JPS62278706A - Manufacture of pattern sheet - Google Patents

Manufacture of pattern sheet

Info

Publication number
JPS62278706A
JPS62278706A JP12011886A JP12011886A JPS62278706A JP S62278706 A JPS62278706 A JP S62278706A JP 12011886 A JP12011886 A JP 12011886A JP 12011886 A JP12011886 A JP 12011886A JP S62278706 A JPS62278706 A JP S62278706A
Authority
JP
Japan
Prior art keywords
film
dimensional
transparent conductive
manufacture
liquid crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12011886A
Other languages
Japanese (ja)
Other versions
JPH0566686B2 (en
Inventor
善行 西田
三池 太佳志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daicel Corp
Original Assignee
Daicel Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daicel Chemical Industries Ltd filed Critical Daicel Chemical Industries Ltd
Priority to JP12011886A priority Critical patent/JPS62278706A/en
Publication of JPS62278706A publication Critical patent/JPS62278706A/en
Publication of JPH0566686B2 publication Critical patent/JPH0566686B2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 3、発明の詳細な説明 (産業上の利用分野) 本発明は液晶表示装置の電極として使用するパターン化
された導電層を備えたプラスチックフィルムの製造法に
関りる。
[Detailed Description of the Invention] 3. Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for producing a plastic film with a patterned conductive layer used as an electrode of a liquid crystal display device. .

(従来技術および問題点) 液晶表示の電極基板は従来のガラスからプラスチックフ
ィルムに変わりつつあるが、プラスチックフィルムはガ
ラスと異なり、環境変化による寸法変化があり、ガラス
と同様な製造方法はとれない。現在、各種のプラスチッ
クフィルムが電%i板として使用されはじめているが、
製造工程の最も大きな問題は、環境変化による用法変化
のあるプラスチックフィルムで、いかに寸法伸縮を低減
させて高精度を要する光学機能部品に製作するかである
。本発明者らは、液晶表示素子用電極塞板として、−軸
延伸ポリエステルフィルムを使用した場合に看目し、光
学用電極基板として要求される寸法精度をいかに満足さ
せるかを焦点に種々検討した結果、本発明に到達した。
(Prior Art and Problems) Electrode substrates for liquid crystal displays are changing from conventional glass to plastic films, but unlike glass, plastic films undergo dimensional changes due to environmental changes, and cannot be manufactured using the same manufacturing methods as glass. Currently, various plastic films are beginning to be used as electric boards,
The biggest problem in the manufacturing process is how to reduce dimensional expansion and contraction of plastic films, whose usage changes due to environmental changes, and manufacture them into optical functional parts that require high precision. The present inventors have conducted various studies focusing on how to satisfy the dimensional accuracy required for an optical electrode substrate when using a -axis stretched polyester film as an electrode cover plate for a liquid crystal display element. As a result, we have arrived at the present invention.

(問題点を解決するための手段) 本発明は、プラスチック基板から成る液晶表示用パター
ンの製造方法において、上下基板に一軸延伸ポリエステ
ルフィルムを用いた場合の環境による寸法変化を考慮し
たパターンの製造方法でおって、透明導電性プラスチッ
クスフィルムの透明導電層を所定のパターンにエツチン
グするに先立って透明導電性プラスチックスフィルムを
高温下でアニールしたのち、標準条件より高湿度下に曝
すことにより加速して標準条件下の寸法に達せしめるこ
とを特徴とするパターンシートの製造法である。
(Means for Solving the Problems) The present invention provides a method for manufacturing a pattern for a liquid crystal display made of a plastic substrate, which takes into account dimensional changes due to the environment when uniaxially stretched polyester films are used for the upper and lower substrates. Before etching the transparent conductive layer of the transparent conductive plastic film into a predetermined pattern, the transparent conductive plastic film is annealed at high temperature and then exposed to higher humidity than standard conditions to accelerate etching. This is a method for producing a patterned sheet, characterized in that the dimensions are achieved under standard conditions.

