JPS6227514U - - Google Patents

Info

Publication number
JPS6227514U
JPS6227514U JP11663185U JP11663185U JPS6227514U JP S6227514 U JPS6227514 U JP S6227514U JP 11663185 U JP11663185 U JP 11663185U JP 11663185 U JP11663185 U JP 11663185U JP S6227514 U JPS6227514 U JP S6227514U
Authority
JP
Japan
Prior art keywords
cylinder
airtight chamber
chamber
support cylinder
mirror surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11663185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11663185U priority Critical patent/JPS6227514U/ja
Publication of JPS6227514U publication Critical patent/JPS6227514U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP11663185U 1985-07-31 1985-07-31 Pending JPS6227514U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11663185U JPS6227514U (enrdf_load_stackoverflow) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11663185U JPS6227514U (enrdf_load_stackoverflow) 1985-07-31 1985-07-31

Publications (1)

Publication Number Publication Date
JPS6227514U true JPS6227514U (enrdf_load_stackoverflow) 1987-02-19

Family

ID=31001406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11663185U Pending JPS6227514U (enrdf_load_stackoverflow) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPS6227514U (enrdf_load_stackoverflow)

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