JPS6228646A - Diaphragm type ozone sensor - Google Patents

Diaphragm type ozone sensor

Info

Publication number
JPS6228646A
JPS6228646A JP16931885A JP16931885A JPS6228646A JP S6228646 A JPS6228646 A JP S6228646A JP 16931885 A JP16931885 A JP 16931885A JP 16931885 A JP16931885 A JP 16931885A JP S6228646 A JPS6228646 A JP S6228646A
Authority
JP
Japan
Prior art keywords
container
diaphragm
ozone
gas
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16931885A
Other languages
Japanese (ja)
Other versions
JPH0569182B2 (en
Inventor
Michio Kada
嘉田 教夫
Kenichi Kawato
川戸 健一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP16931885A priority Critical patent/JPS6228646A/en
Publication of JPS6228646A publication Critical patent/JPS6228646A/en
Publication of JPH0569182B2 publication Critical patent/JPH0569182B2/ja
Granted legal-status Critical Current

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  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)

Abstract

PURPOSE:To exactly measure ozone concn. without being affected by other gaseous components by sealing a material which generates chemical emission of light by reacting with ozones in a container having light transmission window on one side and a gas permeable diaphragm on the other side and providing a photodetector thereto. CONSTITUTION:The ozones in the gas to be measured pass the gas permeable diaphragm 10 and intrude into the container 4 when a cap body 14 is removed and the container is put into the gas to be measured. Then the ozones induce the chemical reaction with ethylene 13 in the container 4 and generates the chemical emission of light. The generated light is transmitted through an optical transmission window 9 and is measured by the photodetector 2 consisting of a photomultiplier tube, etc. in a cylindrical body 1. The ozone concn. is measured from the intensity of the chemical emission of light. Part of the ethylene 13 in the container emerges from the container 4 to the outside through the diaphragm 10 and generates the chemical emission by effecting the chemical reaction with the ozones in the gas near the diaphragm 10. Since the inside surface of the container 4 is mirror-finished, both rays of the chemically emitted light advance toward the photodetector 12 side.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は隔膜式オゾンセンサに関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a diaphragm type ozone sensor.

〔従来の技術〕[Conventional technology]

従来よりガス中のオゾン濃度を測定する方法に化学発光
法を利用したものがある。これは、オゾンがchH4(
エチレン)、No(−酸化窒素)等特定の物質と反応す
る時の化学発光強度を光検出器によって測定し、該化学
発光強度からガス中のオゾン濃度を測定するようにした
ものである。
Conventionally, there is a method using chemiluminescence to measure the ozone concentration in gas. This means that ozone is chH4 (
The chemiluminescence intensity when reacting with specific substances such as ethylene) and No (nitrogen oxide) is measured by a photodetector, and the ozone concentration in the gas is measured from the chemiluminescence intensity.

第2図は上記化学発光法を利用したオゾン濃度測定装置
の概略を示す0図において、30は反応槽、31はエチ
レンの供給パイプ、32は測定対象であるサンプルガス
の供給パイプ、33は排気パイプで、これらのパイプ3
1.32.33は反応槽30に夫々接続されている。3
4は光電子増倍管等の光検出器、35は増幅器、36は
指示記録計、37は高圧msである。
Fig. 2 shows an outline of the ozone concentration measuring device using the chemiluminescence method described above, in which 30 is a reaction tank, 31 is an ethylene supply pipe, 32 is a sample gas supply pipe to be measured, and 33 is an exhaust gas. With pipes, these pipes 3
1, 32, and 33 are connected to the reaction tank 30, respectively. 3
4 is a photodetector such as a photomultiplier tube, 35 is an amplifier, 36 is an indicator recorder, and 37 is a high voltage ms.

38はフィルタ、39は調整器、40は圧力計、41は
エチレン流量調整弁、42はエチレン流量計、43は流
量計、44はポンプ、45はエチレン除去装置、46は
サンプルガス流fi調整弁である。
38 is a filter, 39 is a regulator, 40 is a pressure gauge, 41 is an ethylene flow rate adjustment valve, 42 is an ethylene flowmeter, 43 is a flowmeter, 44 is a pump, 45 is an ethylene removal device, 46 is a sample gas flow fi adjustment valve It is.

