JPS62278377A - Magnetic fluid sealing device - Google Patents
Magnetic fluid sealing deviceInfo
- Publication number
- JPS62278377A JPS62278377A JP61124007A JP12400786A JPS62278377A JP S62278377 A JPS62278377 A JP S62278377A JP 61124007 A JP61124007 A JP 61124007A JP 12400786 A JP12400786 A JP 12400786A JP S62278377 A JPS62278377 A JP S62278377A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- rotating shaft
- magnetic fluid
- fluid
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 title claims abstract description 41
- 238000007789 sealing Methods 0.000 title claims abstract description 15
- 239000000696 magnetic material Substances 0.000 claims abstract description 18
- 230000000694 effects Effects 0.000 abstract description 10
- 239000012530 fluid Substances 0.000 abstract 2
- 230000013011 mating Effects 0.000 abstract 1
- 230000004907 flux Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 1
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Sealing Of Bearings (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は例えば真空室の壁を貫通する回転軸に対して
設けられて漏洩のないよう気体ひ遮断しかつ回転運動を
伝え得るシール技術、特に磁性流体シール装置に関する
ものである。[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a sealing technology that is provided to a rotating shaft passing through a wall of a vacuum chamber, for example, to block gas from leaking and to transmit rotational motion; In particular, it relates to magnetic fluid sealing devices.
第３図および第４図は従来の磁性流体シール装置を示す
図であり、第３図は全体の断面図、第４図はその拡大図
であり、図において（１１）は回転軸、（１２）は磁性
物質で形成された磁性体、（１３）はその磁性体（１２
）ではさみこまれた永久磁石、（１４）は磁性流体、（
１５）。3 and 4 are diagrams showing a conventional magnetic fluid seal device. FIG. 3 is an overall cross-sectional view, and FIG. 4 is an enlarged view thereof. In the figures, (11) is a rotating shaft, (12) ) is a magnetic body made of magnetic material, and (13) is the magnetic body (12
) is a permanent magnet sandwiched in, (14) is a magnetic fluid, (
15).
（１７）は回転軸（１１）を回転自在に支える軸受、（
１６）は磁性体（１２）Ｓ永久磁石（１３）、磁性流体
（１４）、軸受（１５）および軸受（１７）を収納する
非磁性体のケーシングである。回転軸（１１）には環状
の凸部（ＩＩＩＬ）を形成すべく複数の環状溝が設けら
れていて、この環状の凸部（’１１＆）が磁性体の面（
１２＆）に゛面し、凸部（ｌｌａ）と磁性体の面（１２
＆）との間に磁性流体（１４）が存在する。(17) is a bearing that rotatably supports the rotating shaft (11), (
16) is a non-magnetic casing that houses the magnetic material (12), the S permanent magnet (13), the magnetic fluid (14), the bearing (15), and the bearing (17). The rotating shaft (11) is provided with a plurality of annular grooves to form an annular protrusion (IIIL), and this annular protrusion ('11&) is formed on the surface of the magnetic material ('11&').
12 &), and the convex portion (lla) and the magnetic surface (12
&) A magnetic fluid (14) exists between the two.
次に動作について説明する。永久磁石（１３）のＮ極よ
り出た磁束は磁性体（１２）をとおり、７Ｅａ 性体Ｑ
）面（１２ａ）から回転軸（１１）の凸部（１１＆）を
集中して通り、回転軸（１１）を通過し、Ｓ極側の回転
軸の凸部より集中してＳ極側の磁性体の面を通り、Ｓ極
側の磁性体な通って永久磁石（１３）のＳ極にもどる。Next, the operation will be explained. The magnetic flux emitted from the N pole of the permanent magnet (13) passes through the magnetic body (12) and becomes 7Ea.
) surface (12a), passes through the convex part (11 &) of the rotating shaft (11) in a concentrated manner, passes through the rotating shaft (11), concentrates from the convex part of the rotating shaft on the S-pole side, and the magnetism on the S-pole side It passes through the surface of the body, passes through the magnetic material on the south pole side, and returns to the south pole of the permanent magnet (13).
かくして第３図に示す如く複数の磁気回路を形成してい
る。回転６１１（１１）の複数個の凸部（ｌｌａ）と磁
性体の面（１２ａ）との間に配置された磁性流体（１４
）は集中した磁束によって０リング状となり、回転＠（
１１）と磁性体（１２）とのギャップを完全に充たし、
その結果高圧側と低ＦＥ（Ｉ！Ｉとの圧力差のある両端
を気体の漏洩がないよう遮断し、かつ回転軸（１１〕の
回転を許容する。なお非磁性体でできたハウジング（１
６）は回転軸（１１）を回転自在に支えている軸受（１
５）、軸受（１７）、さらに永久磁石（１３）、磁性体
（１２）Ｂ収納するとともに磁束のもれご防止している
。In this way, a plurality of magnetic circuits are formed as shown in FIG. The magnetic fluid (14) is arranged between the plurality of convex portions (lla) of the rotation 611 (11) and the magnetic surface (12a).
