JPS62285226A - Surface lubricating method for magnetic disk medium - Google Patents

Surface lubricating method for magnetic disk medium

Info

Publication number
JPS62285226A
JPS62285226A JP12773386A JP12773386A JPS62285226A JP S62285226 A JPS62285226 A JP S62285226A JP 12773386 A JP12773386 A JP 12773386A JP 12773386 A JP12773386 A JP 12773386A JP S62285226 A JPS62285226 A JP S62285226A
Authority
JP
Japan
Prior art keywords
medium
inert liquid
boiling point
rotation
magnetic disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12773386A
Other languages
Japanese (ja)
Other versions
JPH0664732B2 (en
Inventor
Yasuko Ando
康子 安藤
Takanori Miyamoto
宮本 孝典
Toshitake Sato
勇武 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP12773386A priority Critical patent/JPH0664732B2/en
Publication of JPS62285226A publication Critical patent/JPS62285226A/en
Publication of JPH0664732B2 publication Critical patent/JPH0664732B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lubricants (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To form a thin-layered and uniform lubricating film with good reproducibility by overcoating a high boiling point inert liquid on a surface, then overcoating a lubricating agent contg. the high boiling point inert liquid as a solvent thereon, rotating the medium again at a high speed and forming the lubricating film on the surface thereof. CONSTITUTION:After the surface of the magnetic disk medium 1 under the rotation at a low speed is wiped with a dust-free cloth impregnated with the low boiling point fluorine base inert liquid, the medium 1 is rotated at a high speed so that the fluorine base inert liquid is thoroughly evaporated by the high-speed rotation and the dust and org. matter sticking to the surface of the medium 1 are removed with high efficiency. The rotation of the medium 1 is then returned to the low-speed rotation and the high boiling point fluorine base inert liquid which is the solvent for the lubricating agent is overcoated on the surface thereof; thereafter, the medium is rotated again at the high speed to form the extremely thin-layered high boiling point fluorine base inert liquid film (several-severaltens+Angstrom ) on the surface of the medium 1. Finally, the rotation of the medium is returned to the low-speed rotation and the lubricating agent soln. 8 contg. the high boiling point fluorine base inert liquid as the solvent is overcoated thereon. The medium is then rotated at a high speed and the thin-layered lubricating film is formed thereon.

Description

【発明の詳細な説明】 3、発明の詳細な説明 〔産業上の利用分野〕 本発明は、磁気ディスク媒体の表面に潤滑膜を薄層で均
一に形成する表面潤滑法に関する。
Detailed Description of the Invention 3. Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a surface lubrication method for uniformly forming a thin lubricating film on the surface of a magnetic disk medium.

〔従来技術〕[Prior art]

アルミニウム等の剛性基板上に磁性膜を形成した磁気デ
ィスク媒体を用いる磁気ディスク装置においては、動圧
気体軸である浮動へラドスライダを用いて高速回転する
ディスク媒体上に磁気ヘッドを微小すきまで浮−ヒさせ
記録・再生を行っている。
In a magnetic disk device that uses a magnetic disk medium with a magnetic film formed on a rigid substrate such as aluminum, a magnetic head is floated over a high-speed rotating disk medium to a minute gap using a floating RAD slider, which is a dynamic pressure gas axis. Recording/playback is being performed.

ここで塵埃の混入等の外乱、ポジショナ等の機構部品及
び磁気ディスク媒体の振動等によって磁気ヘッドの浮上
すきまが低下した場合には、高速で磁気ヘッドと磁気デ
ィスク媒体が間歇的に接触する。
If the flying clearance of the magnetic head is reduced due to disturbances such as the incorporation of dust, vibrations of mechanical components such as a positioner, and the magnetic disk medium, the magnetic head and the magnetic disk medium will come into intermittently contact at high speed.