一軸延伸フィルムとは、厳密に一方向にのみ延伸したも
のに限らず、二方向に延伸されているものを含むもので
ある。むしろフィルムの全体的な強度の面からは二軸延
伸されていて両輪の延伸倍率に差のめる疑似−軸延伸フ
ィルムの方が良い。
A uniaxially stretched film is not limited to one that has been stretched strictly in one direction, but includes one that has been stretched in two directions. Rather, from the viewpoint of the overall strength of the film, it is better to use a pseudo-axially stretched film that is biaxially stretched and has different stretching ratios between the two wheels.

本発明で使用する一軸延伸フィルムの材質は特に限定さ
れてないが、現状ではポリエチレンテレフタレートが良
い。
The material of the uniaxially stretched film used in the present invention is not particularly limited, but polyethylene terephthalate is currently preferred.

かくのごとき、−軸延伸フィルムを使用して、その配向
軸に対して方形基板のその四隅で辺のなす角度が45°
±2.5°以内に入るように位置決めし、切りだすこと
により(特願昭60−197236号)、或いはパター
ンデザインによっては、フィルムのMD、TD力方向対
して直角に切り出すことによって、ガラス基板を使用し
た液晶表示素子と同様の表示画面に歪、濃淡のないもの
を得ることが出来る。
Using a -axis stretched film like this, the angles formed by the sides at the four corners of the rectangular substrate with respect to the orientation axis are 45°.
By positioning the film within ±2.5° and cutting it out (Japanese Patent Application No. 60-197236), or depending on the pattern design, by cutting it out at right angles to the MD and TD force directions of the film. It is possible to obtain a display screen without distortion or shading similar to that of a liquid crystal display element using .

このようにして、切り出したフィルムシートに液晶表示
用にパターン化した電極を形成する場合、いくつかの工
程を経る。待に一軸延伸ポリエステルフィルムを使用す
る際、低分子量ポリエステル析出物を選択的に溶解除去
し、光透過率に潰れたフィルムを作成する必要がある(
特開昭60−175031>、このような理由から、切
り出したあとの工程としては、従来のガラス基板と若干
異なり図1のような工程となる。特にフィルムのような
フレキシブル基板を扱う場合、フィルム搬送及び露光等
の工程のために洗浄後に基準穴を開は以後の工程に於け
る基板の位置決めに用いることによって取り扱い易く、
精度高く取り扱うようにぜねばならない。しかし、最終
製品との関係で設定される標準系件下2例えば25°C
150%RHに於ける状態にフィルムを安定させた後、
基準穴を空けておく事が必要でおる。特にパターンの精
度はaUL穴を開けた時、パターンの露光、焼付は時、
最後の検査時のフィルムが寸法的に同じでおる事が必要
である。 フィルムの場合、ガラス基板と異なり熱によ
る収縮、温度による膨張、湿度による膨張の割合が大き
いため、高精度にエツチング加工する場合は、フィルム
の寸法変化に対して充分配慮する必要がある。
In this way, when patterned electrodes for liquid crystal display are formed on the cut out film sheet, several steps are performed. When using a uniaxially stretched polyester film, it is necessary to selectively dissolve and remove low molecular weight polyester precipitates to create a film with reduced light transmittance (
JP-A-60-175031> For these reasons, the process after cutting out is slightly different from that of a conventional glass substrate, and is as shown in FIG. Particularly when handling flexible substrates such as films, opening reference holes after cleaning for processes such as film transport and exposure makes handling easier by using them for positioning the substrate in subsequent processes.
It must be handled with great precision. However, the standard system conditions set in relation to the final product are as follows: 25°C, for example.
After stabilizing the film at 150% RH,
It is necessary to leave a reference hole open. In particular, the accuracy of the pattern is determined by the time when drilling the aUL hole, the exposure and printing of the pattern,
It is necessary that the film be dimensionally the same at the last inspection. In the case of a film, unlike a glass substrate, the rate of shrinkage due to heat, expansion due to temperature, and expansion due to humidity is large, so when etching is performed with high precision, sufficient consideration must be given to changes in the dimensions of the film.

