JPS62277592A - X-y moving table - Google Patents
X-y moving tableInfo
- Publication number
- JPS62277592A JPS62277592A JP12068486A JP12068486A JPS62277592A JP S62277592 A JPS62277592 A JP S62277592A JP 12068486 A JP12068486 A JP 12068486A JP 12068486 A JP12068486 A JP 12068486A JP S62277592 A JPS62277592 A JP S62277592A
- Authority
- JP
- Japan
- Prior art keywords
- carriage
- base
- moving table
- view
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000694 effects Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
３、発明の詳細な説明
〔発明の利用分野〕
本発明はＸ−Ｙ移動テーブルに係り、主として三次元座
標測定機、半導体検査装置、フライス盤、平面研削盤等
に利用されるＸ軸方向及びＹ軸方向に移動自在なＸ−Ｙ
移動テーブルに関する。[Detailed Description of the Invention] 3. Detailed Description of the Invention [Field of Application of the Invention] The present invention relates to an X-Y moving table, and is mainly used in three-dimensional coordinate measuring machines, semiconductor inspection equipment, milling machines, surface grinding machines, etc. X-Y that can be moved freely in the X-axis direction and Y-axis direction
Regarding moving tables.
従来のこの種のＸ−Ｙ移動テーブルは、第７図に示すよ
うにベース２の上にＸテーブル４をＸ軸方向に摺動自在
に載置し、このＸテーブル４上にＹテーブル６をＹ軸方
向に摺動自在に載置して構成されている。A conventional X-Y moving table of this type has an X-table 4 placed on a base 2 so as to be slidable in the X-axis direction, as shown in FIG. 7, and a Y-table 6 placed on this X-table 4. It is configured to be placed slidably in the Y-axis direction.
かかる構成のＸ−Ｙ移動テーブルは、Ｘテーブル４上に
Ｙテーブル６があり、Ｙテーブル６はＸテーブル４によ
って支持されているため、Ｙテーブル６の耐荷重が低下
するという問題がある。また、従来のＸ−Ｙ移動テーブ
ルはＹ−テーブル６がオーバハングする構造となってい
るため、剛性並びに精度が低下するという問題もある。In the X-Y moving table having such a configuration, the Y table 6 is located on the X table 4, and the Y table 6 is supported by the X table 4, so there is a problem that the load capacity of the Y table 6 is reduced. Further, since the conventional X-Y moving table has a structure in which the Y-table 6 overhangs, there is also a problem that the rigidity and accuracy are reduced.
本発明はこのような事情に鑑みてなされたもので、高剛
性及び高精度のＸ−Ｙ移動テーブルを提供することを目
的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an X-Y moving table with high rigidity and high precision.
本発明は前記目的を達成するために、ベースと、該ベー
スに摺接支持され、かつベース面上に於ける第１の方向
に摺動自在にガイドされるキャリッジと、前記キャリッ
ジによって前記第１の方向と直交する第２の方向に摺動
自在にガイドされると共にベースに摺接支持されるＸＹ
移動テーブルとを備えたことを特徴としている。In order to achieve the above object, the present invention includes: a base; a carriage slidably supported by the base and slidably guided in a first direction on the base surface; XY that is slidably guided in a second direction perpendicular to the direction of
It is characterized by being equipped with a moving table.
以下添付図面に従って本発明に係るＸ−Ｙ移動テーブル
の好ましい実施例を詳説する。Preferred embodiments of the X-Y moving table according to the present invention will be described in detail below with reference to the accompanying drawings.
第１図は本発明に係るＸ−Ｙ移動テーブルの一実施例を
示す分解斜視図である。このＸ−Ｙ移動テーブルは、ベ
ース１０と、Ｘガイド１２と、キャリッジ１４と、ＸＹ
テーブル１６とから構成されている。FIG. 1 is an exploded perspective view showing an embodiment of the X-Y moving table according to the present invention. This X-Y moving table includes a base 10, an X guide 12, a carriage 14, and an
It is composed of a table 16.
ベース１０は高精度に上面の平面度が仕上げられており
、このベース１０上には高精度に水平方向の真直度が仕
上げられたＸガイド１２がボルト等により固定される。The base 10 has an upper surface whose flatness has been finished with high precision, and an X guide 12 whose horizontal straightness has been finished with high precision is fixed onto this base 10 with bolts or the like.