また近年、磁気ヘッドを磁気ディスク媒体上に静止させ
た状態で、ディスク媒体の回転起動・停止を行う所謂コ
ンタクトスタートストップ(C3S)方式の磁気ディス
ク装置が主流になってきており、そのディスク媒体の回
転が一定以下の状態では磁気ヘッドのすきまが所期の値
に達しないためヘッドと媒体との接触走行が起こる。
In addition, in recent years, so-called contact start-stop (C3S) type magnetic disk drives have become mainstream, in which the rotation of the disk medium is started and stopped while the magnetic head remains stationary on the magnetic disk medium. When the rotation is below a certain level, the gap between the magnetic heads does not reach the desired value, so the head and the medium come into contact with each other.

この場合磁気ディスク媒体の磁性膜自体は潤滑性を有さ
す、或いは有しても極めて低い潤滑性であるため長時間
の接触走行が起こると磁気ヘッドあるいは磁気ディスク
媒体の磁性膜が摩耗し、所謂ヘッドクラッシュが生じる
In this case, the magnetic film of the magnetic disk medium itself has lubricity, or even if it does, the lubricity is extremely low, so if contact running for a long time occurs, the magnetic head or the magnetic film of the magnetic disk medium will wear out, causing so-called A head crash occurs.

そこで、磁気ディスク媒体表面に潤滑剤を塗布したり、
媒体内に潤滑剤を含浸させその潤滑性を高めることが行
われている。
Therefore, by applying lubricant to the surface of the magnetic disk medium,
It is practiced to impregnate a lubricant into the medium to improve its lubricity.

ところが、潤滑剤を多量に使用するとヘッドとディスク
媒体の摩擦係数が大きくなり、磁気・−\ラドが媒体に
吸着し、両者が損傷する。従って、ディスク媒体表面に
オーバコートする潤滑剤は摩擦係数を高めない範囲で適
量用いることが必要である。
However, if a large amount of lubricant is used, the coefficient of friction between the head and the disk medium increases, and the magnetic field attracts the magnetic field to the medium, damaging both. Therefore, it is necessary to use an appropriate amount of lubricant to overcoat the surface of the disk medium without increasing the coefficient of friction.

また、潤滑剤の膜厚が不均一であると回転起動・停止時
の接触走行が不安定となり、これによっても両者の損傷
が起こるので、潤滑膜は均一に形成する必要があり、め
っき或いはスパッタ法等で平滑な連続薄膜媒体に磁性膜
が数〜数十人と非常に薄く形成される媒体に対しては、
特に、その均一形成が重要となる。
In addition, if the lubricant film thickness is uneven, the contact running at the time of starting and stopping the rotation will become unstable, which will also cause damage to both, so the lubricant film must be formed uniformly, and plating or sputtering should be avoided. For media in which a very thin magnetic film is formed on a smooth continuous thin film medium using a method such as several to several tens of layers,
In particular, its uniform formation is important.

潤滑剤を媒体表面に形成する方法としては■スピンコー
ド法、■スプレィ法、■ディップ法などがある。このう
ち、スピンコード法は他の方法に比べて簡易で量産向き
であるなどの理由により汎用されている。
Methods for forming the lubricant on the surface of the medium include 1) spin code method, 2) spray method, and 2) dipping method. Among these methods, the spin code method is widely used because it is simpler and suitable for mass production than other methods.

スピンコード法において使用される装置が第1図に示さ
れている。該図において、る■気ディスク媒体1はスピ
ンドル2に取付けられ、該スピンドル2はモータ3によ
って回転されるようになっている。
The apparatus used in the spin code method is shown in FIG. In the figure, an air disk medium 1 is mounted on a spindle 2, which is adapted to be rotated by a motor 3.

4は媒体2の表面に近接して配設さた吐出用ノズルで、
該吐出用ノズル4はチューブ5を介してポンプ6の吐出
側に取付られている。
4 is a discharge nozzle disposed close to the surface of the medium 2;
The discharge nozzle 4 is attached to the discharge side of the pump 6 via a tube 5.

該ポンプ6は、その吸入側がチューブ7を介して潤滑剤
溶液8を貯えるタンク9に接続され、該潤滑剤溶液8を
吸引し、上記ノズル4から吐出させる。
The suction side of the pump 6 is connected via a tube 7 to a tank 9 that stores a lubricant solution 8, and sucks the lubricant solution 8 and discharges it from the nozzle 4.