ポリエステルフィルムの寸法変化には■熱収縮、■温度
膨張、■温度膨張の三種がある。■は不可逆変化■、■
は不可逆変化でおる。したがって、これらの寸法変化を
配慮して製造法を検討する必要がある。
There are three types of dimensional changes in polyester film: ■thermal shrinkage, ■temperature expansion, and ■temperature expansion. ■Irreversible change■,■
is an irreversible change. Therefore, it is necessary to consider the manufacturing method in consideration of these dimensional changes.

本発明者らは、使用する一軸延伸ポリエステルフイルム
の熱収wi率、温度膨張係数、温度膨張係数、湿度膨張
係数を詳細に検討し、更に成る環境下から他の環境下に
変えたときに寸法が安定するまでの時間(緩和時間)を
求めることによって、パターンニング加工工程にこれら
を反映した。
The present inventors have studied in detail the heat loss rate, temperature expansion coefficient, temperature expansion coefficient, and humidity expansion coefficient of the uniaxially stretched polyester film used, and have determined that the dimensional difference when changing from one environment to another. These factors were reflected in the patterning process by determining the time it takes to stabilize (relaxation time).

その結果アニール、洗浄後の寸法回復時間は、25°C
150%であれば約4時間、25°C180%であれば
25°C150%での安定寸法まで回復するのに必要な
時間は1.5時間のエージングで良い事を見出した。即
ち高湿度下に置くことによって緩和時間が著しく短縮さ
れる事を見出した。従って予備実験により高湿度下での
緩和時間を測定しておき、基板を高湿度下に維持する時
間を求めて置けば良い。 標準条件というのは適宜設定
されるが一般的な場合には25°C150%R,H。
As a result, the dimensional recovery time after annealing and cleaning is 25°C.
It was found that aging for about 4 hours at 150% and 1.5 hours at 180% at 25°C is the time required to recover to the stable dimensions at 25°C and 150%. That is, it was found that the relaxation time was significantly shortened by placing it under high humidity. Therefore, it is sufficient to measure the relaxation time under high humidity through a preliminary experiment and determine the time to maintain the substrate under high humidity. Standard conditions are set as appropriate, but in general they are 25°C, 150% R, H.

であるので、その場合について説明すれば上記の様にな
る。その後に基準穴をあければ、その穴間の距離精度は
±10μmの精度で保持できる。また、現像、エツチン
グ、レジスト剥離工程等の水中にフィルムが浸漬される
工程かかあるが、フィルムを屹燥したのち、検査環境条
件すなわち標準条件下(25°C150%)に最低4時
間エージングしておく必要がある。 このような処理を
すれば、検査の寸法測定は±10μmの精度で評価でき
る。
Therefore, the explanation for that case is as above. If reference holes are then drilled, the distance accuracy between the holes can be maintained within ±10 μm. In addition, although there are processes in which the film is immersed in water such as developing, etching, and resist stripping, the film is dried and then aged for at least 4 hours under the test environment conditions (25°C, 150%). It is necessary to keep it. By performing such processing, the dimension measurement for inspection can be evaluated with an accuracy of ±10 μm.

(発明の効果) 本発明は一軸延伸ポリエステルフィルムを使用して、液
晶表示用パターンニングシートを加工する際の、フィル
ムの寸法変化をも考慮した加工法を児い出した点に要点
があり、±10μmの精度を保って加工、検査すること
ができる。
(Effects of the Invention) The main point of the present invention is that it has developed a processing method that takes into account the dimensional change of the film when processing a patterned sheet for liquid crystal display using a uniaxially stretched polyester film. Processing and inspection can be performed with an accuracy of ±10 μm.