) becomes a 0-ring shape due to concentrated magnetic flux, and rotates @(
11) and the magnetic material (12) is completely filled,
As a result, both ends where there is a pressure difference between the high pressure side and the low FE (I!
6) is a bearing (1) that rotatably supports the rotating shaft (11).
5) A bearing (17), a permanent magnet (13), and a magnetic body (12) are housed therein to prevent leakage of magnetic flux.
〔発明が解決しようとする問題点〕
従来の磁性流体シールは以上のように構成されているの
で回転軸（１１）の高速回転において磁性流体（１４）
に加わる遠心力が磁力より大きくなった場合シール効果
をなくすなどの問題点があった。またシール効果を増す
ために磁力を大きくすれば、回転時には磁力の影響で回
転損失ス１イ大きくなるという問題点があった。[Problems to be Solved by the Invention] Since the conventional magnetic fluid seal is configured as described above, the magnetic fluid (14) is
There were problems such as the sealing effect being lost if the centrifugal force applied to the magnet became larger than the magnetic force. Furthermore, if the magnetic force is increased to increase the sealing effect, there is a problem in that during rotation, the rotation loss increases due to the influence of the magnetic force.
この発明は上記のような問題点を解消するためになされ
たもので磁力を大きくすることもなく、高速回転におい
てもシール効果Ｐ十分発揮できる磁性流体シール装置を
得ることを目的とする。The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a magnetic fluid sealing device that can sufficiently exhibit the sealing effect P even at high speed rotation without increasing the magnetic force.
この発明に係る磁性流体シール装Ｔは、磁性体の面に凹
部をもうけ、それに対応して回転軸に凸部をもうけその
間に磁性流体を配置したものである。The magnetic fluid seal device T according to the present invention has a concave portion on the surface of the magnetic material, a convex portion on the rotating shaft corresponding to the concave portion, and a magnetic fluid is disposed between the concave portions.
この発明においては磁性体の面の凹部とそれに対応する
回転軸の凸部との間に磁性流体が配置されているので回
転が上昇して磁性流体に遠心力が増しても、磁性流体は
磁性体の四部と回転軸の凸部との間にとどまっていて磁
性流体内部の圧力が増し、遠心力と平衡状態を作りだす
。In this invention, the magnetic fluid is disposed between the concave part of the surface of the magnetic material and the corresponding convex part of the rotating shaft, so even if the rotation increases and the centrifugal force on the magnetic fluid increases, the magnetic fluid remains magnetic. It remains between the four parts of the body and the convex part of the rotating shaft, and the pressure inside the magnetic fluid increases, creating a state of equilibrium with the centrifugal force.
その結果回転数が上昇しても、磁力を増さなくとも、シ
ール効果？失なうことがない。As a result, even if the rotational speed increases, the sealing effect does not increase even if the magnetic force does not increase? I can't lose it.
第１図はこの発明の一実施例を示す断面図であり、（１
１）は磁性物質の回転軸、（１２）は磁性物質で形成さ
れた環状の磁性体、（１３）は磁性体（１２）ではさみ
こまれた環状の永久磁石、（１４）は磁性流体である。FIG. 1 is a cross-sectional view showing one embodiment of the present invention.
1) is a rotating shaft of magnetic material, (12) is an annular magnetic material made of magnetic material, (13) is an annular permanent magnet sandwiched between magnetic materials (12), and (14) is a magnetic fluid. be.
これらは第３図に示す如く配置されている。本発明の特
徴とするところは磁性体（１２）の面に凹部（２ａ）を
もうけ、これに対応して回転軸（１１）に凸部（ＩＩＬ
）を設け、この間に磁性流体（１４）を配置したもので
ある。なお、この実施例では凸部（ｌａ）は台形状にな
され、四部（２ａ）はこれに対応した形状になされてい
る。These are arranged as shown in FIG. The feature of the present invention is that a recess (2a) is formed on the surface of the magnetic body (12), and a corresponding convex part (IIL) is provided on the rotating shaft (11).
), and a magnetic fluid (14) is placed between them. In this embodiment, the convex portion (la) has a trapezoidal shape, and the fourth portion (2a) has a shape corresponding to this.