10は上記ポンプ6の開閉とスピンドル2の回転を制御
する制御装置、11.12は該制御装置10とモータ3
及び制御装置10とポンプ6とをそれぞれ接続する配線
である。
10 is a control device that controls opening and closing of the pump 6 and rotation of the spindle 2; 11.12 is the control device 10 and the motor 3;
and wiring that connects the control device 10 and the pump 6, respectively.

従来のスピンコード法では、まず、磁気ディスク媒体1
をスピンドル2に取付けて低速(数十〜数百rpm)で
回転させておいて、これに一定濃度の潤滑剤溶液8をノ
ズル4から滴下させて、該媒体表面が完全に潤滑剤溶液
8で濡れるまでオーバコートし、その後、スピンドル2
を高速(数千rpm)で回転させて、その遠心力で過剰
の潤滑剤溶液8を振り切り磁気ディスク媒体の表面に薄
層の潤滑膜を形成するようにしていた。
In the conventional spin code method, first, the magnetic disk medium 1
is attached to the spindle 2 and rotated at low speed (several tens to hundreds of rpm), and a lubricant solution 8 of a certain concentration is dripped onto it from the nozzle 4 until the surface of the medium is completely covered with the lubricant solution 8. Overcoat until wet, then spindle 2
was rotated at high speed (several thousand rpm), and its centrifugal force was used to shake off excess lubricant solution 8 and form a thin lubricant film on the surface of the magnetic disk medium.

しかしながら、この方法では磁気ディスク媒体の表面に
塵埃や有機物が付着されたまま潤滑剤が塗布される恐れ
があり、潤滑膜の密着性や均一性が低下し易いものであ
った。
However, with this method, there is a risk that the lubricant may be applied to the surface of the magnetic disk medium with dust or organic matter still attached to it, and the adhesion and uniformity of the lubricant film tend to deteriorate.

そこで、付着した塵埃や有機物を除去する方法として■
スピンドルに媒体を取付ける前に有機溶剤で超音波洗浄
する、■スピンドルに媒体を取付けた後、フッ素系不活
性液体やアルコールを含浸した無塵布でワイプする、等
が試みられている。
Therefore, as a method to remove attached dust and organic matter,
Attempts have been made to perform ultrasonic cleaning with an organic solvent before attaching the media to the spindle, and to wipe the media with a dust-free cloth impregnated with fluorinated inert liquid or alcohol after attaching the media to the spindle.

ところが、これらフッ素系不活性液体やアルコールは媒
体表面に残留するため、塵埃や有機物が完全には取りき
れず、また、潤滑剤濃度が変わる等の問題を有すると共
に、媒体表面に形成される潤滑膜厚の面内のバラツキ及
び各媒体間のバラツキが大きいという欠点があった。
However, since these fluorine-based inert liquids and alcohols remain on the media surface, dust and organic matter cannot be completely removed, and there are problems such as changes in the lubricant concentration, and the lubricant formed on the media surface There was a drawback that there were large in-plane variations in film thickness and large variations between media.

〔発明の目的〕[Purpose of the invention]

本発明は上記従来技術の問題点を鑑みてなされたもので
、その目的は、再現性よく薄層で均一な潤滑膜を形成す
ることを可能とした磁気ディスク媒体の表面潤滑法を提
供することにある。
The present invention has been made in view of the problems of the prior art described above, and its purpose is to provide a surface lubrication method for magnetic disk media that makes it possible to form a thin and uniform lubricant film with good reproducibility. It is in.

