JPH0691386A - Laser beam machine - Google Patents

Abstract

PURPOSE:To provide a laser beam machine which is small in size and light in weight and having an excellent dynamic behavior. CONSTITUTION:The laser beam machine 6 consists of a lens 21, a flat mirror 22 having a rotating axis AX by which a spotting beam S is positioned in the direction X perpendicular to the optical axis 25 of the laser beam exited from the lens 21, a flat mirror 23 having a rotating axis AY by which the spotting beam S is positioned in the direction Y (perpendicular direction on the paper) perpendicular to the optical axis 25 and the direction X and the like.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing apparatus which is attached to, for example, a wrist of a robot and performs processing such as drilling.

[0002]

2. Description of the Related Art There are various processes using laser light,
Thin plate cutting is one of them. In recent years, there has been a demand for machining a three-dimensional shape of an automobile body or the like. In such a case, it is common to install a laser machining head at the hand of an industrial robot to perform the work. When making a hole with a relatively small diameter, the machining head is driven using all or most of the movement axes of the robot. Even when making a hole in a plane, it moves in that plane. In order to do this, it is necessary to drive many axes of the robot. However, since the dynamic characteristics of each axis of the robot are not uniform, the trajectory of the machining head will be distorted due to the difference in the dynamic characteristics in high-speed cutting, and even if you try to form a perfect hole, the hole is not a perfect circle. It becomes a hole with a distorted shape.

As a countermeasure against this, a system has been realized in which a motion axis for drilling is added to the tip of the robot. This prior art is disclosed in, for example, Robot No. 67 Page 34-
It is disclosed on page 38. This is because the robot moves to the place where it makes a hole, holds the position and posture with respect to the work surface, and draws the locus of the hole with two axes that have both added high dynamic characteristics. Will be handled in polar coordinates. The tool locus of a predetermined circle that grips the tool on the first axis is the rotation locus of the second axis that is the rotation axis that rotates the first axis. The distance between the center of rotation of the first shaft and the center of rotation of the second shaft is determined by the specifications of the device. First
A predetermined radius is given by the rotation angle of the shaft of, and the small circle machining can be accurately performed by controlling the first shaft and the second shaft based on the information of the peripheral speed.

[0004]

In this prior art, since the laser light is transmitted by the optical fiber, the flexibility of the optical fiber allows the optical fiber to be directly connected to the processing head which moves two-dimensionally. It is possible. But,
When the laser light has a large output such as a CO ₂ laser, it becomes impossible to guide the light with an optical fiber. If a light guide means by a mirror is adopted as a countermeasure, an optical path using a reflecting mirror to the machining head portion is adopted. Need to be provided.

A structure in which the above-mentioned concept of the prior art is applied to a structure using such a reflecting mirror will be simply as shown in FIG. The first and second reflecting mirrors M1,
M2 is fixed to the supporting member 1, and the third and fourth reflecting mirrors M3 and M4 are fixed to the other supporting member 2. The support member 2 is angularly displaceable around the first axis A1. The support member 1 can be angularly displaced about the second axis A2, and laser light having an optical axis that coincides with the second axis A2 is guided from the laser light source. The laser light 3 reflected by the reflecting mirror M1 has an optical axis that coincides with the first axis A1 as indicated by reference numeral 4, is reflected by the reflecting mirror M2, passes through the reflecting mirrors M3, M4, It is emitted parallel to the first and second axes A1 and A2 through a condenser lens 5a as indicated by reference numeral 5 and used for drilling.

In the structure shown in FIG. 7, there is a problem that the number of reflecting mirrors M1 to M4 is large, the optical path length is long, and the efficiency is lowered. There is also a problem that the structure is complicated and the entire structure becomes large.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a laser processing apparatus having a small structure and a light weight and excellent dynamic characteristics in order to solve the above-mentioned problems.

[0008]

According to the present invention, a condensing optical system for converging a laser beam to form a spot light and a laser beam emitted from the condensing optical system are perpendicular to the optical axis. A first reflecting mirror having a first rotation axis for positioning the spot light in a first direction, and a first reflecting mirror for positioning the spot light in a second direction perpendicular to the optical axis and the first direction. A laser processing apparatus comprising: a second reflecting mirror having two rotation axes.

According to the present invention, a condensing optical system for converging laser light to form spot light, a first direction perpendicular to the optical axis of the laser light emitted from the condensing optical system, and A reflecting mirror having a first rotation axis and a second rotation axis perpendicular to the first rotation axis for positioning the spot light in a second direction perpendicular to the optical axis and the first direction is provided. It is a laser processing device.

[0010]

According to the present invention, the condensing optical system for converging the laser light to form the spot light, and the spot in the first direction perpendicular to the optical axis of the laser light emitted from the condensing optical system. A first reflecting mirror having a first rotation axis for positioning light, and a second reflecting axis having a second rotation axis for positioning spot light in a second direction perpendicular to the optical axis and the first direction. By providing the reflecting mirror, the dynamic characteristics of the driving portion are improved, and the position of the processing point that is focused as the spot light of the laser light is two-dimensionally and highly accurately controlled on the workpiece as the workpiece. Therefore, for example, processing and cutting of small diameter holes can be performed at high speed and with high accuracy.

