JPS6229059Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a baking device that heats a vacuum container and forcibly removes gas adsorbed on its inner surface in order to obtain an ultra-high vacuum.

First, one embodiment of the present invention will be described with reference to the drawings. 20 is a vacuum container made of stainless steel, 1 is an upper flange of the vacuum container 20, 2 is a lower flange of the vacuum container 20, 3 is a bolt that fastens the upper flange 1 and the lower flange 2, and 4 is screwed to the bolt 3. Nut 5 is a metal hollow O-ring provided on the flange surfaces of the upper flange 1 and lower flange 2, 6 is a metal hollow O-ring provided on the flange surfaces of the upper flange 1 and the lower flange 2, and 6 is a nut made of aluminum, shell, etc. that covers the outer surface of the vacuum vessel 20 and the lower flanges 1 and 2. Good heat conductive material,
Reference numeral 7 indicates a heating member such as a heater attached to the outer surface of the good heat conduction member 6, 8 indicates a heat insulating material, and 9 indicates a power source for baking.

In conventional baking equipment of this type, the vacuum container and its upper and lower flanges are usually made of stainless steel, and their outer surfaces are not coated with a good heat conductive material and are directly connected to a heating member such as a heater. was attached. Therefore, since stainless steel has a low thermal conductivity, when the input power of the heater is increased, the temperature of the outer surface in contact with the heater increases, and the heater is likely to be damaged. Further, since the outer surface of the vacuum container is not heated uniformly, there is a problem that thermal stress and thermal deformation occur in the vacuum container.

However, in the device of the present invention, as shown in the drawings, the outer surfaces of the vacuum vessel 20 and its flanges 1, 2, and other constituent members are covered with a good heat conductive member 6, so that the vacuum vessel constituent members and the heater, etc. Since the good heat conduction member 6 is interposed between the heater 7 and the heating member 7, the temperature of the portion in contact with the heater 7 can be lowered than when the good heat conduction member 6 is not interposed, and damage to the heater 7 can be prevented. At the same time, since the good thermally conductive member 6 with high thermal conductivity covers the entire outer surface of the vacuum container 20, the vacuum container 20 is heated uniformly, causing uneven thermal stress and thermal deformation on the flanges 1 and 2. does not occur. Generally, the amount of heat input per unit area is
It can be expressed using the following formula.

q=λΔT/δ However, q: Heat input per unit area Kcal/m ² h λ: Thermal conductivity Kcal/mh℃ ΔT: Temperature difference ℃ δ: Distance m Now, the heat input q and distance δ of heater 7 are If it is constant, the product of the thermal conductivity λ and the temperature difference ΔT will be constant. Therefore, if a material with a high thermal conductivity λ is used, ΔT becomes small, and the temperature of the part that comes into contact with the heater 7 decreases.

As explained in the embodiments above, the present invention has the following features:
Since a good heat conductive member is interposed between the constituent members of the vacuum container and the heating member, the temperature of the part where the heating member comes into contact is lowered, which prevents damage to the heating member and allows the vacuum container to be heated evenly. Since it is heated, thermal stress and thermal deformation can be suppressed.

[Brief explanation of drawings]

The drawing is a sectional view of a main part showing one embodiment of the present invention. Components of the vacuum container...20, 1, 2, heating member...7, good heat conductive member...6.

Claims (1)

[Scope of utility model registration request] 1. A baking device for heating and degassing a component of a vacuum container, characterized in that a good heat conductive member is interposed between the component of the vacuum container and the heating member.