成物の層、５は反射率のＰ成分、６は反射率の
Ｓ成分を示す。FIG. 1 is a cross-sectional view of a prismatic type polarized beam submersible center manufactured in accordance with one embodiment of the present invention;
The figure is a diagram showing the spectral characteristics of the polarization dual beam splitter shown in FIG. 1. 1.2 is a prism, 3 is a polarizing beam splitter film formed on the prism, 4 is a layer of hydrolysis product of Sl-alcoholate, 5 is a P component of reflectance, and 6 is S of a reflectance. Indicates the ingredients.
Claims (1)
る工程を有する光学素子の製造方法において、該光学素
子の接着を、シリコンアルコレートの加水分解生成物に
より行なうことを特徴とする光学素子の製造方法。 ２）前記の紫外線領域が波長２００〜４００ｎｍの範囲
である特許請求の範囲第１項記載の光学素子の製造方法
。[Claims] 1) A method for manufacturing an optical element, which includes a step of bonding and bonding optical elements used in the ultraviolet region, characterized in that the bonding of the optical elements is performed using a hydrolysis product of silicon alcoholate. A method for manufacturing an optical element. 2) The method for manufacturing an optical element according to claim 1, wherein the ultraviolet ray range has a wavelength of 200 to 400 nm.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13997586A JPS62297247A (en) | 1986-06-18 | 1986-06-18 | Production of optical element |
| US08/162,794 US5725626A (en) | 1986-06-18 | 1993-12-07 | Method for manufacturing an optical element by bonding a plurality of elements |
| US08/409,952 US5683480A (en) | 1986-06-18 | 1995-03-23 | Method of bonding two prisms with a hydrolysis product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13997586A JPS62297247A (en) | 1986-06-18 | 1986-06-18 | Production of optical element |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6117402A Division JP2786996B2 (en) | 1994-05-09 | 1994-05-09 | Manufacturing method of optical parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62297247A true JPS62297247A (en) | 1987-12-24 |
| JPH0542379B2 JPH0542379B2 (en) | 1993-06-28 |
Family
ID=15258024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13997586A Granted JPS62297247A (en) | 1986-06-18 | 1986-06-18 | Production of optical element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62297247A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1008567A4 (en) * | 1997-07-23 | 2000-06-14 | Hamamatsu Photonics Kk | Method of bonding glass members |
| WO2015133260A1 (en) * | 2014-03-07 | 2015-09-11 | コニカミノルタ株式会社 | Projection device, method for producing optical coupling component, and optical coupling component |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2601123A (en) * | 1947-04-05 | 1952-06-17 | American Optical Corp | Composition for reducing the reflection of light |
-
1986
- 1986-06-18 JP JP13997586A patent/JPS62297247A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2601123A (en) * | 1947-04-05 | 1952-06-17 | American Optical Corp | Composition for reducing the reflection of light |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1008567A4 (en) * | 1997-07-23 | 2000-06-14 | Hamamatsu Photonics Kk | Method of bonding glass members |
| US6314759B1 (en) | 1997-07-23 | 2001-11-13 | Hamamatsu Photonics K.K. | Method of bonding glass members |
| WO2015133260A1 (en) * | 2014-03-07 | 2015-09-11 | コニカミノルタ株式会社 | Projection device, method for producing optical coupling component, and optical coupling component |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542379B2 (en) | 1993-06-28 |
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