キャリフジの下側には前記Ｘガイド１２と摺動自在に嵌
合する溝部１４ａが形成されており、このキャリフジは
ベース１０の上面によって支持されるとともに、Ｘガイ
ド１２によってＹ方向の移動が拘束され、Ｘ方向のみ移
動できる。また、キャリフジの上側には、前記溝部１４
ａと直交する溝部（Ｙガイド）１４ｂが形成されている
。A groove portion 14a is formed on the lower side of the carriage, and the groove 14a is slidably fitted into the X guide 12. The carriage is supported by the upper surface of the base 10, and is restrained from moving in the Y direction by the X guide 12. , can only move in the X direction. Further, the groove portion 14 is provided on the upper side of the carriage.
A groove portion (Y guide) 14b is formed perpendicular to a.
ＸＹテーブル１６はベース１０の上面によって支持され
るとともに、キャリッジのＹガイド１４ｂと摺動自在に
嵌合する溝部１６ａが形成されている。従って、ＸＹテ
ーブル１６は、キャリッジのＹガイド１４ｂによってＸ
方向の移動が拘束され、キャリッジに対してはＹ方向の
み移動できるなお、５ｌ−３４は水平方向の拘束力を受
ける摺動面であり、Ｓ、〜Ｓ、は垂直荷重を受ける摺動
面であり、これらは機械的摺動面或いはエア軸受面等で
構成される。The XY table 16 is supported by the upper surface of the base 10, and is formed with a groove 16a that slidably fits into the Y guide 14b of the carriage. Therefore, the XY table 16 is moved by the Y guide 14b of the carriage.
Movement in this direction is restricted and the carriage can only move in the Y direction. 5l-34 is a sliding surface that receives horizontal restraining force, and S, ~S are sliding surfaces that receive vertical load. These are composed of mechanical sliding surfaces or air bearing surfaces.
第２図は第１図に示したＸ−Ｙ移動テーブルの平面図で
あり、第３図は第２図のＡ−Ａ断面図である。第２図に
おいて、１８はＸスケール、２０はＹスケールである。2 is a plan view of the X-Y moving table shown in FIG. 1, and FIG. 3 is a cross-sectional view taken along the line AA in FIG. 2. In FIG. 2, 18 is the X scale and 20 is the Y scale.
また、第３図からも明らかなように、キャリッジ及びＸ
Ｙテーブル１６からの垂直荷重は、それぞれ直接ベース
１０の上面のみに加わるようになっている。Furthermore, as is clear from Fig. 3, the carriage and
The vertical loads from the Y table 16 are applied directly only to the upper surface of the base 10.
なお、Ｘガイド１２とこれによってガイドされるキャリ
ッジとの嵌合間係（凸と凹との関係）は逆にする等任意
の構造でもよい。Note that the fitting relationship between the X guide 12 and the carriage guided by it (the relationship between the convex and concave portions) may be reversed or any other structure may be used.
第４図乃至第６図は本発明に係るｘ−ｙ移動テーブルの
他の実施例を示すもので、第４図はそのＸ−Ｙ移動テー
ブルの平面図、第５図は正面図、第６図は第４図のＢ−
Ｂ断面図である。4 to 6 show other embodiments of the x-y moving table according to the present invention, FIG. 4 is a plan view of the X-Y moving table, FIG. 5 is a front view, and FIG. The figure is B- in Figure 4.
It is a sectional view of B.
これらの図面において、２０はベース、２２はキャリフ
ジ、２４はＸＹテーブルである。なお、キャリッジには
Ｘスケール２６を設け、ＸＹテーブル２４にはＹスケー
ル２８を設けているが、移動精度向上のため、Ｙスケー
ル２８の位置はア７べの原理に近づけ、その読取りのた
めにＹスケール読取りガイド３０及びＹスケール読取リ
キャリッジ３２を設けるようにしている。In these drawings, 20 is a base, 22 is a carriage, and 24 is an XY table. Note that the carriage is provided with an X scale 26, and the XY table 24 is provided with a Y scale 28, but in order to improve movement accuracy, the position of the Y scale 28 is close to the A7be principle, and in order to read it. A Y scale reading guide 30 and a Y scale reading carriage 32 are provided.
キャリフジは、ベース２０の側面２０ＡをＹガイドとし
て使用し、キャリッジからの垂直荷重は直接ベース２０
の上面両端で支えられている（第５図参照）。The carriage uses the side surface 20A of the base 20 as a Y guide, and the vertical load from the carriage is directly applied to the base 20.
It is supported at both ends of the upper surface (see Figure 5).