上記のように構成された磁性流体シール装置においては
、永久磁石（１３）のＮ極より出た磁束は磁性体（１２
）の内をとおり、磁性体の凹部（２ａ）から回転軸の凸
部（１ａ）を集中して通り、回転軸（１１）の内を通過
し、Ｓ極側の回転軸の凸部より集中し、Ｓ極側の磁性体
（１２）の凹部３通って更にその磁性体（１２）の中を
貫通し、永久磁石（１３）のＳ極にもどる複数個の磁気
回路を形成している。複数個の回転軸の凸部（１ａ）と
磁性体の四部（２ａ）との間に配置された磁性流体（１
４）は集中した磁束によりリング状となり、回転軸（１
１）と磁性体（１２）とのギャップを完全に充たし、そ
の結果圧力差のある両端を漏洩のないよう気体を遮断す
ることができる。さらに高速回転時に磁性流体（１４）
に遠心力が加わっても、くさび作用で凹部（２ａ）に集
まり磁性流体の内部圧力が増加し、遠心力と平衡状態を
つくりだ丁。これにより磁力より大きな遠心力が発生し
ても、磁力３大きくすることなくシール部分が破壊され
ることなく回転を伝え得る磁性流体シール装置が得られ
る。In the magnetic fluid seal device configured as described above, the magnetic flux emitted from the N pole of the permanent magnet (13) is transmitted to the magnetic body (12).
), passes from the concave part (2a) of the magnetic material to the convex part (1a) of the rotating shaft, passes through the rotating shaft (11), and concentrates from the convex part of the rotating shaft on the S pole side. However, a plurality of magnetic circuits are formed which pass through the recess 3 of the magnetic body (12) on the S pole side, further penetrate through the magnetic body (12), and return to the S pole of the permanent magnet (13). A magnetic fluid (1
4) becomes a ring shape due to concentrated magnetic flux, and the rotating shaft (1
The gap between 1) and the magnetic material (12) is completely filled, and as a result, gas can be blocked off from both ends where there is a pressure difference to prevent leakage. Furthermore, when rotating at high speed, the magnetic fluid (14)
Even if centrifugal force is applied to the magnetic fluid, the internal pressure of the magnetic fluid increases as it gathers in the recess (2a) due to the wedge effect, creating a state of equilibrium with the centrifugal force. As a result, even if a centrifugal force larger than the magnetic force is generated, a magnetic fluid sealing device can be obtained that can transmit rotation without increasing the magnetic force 3 and without destroying the seal portion.
なお、軸（１１）に設ける凸部（ｌａ）および環状磁性
体（１２）に設ける凹部（２ａ）の形状は第２図（ａ）
あるいは第２図（ｂ）の如きものでもよい。The shapes of the convex portion (la) provided on the shaft (11) and the concave portion (2a) provided on the annular magnetic body (12) are shown in Figure 2 (a).
Alternatively, it may be as shown in FIG. 2(b).
以上のように、この発明によれば高速回転時の磁性流体
に加わる遠心力を磁性流体の液圧増加で平衡させるよう
に構成したので、永久磁石等を大きくすることもなく装
置が安価にできシール効果の高いものが得られる効果が
ある。As described above, according to the present invention, since the centrifugal force applied to the magnetic fluid during high-speed rotation is balanced by an increase in the hydraulic pressure of the magnetic fluid, the device can be made inexpensive without increasing the size of the permanent magnet etc. This has the effect of providing a high sealing effect.
第１図はこの発明の一実施例による磁性流体シール装置
を示す断面図、第２図（ａ）は他の実施例を示す図、第
２図（１））は更に他の実施例を示す図、第３図は従来
の磁性流体シール装置を示す断面図、
第４図は第３図の一部は拡大図を示す断面図である。
図において、（１１）は回転軸、（１２）は磁性体、（
１３）は磁石、（１４）は磁性流体、（ｌａ）は軸（１
１）は設けられた凸部、（２ａ）は磁性体（１２）に設
けられた凹部である。
なお、各図中−−付号は同一または相当部分ご示す。
代理人 弁理士 大 岩 増 雄第１図
第２図
第３図
７７軸 受FIG. 1 is a sectional view showing a magnetic fluid seal device according to one embodiment of the present invention, FIG. 2(a) is a diagram showing another embodiment, and FIG. 2(1)) is a diagram showing still another embodiment. FIG. 3 is a sectional view showing a conventional magnetic fluid sealing device, and FIG. 4 is a sectional view showing a partially enlarged view of FIG. 3. In the figure, (11) is the rotating shaft, (12) is the magnetic material, (
13) is a magnet, (14) is a magnetic fluid, (la) is a shaft (1
1) is a protrusion provided, and (2a) is a recess provided in the magnetic body (12). In addition, in each figure, the numerals indicate the same or corresponding parts. Agent Patent Attorney Masuo Oiwa Figure 1 Figure 2 Figure 3 77 Bearing
Claims (2)
体とにて磁気回路を形成し、この回転軸と磁性体との間
に磁性流体シールを配置した磁性流体シール装置におい
て、回転軸の回転中に、磁性流体の液圧が増すよう構成
されたことを特徴とする磁性流体シール装置。(1) In a magnetic fluid seal device in which a magnetic circuit is formed by a rotating shaft made of a magnetic material, an annular permanent magnet, and an annular magnetic material, and a magnetic fluid seal is arranged between the rotating shaft and the magnetic material, the rotating shaft is A magnetic fluid sealing device characterized in that the hydraulic pressure of the magnetic fluid is increased during rotation of the magnetic fluid seal device.
