JPS6229149B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser hole machining device, and more particularly to a hole machining device that can perform hole machining with high accuracy regardless of the diameter of the hole to be formed.

Various types of hole machining devices have been proposed as this type of hole machining device. An example of this is as shown in FIG.
A pair of reflective plane mirrors 16A, 16 for transmitting data to
B, and a nozzle 18 that injects gas in the direction of convergence of the condenser lens 14.

However, according to the configuration shown in FIG. 1, hole machining can be performed by rotating the machining head 10 around the optical axis of the laser beam 12;
Since the laser beam 12 is reflected in a crank shape using two plane mirrors 16A and 16B, it is suitable for drilling large diameter holes, but it is limited in drilling small diameter holes due to the dimensional restrictions of the plane mirrors 16A and 16B. has certain drawbacks.

In addition, as shown in FIG. 2, a hole processing device for drilling small diameter holes uses four plane mirrors 16A to 16D to bend the laser beam 12 into a U-shape, and then redirects the laser beam in the same direction as the incident light. There is a device configured to emit light, but in this case, four plane mirrors 16A to 1
Since it uses 6D, it has the disadvantage that its position adjustment is troublesome.

Furthermore, as shown in Fig. 3, there is a method of forming holes all at once by combining a conical lens 20 and a condensing lens 14, but while this method has good productivity, it condenses the light perpendicularly to the workpiece. There is a disadvantage that the beam is not irradiated and the accuracy of the hole is reduced. In addition, it is difficult to arrange the nozzle 18 coaxially with the condensed beam, and the diameter of the machined hole is limited to the diameter of the conical lens 20 and the condensing lens 14. This lens system has the disadvantage that it cannot be set arbitrarily using just one lens system.

Furthermore, as shown in FIG. 4, there is a method in which the hole is machined by rotating the condenser lens 14 with a position off its axis as the center of rotation. It has the advantage of being machinable, but the distance from the rotation axis to the lens axis becomes the radius of the hole to be machined, and the diameter of the hole that can be machined is regulated by the diameter of the laser beam 12 and the size of the condensing lens 14. This method has disadvantages in that it is troublesome to set the center of rotation, the apparatus is complicated, and the condensed beam is irradiated obliquely to the workpiece as in the case of FIG.

Further, as shown in FIG. 5, the processing head 10 and the condensed beam are fixed, and a processing table 24 on which a workpiece 22 is placed is controlled by a control device 25 such as numerical control.
There is a method that performs hole processing by horizontally moving the machining table 24 to a desired hole diameter, but this method of moving the processing table 24 requires a larger weight shift than the method of scanning the light shown in FIGS. 1 to 4. This method has the drawbacks of being uneconomical and difficult to achieve accuracy.

As described above, the conventional apparatus cannot machine holes with high precision regardless of the size of the hole diameter.

The present invention was developed in view of the above-mentioned conventional problems, and its purpose is to process holes of arbitrary diameter with high precision using a lightweight processing head that houses three plane mirrors and one condensing lens. In particular, it is an object of the present invention to provide a hole machining device using a laser that enables small hole machining.

In order to achieve the above object, the present invention provides a dogleg-shaped plane mirror for inputting and outputting laser light, which is a combination of two plane mirrors with their reflection surfaces on the outside, and a dogleg-shaped plane mirror for inputting and outputting laser light, which is arranged so as to be able to move forward and backward in opposition to both of the reflection surfaces. A single plane mirror provided, a condensing lens that condenses the laser beam, a nozzle that injects gas in the emission direction of the condensed laser beam, and the nozzle is driven in conjunction with the opposing plane mirror. a linear drive mechanism that rotates the doglegged plane mirror, the opposing plane mirror, and the nozzle integrally with respect to the optical axis of the laser beam incident on the doglegged plane mirror; The present invention is characterized by comprising a control device that controls the drive mechanism.

Hereinafter, preferred embodiments of the present invention will be described based on the drawings.

FIG. 6 is a cross-sectional configuration diagram showing an embodiment of the device of the present invention.

In the figure, parts corresponding to those in FIGS. 1 to 5 are denoted by the same reference numerals, and detailed explanation thereof is omitted.
6 and 28 have the reflective surface 30 on the outside and the laser beam 1
A doglegged plane mirror 32 combined symmetrically with respect to a line orthogonal to the optical axis of the laser beam 2 is fixedly arranged with its plane mirror 26 facing the laser beam 12. The plane mirror 28 reflects the reflected light from the plane mirror 26, facing the reflecting surface of the plane mirror 28.
An opposing plane mirror 34 is arranged to be able to move forward and backward with respect to the doglegged plane mirror 32, and a nozzle 18 equipped with a condensing lens 14 is arranged to be able to slide parallel to the optical axis of the laser beam 12. ing.