Further, according to the invention, a condensing optical system for converging the laser light to form a spot light, and a first direction perpendicular to the optical axis of the laser light emitted from the condensing optical system. And a reflecting mirror having a first rotation axis for positioning the spot light and a second rotation axis perpendicular to the first rotation axis in a second direction perpendicular to the optical axis and the first direction. Similarly to the above, the dynamic characteristics of the driving portion are improved, and the position of the processing point that is focused as the spot light of the laser light can be two-dimensionally controlled on the work with high accuracy.

[0012]

1 and 2 are schematic perspective views showing the optical principle of the present invention. First, in FIG. 1, the laser beam L that has become a parallel beam is reflected by the plane mirror 22 that can be angularly displaced about the rotation axis AX, and further is reflected by the plane mirror 23 that can be angularly displaced about the rotation axis AY. The spot light S is formed at the focal position of the lens 21 by being incident substantially perpendicularly to the surface of the.
The spot light S has a high energy density as a result of focusing the light, and is melted in a spot shape by introducing a work such as a thin plate at this focal position.

In this state, the spot light S is positioned in the X direction by angularly displacing the plane mirror 22 around the rotation axis AX, and the plane mirror 23 is rotated along the rotation axis AY.
By angularly displacing the spot light S
Is positioned in the direction. Therefore, the spot light S can be two-dimensionally positioned by controlling the angular displacement amount θx of the plane mirror 22 and the angular displacement amount θy of the plane mirror 23, respectively.

Next, in FIG. 2, similarly to FIG. 1, the laser beam L that has become a parallel beam is reflected by the plane mirror 24 that can be angularly displaced about the two rotation axes AX and AY, and is reflected on the surface of the lens 21. By making the light incident on the lens 21 substantially vertically, a minute spot light S is formed at the focal position of the lens 21.

In this state, the spot light S is positioned in the X direction by angularly displacing the plane mirror 24 around the rotation axis AX, and the plane mirror 24 is rotated along the rotation axis AY.
The spot light S is positioned in the Y direction by angularly displacing the spot light S around. Therefore, by controlling the angular displacements θx and θy of the plane mirror 24, respectively,
It is possible to position the spot light S two-dimensionally.

FIG. 3 is a sectional view showing the structure of a laser processing apparatus which is an embodiment of the present invention. This laser processing device 6 is attached to, for example, the wrist 8 of a 6-axis articulated robot 7 shown in FIG. 4, and the laser light emitted from the laser light source 15 is reflected along the axes 9-14. The spot light S that is guided by the light guide means and is formed on the output side of the laser processing device 6 is applied to a work (not shown) such as a thin plate, and a cutting process or a hole process is performed into a desired shape.

As shown in FIG. 3, this laser processing apparatus 6
Is a lens 21 which is a focusing optical system for converging the laser light L to form the spot light S, and the spot light S in the direction X perpendicular to the optical axis 25 of the laser light emitted from the lens 21. A plane mirror 22 having a rotation axis AX for positioning, and a direction Y perpendicular to the optical axis 25 and the direction X.
It is composed of a plane mirror 23 having a rotation axis AY for positioning the spot light S (in the direction perpendicular to the paper surface), a housing 40 for holding these, and the like.

The plane mirror 22 can be angularly displaced about the rotation axis AX, and the motor 32 can be controlled to a desired rotation amount.
Is fixed to the output shaft 31 of the flat mirror 23,
It is fixed to an output shaft 33 of a motor 34 that can be angularly displaced about the rotation axis AY and can be controlled to a desired rotation amount. In addition, in order to detect the amount of angular displacement of each of the plane mirrors 22 and 23 with high accuracy, an angular displacement detecting means such as a rotary encoder may be attached.

The housing 40 of the laser processing apparatus 6 is fixed to the wrist 8 of the robot 7 by the flange 41, and the laser light L introduced from the laser light source 15 shown in FIG. 4 is reflected by the plane mirrors 22 and 23 and the lens 21. The spot light S is formed at the focal position of the lens 21 by being incident on the work 21 and is irradiated on the work (not shown).

When the spot light S is moved two-dimensionally, it is positioned in the XY directions by controlling the angular displacement amount of each motor 32, 34. Therefore, for example, while irradiating the work with the spot light S, the spot light S is moved from a certain coordinate (Xa, Ya) in the X direction to (Xa + D, Ya), and then in the Y direction (Xa + D, Ya).
a + D, Ya + D) and then in the -X direction (X
a, Ya + D), and finally (X
By moving to (a, Ya), it is possible to form a square hole having a side length D.

When round hole machining is performed, X = Xb + R
The parameter θ is controlled from 0 to 2 by the control of the respective motors 32 and 34 using the equation of x cos θ, Y = Yb + R × sin θ.
Coordinates (Xb, Y
It is possible to form a hole with a radius R centered on b).