の面に環状凹部を設け、これらの間に磁性流体が配置さ
れていることを特徴とする特許請求の範囲第１項記載の
磁性流体シール装置。(2) An annular convex portion is provided on the rotating shaft, an annular concave portion is provided on the surface of the magnetic body corresponding to the annular convex portion, and a magnetic fluid is disposed between these. magnetic fluid seal device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61124007A JPS62278377A (en) | 1986-05-27 | 1986-05-27 | Magnetic fluid sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61124007A JPS62278377A (en) | 1986-05-27 | 1986-05-27 | Magnetic fluid sealing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62278377A true JPS62278377A (en) | 1987-12-03 |
Family
ID=14874722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61124007A Pending JPS62278377A (en) | 1986-05-27 | 1986-05-27 | Magnetic fluid sealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62278377A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01220777A (en) * | 1988-02-29 | 1989-09-04 | Nippon Ferrofluidics Kk | Magnetic fluid applied pressure-proof sealing device |
| JPH043167U (en) * | 1990-04-25 | 1992-01-13 | ||
| WO2007004690A1 (en) * | 2005-06-30 | 2007-01-11 | Rigaku Corporation | Magnetic fluid sealing device |
| US7188840B2 (en) * | 2003-07-07 | 2007-03-13 | Zhixin Li | Magnetic fluidic seal with improved pressure capacity |
| CN103244689A (en) * | 2013-05-17 | 2013-08-14 | 北京交通大学 | Magnetic liquid sealing device used for multi-channel gas delivery between rotating system and static system |
| CN105508619A (en) * | 2016-02-04 | 2016-04-20 | 苏州市职业大学 | Inlet/outlet sealing structure of continuous plasma modification device of film strip |
| CN106594289B (en) * | 2016-12-09 | 2018-05-08 | 北京交通大学 | A kind of high linear speed spin magnetization liquid sealing device of radial direction small size |
-
1986
- 1986-05-27 JP JP61124007A patent/JPS62278377A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01220777A (en) * | 1988-02-29 | 1989-09-04 | Nippon Ferrofluidics Kk | Magnetic fluid applied pressure-proof sealing device |
| JPH043167U (en) * | 1990-04-25 | 1992-01-13 | ||
| US7188840B2 (en) * | 2003-07-07 | 2007-03-13 | Zhixin Li | Magnetic fluidic seal with improved pressure capacity |
| WO2007004690A1 (en) * | 2005-06-30 | 2007-01-11 | Rigaku Corporation | Magnetic fluid sealing device |
| JP2007010030A (en) * | 2005-06-30 | 2007-01-18 | Rigaku Corp | Magnetic fluid sealing device |
| US7950672B2 (en) | 2005-06-30 | 2011-05-31 | Rigaku Corporation | Magnetic fluid sealing device |
| CN103244689A (en) * | 2013-05-17 | 2013-08-14 | 北京交通大学 | Magnetic liquid sealing device used for multi-channel gas delivery between rotating system and static system |
| CN103244689B (en) * | 2013-05-17 | 2015-08-12 | 北京交通大学 | A kind of magnetic fluid seal device for multi-channel gas conveying between rotation system and stationary system |
| CN105508619A (en) * | 2016-02-04 | 2016-04-20 | 苏州市职业大学 | Inlet/outlet sealing structure of continuous plasma modification device of film strip |
| CN106594289B (en) * | 2016-12-09 | 2018-05-08 | 北京交通大学 | A kind of high linear speed spin magnetization liquid sealing device of radial direction small size |
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