JPS6228143U - - Google Patents

Info

Publication number
JPS6228143U
JPS6228143U JP11892585U JP11892585U JPS6228143U JP S6228143 U JPS6228143 U JP S6228143U JP 11892585 U JP11892585 U JP 11892585U JP 11892585 U JP11892585 U JP 11892585U JP S6228143 U JPS6228143 U JP S6228143U
Authority
JP
Japan
Prior art keywords
compartment
diaphragm
pressure
differential pressure
gas pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11892585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222668Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11892585U priority Critical patent/JPH0222668Y2/ja
Publication of JPS6228143U publication Critical patent/JPS6228143U/ja
Application granted granted Critical
Publication of JPH0222668Y2 publication Critical patent/JPH0222668Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP11892585U 1985-08-02 1985-08-02 Expired JPH0222668Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11892585U JPH0222668Y2 (https=) 1985-08-02 1985-08-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11892585U JPH0222668Y2 (https=) 1985-08-02 1985-08-02

Publications (2)

Publication Number Publication Date
JPS6228143U true JPS6228143U (https=) 1987-02-20
JPH0222668Y2 JPH0222668Y2 (https=) 1990-06-19

Family

ID=31005830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11892585U Expired JPH0222668Y2 (https=) 1985-08-02 1985-08-02

Country Status (1)

Country Link
JP (1) JPH0222668Y2 (https=)

Also Published As

Publication number Publication date
JPH0222668Y2 (https=) 1990-06-19

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