〔発明の構成〕[Structure of the invention]

このために、本発明の磁気ディスク媒体の表面潤滑法は
、低速回転している磁気ディスク媒体の表面を低沸点の
不活性液体を含浸した無塵布でワイプし、該媒体を一旦
高速回転させた後、低速回転に戻し、その表面に高沸点
の不活性液体をオーバーコートし、再び高速回転させた
後、低速回転に戻し、さらに、その表面に高沸点の不活
性液体を溶媒とする潤滑剤をオーバーコートし、再び、
高速回転させてその表面に潤滑膜を形成するようにした
To this end, the surface lubrication method for magnetic disk media of the present invention involves wiping the surface of a magnetic disk medium rotating at low speed with a dust-free cloth impregnated with a low boiling point inert liquid, and then rotating the medium at high speed once. After that, the rotation speed is returned to low speed, the surface is overcoated with a high boiling point inert liquid, and after high speed rotation is performed again, the rotation speed is returned to low speed, and the surface is further coated with lubrication using a high boiling point inert liquid as a solvent. overcoat the agent and again,
It was rotated at high speed to form a lubricating film on its surface.

〔実施例〕〔Example〕

以下、本発明の磁気ディスク媒体の表面潤滑法の実施例
を説明する。
Examples of the surface lubrication method for magnetic disk media of the present invention will be described below.

第2図は本発明の特徴を良く表しているタイムチャート
で、該図において、横軸は時間、縦軸はスピンドル(磁
気ディスク媒体)の回転数、記号“***”は低沸点の
フッ素系不活性液体を含浸した無塵布によるワイプ、“
↓↓↓”は高沸点のフッ素系不活性液体のオーバコート
、“888”は高沸点のフッ素系不活性液体を溶媒とす
る潤滑剤溶液のオーバコートをそれぞれ示す。
Figure 2 is a time chart that clearly expresses the features of the present invention. In this figure, the horizontal axis is time, the vertical axis is the rotational speed of the spindle (magnetic disk medium), and the symbol "***" is for low-boiling point fluorine. Wipe with a dust-free cloth impregnated with an inert liquid,
↓↓↓” indicates an overcoat of a high boiling point fluorine-based inert liquid, and “888” indicates an overcoat of a lubricant solution using a high boiling point fluorine-based inert liquid as a solvent.

まず、低沸点のフッ素系不活性液体を含浸した無塵布を
用いて低速回転している磁気ディスク媒体の表面をワイ
プした後、該媒体を高速回転させる。ここでフッ素系不
活性液体は低沸点のものを用いているため、該フッ素系
不活性液体は高速回転により完全に蒸発すると共に媒体
表面に付着している塵埃や有機物は高い効率で除去され
る。
First, the surface of a magnetic disk medium rotating at a low speed is wiped using a dust-free cloth impregnated with a low boiling point fluorine-based inert liquid, and then the medium is rotated at a high speed. Since the fluorine-based inert liquid used here has a low boiling point, the fluorine-based inert liquid is completely evaporated by high-speed rotation, and dust and organic matter adhering to the medium surface are removed with high efficiency. .

次に、媒体を低速回転に戻し、その表面に潤滑剤の溶媒
である高沸点のフッ素系不活性液体をオーバーコートし
た後、再び高速回転させる。ここで、フッ素系不活性液
体は高沸点のものを用いているため、高速回転でも完全
には蒸発せず媒体表面に極薄層(数〜数十人)の高沸点
のフッ素系不・活性液体膜が形成される。
Next, the medium is returned to low speed rotation, its surface is overcoated with a high boiling point fluorine-based inert liquid that is a lubricant solvent, and then high speed rotation is again performed. Here, since the fluorinated inert liquid used has a high boiling point, it does not completely evaporate even at high speed rotation, leaving an extremely thin layer (several to several dozen) on the surface of the medium. A liquid film forms.

最後に、媒体を低速回転に戻し、その表面に高沸点のフ
ッ素系不活性液体を溶媒とする潤滑剤溶液をオーバーコ
ートし、その後高速で回転させて、表面に薄層の潤滑膜
を形成する。ここで媒体には前工程においてフッ素系不
活性液体の極薄層が形成されているので該潤滑剤溶液の
媒体に対する親和性が極めて良くなり、潤滑剤のオーバ
ーコートが良好に行われる。
Finally, the medium is returned to low speed rotation and its surface is overcoated with a lubricant solution in a high-boiling fluorinated inert liquid as a solvent, and then rotated at high speed to form a thin layer of lubricant on the surface. . Here, since an extremely thin layer of fluorine-based inert liquid is formed on the medium in the previous step, the affinity of the lubricant solution to the medium is extremely good, and the overcoating of the lubricant is performed satisfactorily.