而して、反応槽30内にエチレン及びサンプルガスを夫
々導入し、サンプルガス中に含まれるオゾンがエチレン
と反応して化学発光を生ずる。この場合、エチレンの濃
度以上の過剰のオゾン濃度が持続されていれば化学発光
強度はオゾン濃度に比例するので、該化学発光強度を光
検出器34によって測定することによりサンプルガス中
のオゾン濃度を測定することができるのである。
Ethylene and sample gas are introduced into the reaction tank 30, and ozone contained in the sample gas reacts with ethylene to produce chemiluminescence. In this case, if an excessive ozone concentration higher than the ethylene concentration is maintained, the chemiluminescence intensity is proportional to the ozone concentration, so by measuring the chemiluminescence intensity with the photodetector 34, the ozone concentration in the sample gas can be determined. It can be measured.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしながら、上述の測定装置においては、反応槽30
及びこれにエチレン、サンプルガスを導入するパイプ3
1.32や反応後のガスを導出するパイプ33等複雑な
配管を要し、装置全体の構成が大掛かりなものとなり、
手軽に持ち運びすることが極めて困難である他、該測定
装置はガス中のオゾンの濃度は測定出来ても、液体中に
溶存するオゾンの濃度は測定出来ないものであった。
However, in the above measuring device, the reaction tank 30
and pipe 3 for introducing ethylene and sample gas into this.
It requires complicated piping such as 1.32 and pipe 33 for deriving the gas after the reaction, making the overall structure of the device large-scale.
In addition to being extremely difficult to carry easily, this measuring device can measure the concentration of ozone in gas, but cannot measure the concentration of ozone dissolved in liquid.

これに対し、定電位電解式(直接電解又はオゾンを酸素
に変換して測定する)、ガルバニ電池式、電量式等の隔
膜式オゾンセンサが考えられている。
In contrast, diaphragm type ozone sensors such as constant potential electrolysis type (direct electrolysis or measurement by converting ozone into oxygen), galvanic cell type, and coulometric type are being considered.

しかし、従来の隔膜式オゾンセンサは何れも他のガス(
例えば、COx、 HzS、HCI、 S Ox、 N
 Ox等)の干渉影響を受けるため選択性に欠け、オゾ
ン濃度を正確に測定するのが困難であった。
However, conventional diaphragm-type ozone sensors cannot handle other gases (
For example, COx, HzS, HCI, SOx, N
Ozone concentration is difficult to measure accurately due to the lack of selectivity due to the interference of ozone (Ox, etc.).

本発明は上述の実情を考慮してなされたもので、その目
的とするところは、オゾンのみを選択的に検出し、その
濃度を正確に測定し得る簡便な隔膜式オゾンセンサを提
供することにある。
The present invention has been made in consideration of the above-mentioned circumstances, and its purpose is to provide a simple diaphragm-type ozone sensor that can selectively detect only ozone and accurately measure its concentration. be.

〔問題点を解決するための手段〕[Means for solving problems]

オゾンと反応して化学発光を生ずる物質を封入し、光検
出器を備えた筒体に、前記隔膜側が外方を向くように、
前記容器を着脱自在に取り付けられるようにしている。
A cylindrical body containing a substance that reacts with ozone to produce chemiluminescence and equipped with a photodetector, with the diaphragm side facing outward;
The container can be detachably attached.

〔作用〕[Effect]

上記構成において、光透過窓としては、可視光ン及びオ
ゾンと反応して化学発光を生ずる物質を透過させ易い例
えばポリテトラフロールエチレンより成るものが用いら
れる。そして、オゾンと反応して化学発光を生ずる物質
としては、エチレン等のオレフィン系炭化水素、No(
以上気体)、ローダミンB、ルミノール、メチレンプル
、−等の溶液を挙げることが出来る。
In the above configuration, the light transmitting window is made of polytetrafluorethylene, for example, which easily transmits a substance that reacts with visible light and ozone to produce chemiluminescence. Substances that react with ozone to produce chemiluminescence include olefinic hydrocarbons such as ethylene, No.
Examples include solutions of gases), Rhodamine B, Luminol, Methylene Pur, and the like.

而して、例えばエチレンを封入した容器を充積隔膜を通
って容器内に侵入し、該容器内のエチレンと化学反応を
起こし、この時化学発光を生ずる。
Thus, for example, the ethylene gas enters a container filled with ethylene through a filling diaphragm and causes a chemical reaction with the ethylene in the container, producing chemiluminescence.

この化学発光の強度は光検出器によって測定され、該化
学発光強度からオゾン濃度を知ることが出来るのである
The intensity of this chemiluminescence is measured by a photodetector, and the ozone concentration can be determined from the intensity of chemiluminescence.

〔実施例〕〔Example〕

以下本発明の一実施例を図面を参照して説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第1図は本発明に係る隔膜式オゾンセンサを示す。図に
おいて、1は筒体であり、その端部には光電子倍増管又
は半導体光電素子等より成る光検出器2が設けられてい
る。3は筒体lの端部外周に形成されたねじ部である。
FIG. 1 shows a diaphragm type ozone sensor according to the present invention. In the figure, 1 is a cylindrical body, and a photodetector 2 made of a photomultiplier tube, a semiconductor photoelectric element, or the like is provided at the end of the cylindrical body. 3 is a threaded portion formed on the outer periphery of the end of the cylinder l.