本発明の工程で製造および検査を行えれば、パターニン
グ製品間の寸法のバラツキが殆んど無いものが得られる
。もし、単純にエージング後の寸法回復を温度を標準条
件に戻すだけでパターニング加工品を製作したりすると
、設計値寸法と、かなり異なるものが出来たり、各ロッ
ト間に寸法精度のバラツキが発生し、液晶表示素子とし
ての性能の均一性が確保出来ない事になるが、本発明に
よる時は一定品質の物を比較的短時間で製造できる。
If manufacturing and inspection can be performed using the process of the present invention, patterned products with almost no dimensional variation can be obtained. If a patterned product is manufactured by simply returning the temperature to standard conditions for dimensional recovery after aging, the product may have dimensions that are significantly different from the design values, or there may be variations in dimensional accuracy between lots. However, according to the present invention, products of constant quality can be manufactured in a relatively short time, although uniformity in performance as a liquid crystal display element cannot be ensured.

【図面の簡単な説明】[Brief explanation of drawings]

図1はパターンシートの主要製造工程のフローシートで
おる。
Figure 1 is a flow sheet of the main manufacturing process of pattern sheets.

Claims (1)

【特許請求の範囲】[Claims] 透明導電性プラスチックスフィルムの透明導電層を所定
のパターンにエッチングするに先立つて透明導電性プラ
スチックスフィルムを高温下でアニールしたのち、標準
条件より高湿度下に曝すことにより加速して標準条件下
の寸法に達せしめることを特徴とするパターンシートの
製造法。
Prior to etching the transparent conductive layer of the transparent conductive plastic film into a predetermined pattern, the transparent conductive plastic film is annealed at high temperature and then exposed to higher humidity than standard conditions to accelerate the etching process under standard conditions. A method for producing a patterned sheet, characterized in that the dimensions of the patterned sheet are reached.
JP12011886A 1986-05-27 1986-05-27 Manufacture of pattern sheet Granted JPS62278706A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12011886A JPS62278706A (en) 1986-05-27 1986-05-27 Manufacture of pattern sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12011886A JPS62278706A (en) 1986-05-27 1986-05-27 Manufacture of pattern sheet

Publications (2)

Publication Number Publication Date
JPS62278706A true JPS62278706A (en) 1987-12-03
JPH0566686B2 JPH0566686B2 (en) 1993-09-22

Family

ID=14778401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12011886A Granted JPS62278706A (en) 1986-05-27 1986-05-27 Manufacture of pattern sheet

Country Status (1)

Country Link
JP (1) JPS62278706A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002297056A (en) * 2001-03-30 2002-10-09 Sumitomo Bakelite Co Ltd Display device and method for manufacturing the same
JP2003066423A (en) * 2001-08-22 2003-03-05 Sumitomo Bakelite Co Ltd Display element and method for manufacturing the same
US6924872B2 (en) 1999-12-02 2005-08-02 Sharp Kabushiki Kaisha Flexible LCD panel fabrication method and flexible LCD panel fabrication system used for the same
JP2012063599A (en) * 2010-09-16 2012-03-29 Dainippon Printing Co Ltd Roll-state film base material

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6924872B2 (en) 1999-12-02 2005-08-02 Sharp Kabushiki Kaisha Flexible LCD panel fabrication method and flexible LCD panel fabrication system used for the same
JP2002297056A (en) * 2001-03-30 2002-10-09 Sumitomo Bakelite Co Ltd Display device and method for manufacturing the same
JP2003066423A (en) * 2001-08-22 2003-03-05 Sumitomo Bakelite Co Ltd Display element and method for manufacturing the same
JP4701561B2 (en) * 2001-08-22 2011-06-15 住友ベークライト株式会社 Display element and manufacturing method thereof
JP2012063599A (en) * 2010-09-16 2012-03-29 Dainippon Printing Co Ltd Roll-state film base material

Also Published As

Publication number Publication date
JPH0566686B2 (en) 1993-09-22

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