第3図、第4図はSiO□を保護膜として用いたN1−
Co−Pめっきした磁気ディスク媒体に本実施例を適用
させて得られた媒体表面の潤滑膜の膜Tγ分布を示して
いる。該実験において用いた低沸点フッ素系不活性液体
及び高沸点フッ素系不活性液体の特性は下記の表1のと
おりであり、また、潤滑剤は0.05%のパーフロロフ
ルキルエーテルを用いた。
Figures 3 and 4 show N1- using SiO□ as a protective film.
The film Tγ distribution of the lubricant film on the surface of the medium obtained by applying this example to a Co-P-plated magnetic disk medium is shown. The characteristics of the low-boiling point fluorine-based inert liquid and the high-boiling point fluorine-based inert liquid used in the experiment are shown in Table 1 below, and 0.05% perfluorofurkyl ether was used as the lubricant.

表1 なお、第3図、第4図中の点線は従来法によるもので本
実験例と比較するために記載した。両図から明らかなよ
うに本実験例によって得られた潤滑膜厚の面内の均一性
(半径及び角度方向)が高くなっていることが分かる。
Table 1 Note that the dotted lines in FIGS. 3 and 4 are based on the conventional method and are drawn for comparison with this experimental example. As is clear from both figures, it can be seen that the in-plane uniformity (radial and angular directions) of the lubricant film thickness obtained in this experimental example is high.

なお、本実験例においては潤滑剤としてパーフロロエー
テルを用いたが、これに限定されるものではなく、液体
フッ化炭素、固体フッ化炭素、液体フッ化炭素と固体フ
ッ化炭素との混合物、高級脂肪酸、高級脂肪酸金属塩及
び裔級脂肪酸と高級脂肪酸金属塩との混合物等の各種潤
滑剤も適用できる。
Although perfluoroether was used as the lubricant in this experimental example, it is not limited to this, but liquid fluorocarbon, solid fluorocarbon, a mixture of liquid fluorocarbon and solid fluorocarbon, Various lubricants such as higher fatty acids, higher fatty acid metal salts, and mixtures of progeny-grade fatty acids and higher fatty acid metal salts can also be applied.

〔発明の効果〕〔Effect of the invention〕

以上から本発明の潤滑法によれば、磁気ディスク媒体表
面に薄層の潤滑膜1γを再現性良く均一に形成できるた
め、ヘッドと媒体との摩擦係数が低くなり、ヘッド・媒
体の安定走行性が増す結果、磁気ディスク装置の耐久性
・信頼性の向上が図れる。
From the above, according to the lubrication method of the present invention, a thin lubricating film 1γ can be uniformly formed on the surface of a magnetic disk medium with good reproducibility, which lowers the coefficient of friction between the head and the medium, resulting in stable running of the head and medium. As a result, the durability and reliability of the magnetic disk device can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施に使用するスピンコータの斜視図
、第2図は本発明の潤滑法のタイムチャート、第3図、
第4図は本発明と従来の潤滑法による潤滑膜の分布の特
性図である。 ■・・・磁気ディスク、2・・・スピンドル、3・・・
モ−夕、4・・・吐出用ノズル、5・・・チューブ、6
・・・ポンプ、7・・・チューブ、8・・・潤滑剤溶液
、9・・・潤滑剤溶液保管容器、10・・・制御装置、
11.12・・・配線。
FIG. 1 is a perspective view of a spin coater used in carrying out the present invention, FIG. 2 is a time chart of the lubrication method of the present invention, and FIG.
FIG. 4 is a characteristic diagram of the distribution of the lubricant film according to the present invention and the conventional lubrication method. ■...Magnetic disk, 2...Spindle, 3...
Motor, 4... Discharge nozzle, 5... Tube, 6
Pump, 7 Tube, 8 Lubricant solution, 9 Lubricant solution storage container, 10 Control device,
11.12...Wiring.