尚、図示してないが、光検出器2の出力は適宜増幅され
指示計に表示されるよう構成されている。
Although not shown, the output of the photodetector 2 is appropriately amplified and displayed on an indicator.

4は前記筒体1の端部に着脱自在に取り付けられる容器
で、その端部内周には前記ねし部3に螺合するねじ部5
が、又、外部には隔膜固定具6のねじ部7に螺合するね
じ部8が夫々形成しである。
Reference numeral 4 denotes a container that is detachably attached to the end of the cylindrical body 1, and has a threaded portion 5 screwed into the threaded portion 3 on the inner periphery of the end.
However, a threaded portion 8 is formed on the outside to be screwed into the threaded portion 7 of the diaphragm fixing device 6.

9は光透過窓で、可視光領域にある化学発光を透過させ
易い例えば石英ガラスより成り、容器4の一方(ねじ部
5側)に着脱自在に保持されている。
Reference numeral 9 denotes a light transmitting window, which is made of, for example, quartz glass that easily transmits chemiluminescence in the visible light range, and is detachably held on one side of the container 4 (on the threaded portion 5 side).

10はガス透過性の隔膜で、オゾン及びオゾンと反応し
て化学発光を生ずる物質を透過させ易い例えばポリテト
ラフロールエチレン等より成るものが用いられ、容器4
の他方(ねじ部5とは反対側)端部に、0リング等のシ
ール材11、隔膜支持体12を介在せしめて、隔膜固定
具6を締め込むことにより着脱自在に保持されている。
Reference numeral 10 denotes a gas-permeable diaphragm made of, for example, polytetrafluorethylene, which allows ozone and substances that react with ozone to produce chemiluminescence to permeate easily;
A sealing member 11 such as an O-ring and a diaphragm support 12 are interposed at the other end (on the opposite side to the threaded portion 5) of the diaphragm fixing device 6, so that the diaphragm fixing device 6 is tightened to be removably held.

尚、容器4の内面は鏡面仕上げが施されている。又、容
器4はオゾン及びオゾンと反応して化学発光を生ずる物
質に冒され難い例えばステンレス等の素材より成る。
Note that the inner surface of the container 4 has a mirror finish. Further, the container 4 is made of a material such as stainless steel, which is not easily affected by ozone and substances that react with ozone to produce chemiluminescence.

13は前記容器4内に封止され、オゾンと反応して化学
発光を生ずる物質で、例えばエチレンである。この物′
It13は適宜な方法により、該容器4に設けた特定物
質導入口(図示しない)から容器4内に導入される。1
4は前記隔膜10側を封止する蓋体で、隔膜固定具6に
着脱自在に取り付けられる。
13 is a substance sealed in the container 4 that reacts with ozone to produce chemiluminescence, such as ethylene. this thing'
It13 is introduced into the container 4 through a specific substance inlet (not shown) provided in the container 4 by an appropriate method. 1
4 is a lid for sealing the diaphragm 10 side, and is detachably attached to the diaphragm fixture 6.

而して、上記構成の隔膜式オゾンセンサを用いてガス中
のオゾン濃度を測定するに際して、エチレン13を封入
した容器4を光検出器2を備えた筒体1に取り付けた状
態で、測定すべきガス中に置<  (M体14は取り外
しである)と、該ガス中のオゾンがガス透過性の隔膜1
oを通って容器4内に侵入し、該容器内のエチレン13
と化学反応を起こし、このとき化学発光を生ずる。この
化学発光の強度は光検出器によって測定され、該化学発
光強度からオゾン濃度を測定することが出来るのである
Therefore, when measuring the ozone concentration in gas using the diaphragm type ozone sensor configured as described above, the measurement is performed with the container 4 containing ethylene 13 attached to the cylinder 1 equipped with the photodetector 2. (The M body 14 is removed), the ozone in the gas passes through the gas-permeable diaphragm 1.
o into the container 4, and the ethylene 13 in the container
A chemical reaction occurs, and at this time chemiluminescence is produced. The intensity of this chemiluminescence is measured by a photodetector, and the ozone concentration can be determined from the chemiluminescence intensity.