一方、ＸＹテーブル２４は、キャリッジの梁部２２ａを
Ｘガイドとして使用し、ＸＹテーブル２４からの正直荷
重は直接ベース２０の上面で支えられている（第６図参
照）。On the other hand, the XY table 24 uses the beam portion 22a of the carriage as an X guide, and the straight load from the XY table 24 is directly supported by the upper surface of the base 20 (see FIG. 6).
以上説明したように、本発明に係るＸ−Ｙ移動テーブル
によれば、最終段テーブルであるＸＹテーブルの全荷重
が剛性の高いベースに直接支えられているため、ワーク
重量を含めたＸＹテーブルの移動時に於ける剛性を高く
維持することができ、その結果、Ｘ、Ｙ位置決め誤差及
びＸ、Ｙ移動時の垂直面内の誤差を小さくすることがで
きる。As explained above, according to the X-Y moving table according to the present invention, the entire load of the XY table, which is the final stage table, is directly supported by the highly rigid base. It is possible to maintain high rigidity during movement, and as a result, X and Y positioning errors and errors in the vertical plane during X and Y movement can be reduced.
第１図は本発明に係るＸ−Ｙ移動テーブルの一実施例を
示す分解斜視図、第２図は第１図に示したＸ−Ｙ移動テ
ーブルの平面図、第３図は第２図のＡ−Ａ断面図、第４
図は本発明に係るＸ−Ｙ移動テーブルの他の実施例を示
す平面図、第５図は第４図に示したＸ−Ｙ移動テーブル
の正面図、第６図は第４図のＢ−Ｂ断面図、第７図は従
来のＸ−Ｙ移動テーブルの一例を示す斜視図である。
１０．２０・・・ベース、 １２・・・Ｘガイド、
１４・・・キャリッジ、 １６．２４・・・ＸＹテ
ーブル、２２・・・キャリ・７ジ。FIG. 1 is an exploded perspective view showing an embodiment of the X-Y moving table according to the present invention, FIG. 2 is a plan view of the X-Y moving table shown in FIG. 1, and FIG. 3 is a plan view of the X-Y moving table shown in FIG. A-A sectional view, 4th
The figure is a plan view showing another embodiment of the X-Y moving table according to the present invention, FIG. 5 is a front view of the X-Y moving table shown in FIG. 4, and FIG. B sectional view and FIG. 7 are perspective views showing an example of a conventional X-Y moving table. 10.20...Base, 12...X guide,
14... Carriage, 16.24... XY table, 22... Carriage 7ji.
Claims (1)
於ける第１の方向に摺動自在にガイドされるキャリッジ
と、前記キャリッジによって前記第１の方向と直交する
第２の方向に摺動自在にガイドされると共にベースに摺
接支持されるＸＹテーブルとを備えたことを特徴とする
Ｘ−Ｙ移動テーブル。a base; a carriage slidably supported by the base and slidably guided in a first direction on the base surface; and a carriage slidably guided in a second direction orthogonal to the first direction by the carriage; An X-Y moving table comprising an X-Y table that is movably guided and slidably supported by a base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12068486A JPS62277592A (en) | 1986-05-26 | 1986-05-26 | X-y moving table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12068486A JPS62277592A (en) | 1986-05-26 | 1986-05-26 | X-y moving table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62277592A true JPS62277592A (en) | 1987-12-02 |
Family
ID=14792390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12068486A Pending JPS62277592A (en) | 1986-05-26 | 1986-05-26 | X-y moving table |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62277592A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02118491A (en) * | 1988-10-28 | 1990-05-02 | Canon Inc | Static pressure air bearing xy stage |
| JPH02254398A (en) * | 1989-03-28 | 1990-10-15 | Matsushita Electric Ind Co Ltd | Slide guide apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6130897B2 (en) * | 1977-10-14 | 1986-07-16 | Sumitomo Electric Industries |
-
1986
- 1986-05-26 JP JP12068486A patent/JPS62277592A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6130897B2 (en) * | 1977-10-14 | 1986-07-16 | Sumitomo Electric Industries |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02118491A (en) * | 1988-10-28 | 1990-05-02 | Canon Inc | Static pressure air bearing xy stage |
| JP2631396B2 (en) * | 1988-10-28 | 1997-07-16 | キヤノン株式会社 | Static pressure gas bearing XY stage |
| JPH02254398A (en) * | 1989-03-28 | 1990-10-15 | Matsushita Electric Ind Co Ltd | Slide guide apparatus |
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