Claims (2)

【特許請求の範囲】[Claims] (1)、低速回転している磁気ディスク媒体の表面を低
沸点の不活性液体を含浸した無塵布でワイプし、該媒体
を一旦高速回転させた後、低速回転に戻し、その表面に
高沸点の不活性液体をオーバーコートし、再び高速回転
させた後、低速回転に戻し、さらに、その表面に高沸点
の不活性液体を溶媒とする潤滑剤をオーバーコートし、
再び、高速回転させてその表面に潤滑膜を形成すること
を特徴とする磁気ディスク媒体の表面潤滑法。
(1) Wipe the surface of a magnetic disk medium that is rotating at a low speed with a dust-free cloth impregnated with a low-boiling-point inert liquid, rotate the medium at a high speed, then return it to low speed rotation, and then After overcoating with an inert liquid with a boiling point and rotating at high speed again, returning to low speed rotation, further overcoating the surface with a lubricant using an inert liquid with a high boiling point as a solvent,
A method for lubricating the surface of a magnetic disk medium, which is characterized by forming a lubricating film on the surface of the medium by rotating it again at high speed.
(2)、上記不活性液体がフッ素系不活性液体であるこ
とを特徴とする特許請求の範囲第1項記載の表面潤滑法
(2) The surface lubrication method according to claim 1, wherein the inert liquid is a fluorine-based inert liquid.
JP12773386A 1986-06-02 1986-06-02 Surface lubrication method for magnetic disk media Expired - Lifetime JPH0664732B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12773386A JPH0664732B2 (en) 1986-06-02 1986-06-02 Surface lubrication method for magnetic disk media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12773386A JPH0664732B2 (en) 1986-06-02 1986-06-02 Surface lubrication method for magnetic disk media

Publications (2)

Publication Number Publication Date
JPS62285226A true JPS62285226A (en) 1987-12-11
JPH0664732B2 JPH0664732B2 (en) 1994-08-22

Family

ID=14967342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12773386A Expired - Lifetime JPH0664732B2 (en) 1986-06-02 1986-06-02 Surface lubrication method for magnetic disk media

Country Status (1)

Country Link
JP (1) JPH0664732B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03192518A (en) * 1989-12-21 1991-08-22 Fuji Electric Co Ltd Production of thin-film magnetic disk

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03192518A (en) * 1989-12-21 1991-08-22 Fuji Electric Co Ltd Production of thin-film magnetic disk

Also Published As

Publication number Publication date
JPH0664732B2 (en) 1994-08-22

Similar Documents

Publication Publication Date Title
WO1992008062A1 (en) Gas dynamic bearing
US7357875B2 (en) Hybrid coating for magnetic heads
JPH0312372B2 (en)
KR19990067430A (en) Magnetic recording device
JPS62285226A (en) Surface lubricating method for magnetic disk medium
JP4534906B2 (en) Magnetic recording medium and manufacturing method thereof
JP2010049782A (en) Perfluoropolyether lubricant thin film for thin film storage medium
JP2567849B2 (en) Magnetic disk device
JPS62285227A (en) Apparatus for producing magnetic disk medium
JP3297222B2 (en) Magnetic disk and magnetic disk device
JPS62285225A (en) Surface lubricating method for magnetic disk medium
JPH03119580A (en) Magnetic disk device
JPH0430084B2 (en)
JPH01184723A (en) Production of magnetic disk medium made of thin metallic film
JP2638228B2 (en) Manufacturing method of magnetic recording medium
JPH02156418A (en) Formation of lubricating film for magnetic disk
JP2000222719A (en) Magnetic recording medium and its production
JPS63237216A (en) Production of magnetic recording medium
JPS60239921A (en) Formation of lubricating film on surface of magnetic recording medium
JPS62229525A (en) Magnetic recording medium
JPH09128743A (en) Magnetic disk and its production
JPS62219330A (en) Production of thin film medium
JP2001229528A (en) Method for manufacturing magnetic disk
JPS6236727A (en) Magnetic recording medium
JPH0330180A (en) Magnetic disk device

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term