36 is a linear drive mechanism that interlocks the opposing plane mirror 34 and the nozzle 18 and moves them in parallel in opposite directions;
38 is a rotation drive mechanism such as a drive motor that rotates the processing head 10 around the optical axis of the laser beam 12, and 40 is a numerical control device that controls both drive mechanisms.

The above is an example of the configuration of the device of the present invention, and the operation thereof will be explained next.

The laser beam 12 introduced into the processing head 10 is reflected by a plane mirror 26, then reflected by an opposing plane mirror 34, then reflected by a plane mirror 28, and is incident on the condenser lens 14 as reflected light parallel to the incident light, and is directed to the workpiece. (not shown). In this state, the rotational drive mechanism 38 is
By driving the machining head 10 and rotating the machining head 10 around the optical axis of the laser beam 12, hole machining can be performed. In this case, to set the hole diameter,
As shown in FIG. 7, when the radius of the machined hole is x, the amount of forward displacement of the opposing plane mirror 34 from the position corresponding to zero hole diameter is l, and the angle of incidence of the laser beam 12 on the plane mirror 26 is ( 90°-θ), the radius x of the machined hole can be expressed as x=2lcos2θ.
In this case, if θ=30°, x=l, and the displacement l of the opposing plane mirror 34 directly becomes the radius of the machined hole.

Furthermore, if the condensing lens 14 and the nozzle 18 are also moved by the same amount in the opposite direction to the opposing plane mirror 34, the central axis of the nozzle 18 and the optical axis of the condensed beam will coincide.

Therefore, by driving the linear drive mechanism 36 based on commands from the numerical control device 40, the opposing plane mirror 34, the condensing lens 14, and the nozzle 18 are moved the same distance in opposite directions to form a desired hole. You can set the radius of

In the above embodiment, the doglegged plane mirror 3
2 and the facing plane mirror 34 are condensed by the condensing lens 14, but the condensing lens 14 is not provided in the nozzle 18,
A condensing lens is placed on the incidence side of the doglegged plane mirror and attached separately or integrally to the part to which the doglegged plane mirror, the opposing plane mirror and the nozzle are attached,
The laser beam is condensed by the condenser lens before the laser beam is incident on the doglegged plane mirror. According to this configuration, the rotation axis of the processing head and the optical axis of the laser beam focused by the condensing lens can be easily aligned, and compared to a configuration in which the condensing lens 14 is provided in the nozzle 18, This has the effect of reducing the rotational momentum that occurs when the machining head 10 rotates, that is, the change in momentum of the laser optical axis that occurs when the radius of rotation of the laser beam is changed depending on the diameter of the machining hole.

Further, in the above description, the present invention is applied to hole machining, but it goes without saying that the present invention can also be applied to surface treatment by performing optical scanning by moving the opposed plane mirror 34 over time. .

As described above, according to the present invention, the irradiation position of the laser beam can be controlled by moving the opposing plane mirror forward and backward with respect to the dogleg-shaped plane mirror, so that the hole can be drilled with high precision regardless of the size of the machined hole. It has excellent effects such as being able to be processed and having a simple and lightweight structure.

[Brief explanation of the drawing]

1 to 5 are block diagrams showing a conventional device, FIG. 6 is a block diagram showing an embodiment of the device of the present invention, and FIG.
The figure is a principle configuration diagram showing the principle of hole machining by the apparatus of the present invention. In each figure, the same members are given the same symbols, 10 is a processing head, 12 is a laser beam, 14 is a condensing lens,
18 is a nozzle, 32 is a dogleg-shaped plane mirror, 34 is a facing plane mirror, 36 is a linear drive mechanism, 38 is a rotary drive mechanism, and 40 is a numerical control device.

Claims (1)

[Scope of Claims] 1. A dogleg-shaped plane mirror for inputting and outputting laser light, which is a combination of two plane mirrors with their reflecting surfaces on the outside, and one mirror disposed so as to be able to move forward and backward in opposition to both of the reflecting surfaces. a condensing lens that condenses the laser beam, a nozzle that injects gas in the emission direction of the condensed laser beam, and a linear drive mechanism that drives the nozzle in conjunction with the opposed plane mirror. and a rotational drive mechanism that integrally rotates the doglegged plane mirror, the opposing plane mirror, and the nozzle with respect to the optical axis of the laser beam incident on the doglegged plane mirror, and controls the linear drive mechanism and the rotational drive mechanism. What is claimed is: 1. A laser hole machining device, characterized in that it is equipped with a control device. 2. In the device according to claim 1,
A hole processing device using a laser, characterized in that a condensing lens is disposed within a nozzle to condense light emitted from a dogleg-shaped plane mirror. 3. In the device according to claim 1,
A condensing lens is placed on the incidence side of the doglegged plane mirror,
A laser hole processing device characterized by guiding a focused laser beam to a dogleg-shaped plane mirror.