尚、ガス中のオゾンが選択的に隔膜10を通って容器4
内に侵入し、該容器4内のエチレン13と化学反応を行
っている時、容器4内のエチレンの一部が隔膜10を通
って容器4外に出て、隔膜10近傍のガス中のオゾンと
化学反応を行い、ここでも文化学発光を生ずる。容器4
の内面は鏡面仕上げしであるので、上記何れの化学発光
も光検出器2側に向かう。又、容器4内に封入する物質
はエチレンのみに限られるものではなく、オレフィン系
炭化水素や一酸化窒素であってもよい。又、ローダミン
B、ルミノール、メチレンブルー等の溶液を封入しても
よい。これらの溶液を用いた場合、液体中に溶存してい
るオゾンの4度を測定することが出来る。尚、隔膜10
におけるオゾン透過量は温度により変化があるので、試
料温度を測定しその温度依存特性カーブで、光検出器2
の出力信号を補正することが望ましい。
Note that ozone in the gas selectively passes through the diaphragm 10 into the container 4.
During a chemical reaction with ethylene 13 in the container 4, part of the ethylene in the container 4 passes through the diaphragm 10 and exits the container 4, causing ozone in the gas near the diaphragm 10 to A chemical reaction takes place, which also produces cultural luminescence. container 4
Since the inner surface of the detector is mirror-finished, all of the chemiluminescence described above is directed toward the photodetector 2. Furthermore, the substance sealed in the container 4 is not limited to ethylene, but may also be olefinic hydrocarbons or nitrogen monoxide. Alternatively, a solution of rhodamine B, luminol, methylene blue, etc. may be enclosed. When these solutions are used, it is possible to measure the degree of ozone dissolved in the liquid. In addition, the diaphragm 10
Since the amount of ozone transmitted at
It is desirable to correct the output signal of

C発明の効果〕 膜を備えた容器内に、オゾンと反応して化学発光を生ず
る物質を封入し、光検出器を備えた筒体に、前記隔膜側
が外方を向くように、前記容器を着脱自在に取り付けら
れるようにしているので、オゾンのみを選択的に検出す
ることができ、他の成分ガスの干渉影響を何等受けるこ
となく、ガス中、液体中何れのオゾンの濃度をも正確に
測定することが出来るのである。又、従来のこの種オゾ
ンセンサに比較して装置全体の構成が極めて簡略化され
、従って、手軽に持ち運びすることが出来る。
C Effect of the invention] A substance that reacts with ozone to produce chemiluminescence is sealed in a container provided with a membrane, and the container is placed in a cylinder provided with a photodetector so that the diaphragm side faces outward. Since it is removably attached, it is possible to selectively detect only ozone, and accurately measure the concentration of ozone in both gas and liquid without any interference from other component gases. It can be measured. Furthermore, the overall configuration of the device is extremely simplified compared to conventional ozone sensors of this type, and therefore, it can be easily carried.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る隔膜式オゾンセンサを示す斜視図
、第2図は従来技術を説明するための構成図である。 1・・・筒体、2・・・光検出器、4・・・容器、9・
・・光透過窓、10・・・隔膜、13・・・オゾンと反
応して化学発光を生ずる物質。
FIG. 1 is a perspective view showing a diaphragm type ozone sensor according to the present invention, and FIG. 2 is a configuration diagram for explaining the prior art. DESCRIPTION OF SYMBOLS 1... Cylindrical body, 2... Photodetector, 4... Container, 9...
...Light transmission window, 10...Diaphragm, 13...Substance that reacts with ozone to produce chemiluminescence.

Claims (1)

【特許請求の範囲】[Claims] 一方に光透過窓、他方にガス透過性の隔膜を備えた容器
内に、オゾンと反応して化学発光を生ずる物質を封入し
、光検出器を備えた筒体に、前記隔膜側が外方を向くよ
うに、前記容器を着脱自在に取り付けられるようにした
ことを特徴とする隔膜式オゾンセンサ。
A substance that reacts with ozone to produce chemiluminescence is sealed in a container equipped with a light-transmitting window on one side and a gas-permeable diaphragm on the other, and a cylindrical body equipped with a photodetector is placed with the diaphragm side facing outward. A diaphragm type ozone sensor, characterized in that the container can be detachably attached so as to face the container.
JP16931885A 1985-07-30 1985-07-30 Diaphragm type ozone sensor Granted JPS6228646A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16931885A JPS6228646A (en) 1985-07-30 1985-07-30 Diaphragm type ozone sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16931885A JPS6228646A (en) 1985-07-30 1985-07-30 Diaphragm type ozone sensor

Publications (2)

Publication Number Publication Date
JPS6228646A true JPS6228646A (en) 1987-02-06
JPH0569182B2 JPH0569182B2 (en) 1993-09-30

Family

ID=15884316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16931885A Granted JPS6228646A (en) 1985-07-30 1985-07-30 Diaphragm type ozone sensor

Country Status (1)

Country Link
JP (1) JPS6228646A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02186924A (en) * 1989-01-13 1990-07-23 Takao Takahashi Bottle containing fruit or such and production thereof
JPH02141845U (en) * 1989-04-30 1990-11-29
JPH02141844U (en) * 1989-04-30 1990-11-29

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02186924A (en) * 1989-01-13 1990-07-23 Takao Takahashi Bottle containing fruit or such and production thereof
JPH02141845U (en) * 1989-04-30 1990-11-29
JPH02141844U (en) * 1989-04-30 1990-11-29

Also Published As

Publication number Publication date
JPH0569182B2 (en) 1993-09-30

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