FIG. 5 is a sectional view showing the construction of a laser processing apparatus which is another embodiment of the present invention. The laser processing apparatus 6 according to the present embodiment is perpendicular to the lens 21 that is a condensing optical system that focuses the laser light L to form the spot light S, and the optical axis 25 of the laser light emitted from the lens 21. A flat mirror 24 having a rotation axis AX for positioning the spot light and a rotation axis AY perpendicular to the rotation axis AX in the horizontal direction X and the Y direction (direction perpendicular to the paper surface) perpendicular to the optical axis 25 and the direction X. , The plane mirror 24 with two rotation axes AX, A
Biaxial drive means 50 for angularly displacing around Y,
It is composed of a housing 40 that holds these.

FIG. 6 (a) is a front view of the biaxial drive means 50 shown in FIG. 5, and FIG. 6 (b) is B- of FIG. 6 (a).
It is sectional drawing along the B line. The plane mirror 24 is a movable member 5.
It is fixed to supporting members 51 and 52 which are connected to a shaft 53 which is rotatably supported by a bearing 55 with respect to 4, and is angularly displaced around a rotation axis AY by the rotation of a bevel gear 56. Bevel gear 5
6 is meshed with the bevel gears 57 and 58, and the bevel gear 57 is connected to the output shaft 61 of the motor 63 attached to the side plate 65 installed in the housing 40. It is connected to an output shaft 62 of a motor 64 attached to a side plate 66 installed in the housing 40. On the other hand, the movable member 54 can be angularly displaced around the rotation axis AX by the bearings 59 and 60.

When the plane mirror 24 is angularly displaced about the rotation axis AX, the bevel gears 57 are rotated by rotating the output shafts 61, 62 of the motors 63, 64 in the same rotation direction with respect to the rotation axis AX by the same amount. , 58 both rotate in the same rotational direction by the same amount and mesh with the bevel gear 56.
Receives a force around the rotation axis AX, whereby the movable member 54 is angularly displaced around the rotation axis AX. Therefore, according to the movement of the movable member 54, the support members 51,
52 and the plane mirror 24 will be angularly displaced about the axis of rotation AX.

On the other hand, when the plane mirror 24 is angularly displaced about the rotation axis AY, the output shafts 61, 61
By rotating 62 with respect to the rotation axis AX in the opposite rotation directions by the same amount, the bevel gears 57, 58 rotate in the opposite direction by the same amount, and the bevel gear 5 meshing with them rotates.
6 rotates around the rotation axis AY. Therefore, the support members 51, 52 and the plane mirror 24 are angularly displaced about the rotation axis AY in accordance with the movement of the shaft 53 connected to the bevel gear 56.

The housing 40 of the laser processing apparatus 6 is fixed to the wrist 8 of the robot 7 by the flange 41, and the laser light L introduced from the laser light source 15 shown in FIG. 4 is reflected by the plane mirror 24 and is incident on the lens 21. By,
Spot light S is formed at the focal position of the lens 21 and is irradiated onto a work (not shown).

When the spot light S is two-dimensionally moved, it can be positioned in the XY directions by controlling the angular displacement of the motors 63 and 64.

[0028]

As described in detail above, according to the present invention,
Without controlling the entire articulated robot, the laser processing device attached to the tip of the robot arm
Laser processing can be performed. Therefore, since the operating portion is lightweight and small, the dynamic characteristics can be improved, and it is possible to perform hole processing and cutting processing with high accuracy and high speed.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an optical principle of the present invention.

FIG. 2 is a schematic perspective view showing an optical principle of the present invention.

FIG. 3 is a cross-sectional view showing a configuration of a laser processing apparatus that is an embodiment of the present invention.

FIG. 4 is a configuration diagram showing a 6-axis articulated robot 7 to which a laser processing device 6 according to the present invention is attached.

FIG. 5 is a sectional view showing a configuration of a laser processing apparatus according to another embodiment of the present invention.

6 (a) is a biaxial drive means 50 shown in FIG.
6B is a cross-sectional view taken along the line BB of FIG. 6A.

FIG. 7 is a partial configuration diagram of a laser processing device according to a prior art.

[Explanation of symbols]

 6 laser processing device 7 robot 8 wrist 9-14 axis 15 laser light source 20 optical axis 21 lens 22, 23, 24 plane mirror 25 optical axis 31, 33 output axis 32, 34 motor 40 housing 41 flange 50 two-axis driving means 51, 52 Support member 53 Shaft 54 Movable member 55, 59, 60 Bearing 56, 57, 58 Bevel gear 61, 62 Output shaft 63, 64 Motor 65, 66 Side plate

Claims (2)

[Claims] 1. A condensing optical system for converging laser light to form spot light, and the spot light in a first direction perpendicular to the optical axis of the laser light emitted from the condensing optical system. A first reflecting mirror having a first rotation axis for positioning, and a second reflecting mirror having a second rotation axis for positioning the spot light in a second direction perpendicular to the optical axis and the first direction. A laser processing apparatus comprising a mirror. 2. A condensing optical system for converging laser light to form spot light, a first direction perpendicular to an optical axis of the laser light emitted from the condensing optical system, and the optical axis. And the second perpendicular to the first direction
A laser processing apparatus for positioning the spot light in a direction, the reflecting mirror having a first rotation axis and a second rotation axis perpendicular to the first rotation axis.