JPS6228838U - - Google Patents

Info

Publication number
JPS6228838U
JPS6228838U JP11645685U JP11645685U JPS6228838U JP S6228838 U JPS6228838 U JP S6228838U JP 11645685 U JP11645685 U JP 11645685U JP 11645685 U JP11645685 U JP 11645685U JP S6228838 U JPS6228838 U JP S6228838U
Authority
JP
Japan
Prior art keywords
plasma generation
plasma
tube
furnace
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11645685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425222Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11645685U priority Critical patent/JPH0425222Y2/ja
Publication of JPS6228838U publication Critical patent/JPS6228838U/ja
Application granted granted Critical
Publication of JPH0425222Y2 publication Critical patent/JPH0425222Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP11645685U 1985-07-31 1985-07-31 Expired JPH0425222Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11645685U JPH0425222Y2 (OSRAM) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11645685U JPH0425222Y2 (OSRAM) 1985-07-31 1985-07-31

Publications (2)

Publication Number Publication Date
JPS6228838U true JPS6228838U (OSRAM) 1987-02-21
JPH0425222Y2 JPH0425222Y2 (OSRAM) 1992-06-16

Family

ID=31001061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11645685U Expired JPH0425222Y2 (OSRAM) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPH0425222Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006516806A (ja) * 2003-01-30 2006-07-06 アクセリス テクノロジーズ インコーポレーテッド 螺旋コイル結合形のリモートプラズマ源
JP2014522277A (ja) * 2011-06-03 2014-09-04 コリア・ベーシック・サイエンス・インスティテュート 医療用プラズマ滅菌装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006516806A (ja) * 2003-01-30 2006-07-06 アクセリス テクノロジーズ インコーポレーテッド 螺旋コイル結合形のリモートプラズマ源
JP2014522277A (ja) * 2011-06-03 2014-09-04 コリア・ベーシック・サイエンス・インスティテュート 医療用プラズマ滅菌装置
US9855354B2 (en) 2011-06-03 2018-01-02 Korea Basic Science Institute Apparatus for medical sterilization using plasma

Also Published As

Publication number Publication date
JPH0425222Y2 (OSRAM) 1992-06-16

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