JPS62274215A - Surface resolver - Google Patents

Abstract

PURPOSE:To reduce the cost and to improve the accuracy by exciting a needle electromagnet with a higher-hamonic exciting current, and producing magnetic flux whose number of pole pairs is equal to the pitch of lattice-shaped magnetic body projection parts and inducing an electromotive force. CONSTITUTION:Projections and recesses of magnetic bodies are formed at pitch lambda in a lattice shape on the surface of a stator 2 facing the needle 1. The needle 1 is supported movably opposite the surface of the stator 2 across a constant gap. The needle 1 is an electromagnet and has, for example, four magnetic poles to apply a magnetic field to the stator 2. Printed coils W11, W12, W21 and W22 are stuck as secondary detection winding on the magnetic pole surface. Those print coils are patterned so that magnetic flux produced by the projection parts 21 of the stator 2 is scooped. Therefore, the signal of the position of the needle is obtained from variation in the phase of a voltage induced across the detection winding consisting of the printed coils stuck on the opposite surface of the needle 1 of an electromagnet which is excited with a higher harmonic wave to the stator 2.

Description

Detailed Description of the Invention 3. Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a surface resolver that converts and detects positions in two-dimensional X and Y directions into voltage phases.

(Prior art) A conventional two-dimensional position detection means is to install linear scales, linear inductors, linear resolvers, etc. in the X direction and the y direction, and to detect both directions separately. .

(Problems to be Solved by the Invention) Therefore, the accuracy of the Y-direction guide for the X-axis and the X-direction guide for the Y-axis is important, and the structure is complicated.

SUMMARY OF THE INVENTION An object of the present invention is to overcome the conventional problems and provide a surface resolver that can simultaneously detect both the X and Y directions and does not require a guide.

(Means for Solving the Problems) The present invention is a surface resolver comprising the following means.

The stator has a lattice-shaped magnetic protrusion on its surface.
The movable element is supported on this surface through a certain gap so that it can move.

The mover is an electromagnet, and the magnetic flux it creates is r! of the electromagnet. 1
Enter the stator from the pole face, and from the stator to the other tif of the electromagnet
! It is designed to return through the polar plane.

A printed coil that forms a lattice-shaped magnetomotive force with the same pole pair pitch as the lattice-shaped magnetic projections of the stator is attached to the magnetic pole surface of the electromagnet that faces the stator.

This pudding 1-coil consists of four phases, and each phase coil has a phase difference of 1/4 lattice pitch from each other.

When the mover electromagnet is excited with a harmonic la current, magnetic flux with the pitch as the number of pole pairs is generated and interlinked in the four-phase printed coil by the lattice-like magnetic protrusions.
The phase difference between the phases b'') generates an induced electromotive force, and by detecting this, two-dimensional positional information in the x and Y directions can be obtained.J: sea urchin.

(Operation) A movable element of an electromagnet excited by harmonics applies a magnetic field to the stator, facing a stator that has an uneven grid of magnetic material on its surface, and attaches the movable element to the surface facing the stator. From the change in the phase of the voltage induced in the detection winding consisting of a printed coil,
Sends a signal indicating the position of the mover.

(Embodiment) FIG. 1 is a perspective view showing the configuration of an embodiment of the present invention.

FIG. 2 is a diagram showing the pattern and arrangement of printed coils forming the secondary (detection) winding of the electromagnet (the excitation (primary) winding is omitted and not shown).

On the surface of the stator 2 facing the movable element 1, concavities and convexities of a magnetic material are formed in a lattice shape at a pitch λ.

That is, by arranging the lattice-like protrusions 21 at pitches λ in the vertical and horizontal directions, the depressions become the recesses 22, and these form the stator 2.

The movable element 1 is supported on the surface of the stator 2 with a certain gap therebetween so as to be movable.

The mover 1 is an electromagnet, and has, for example, four Ia poles, and applies a magnetic field to the stator 2.

This Ii! On the surface of IIfi, there is a printed coil W11. as a secondary detection winding. W12. W21. W22 is attached. This printed coil has a pattern formed so as to absorb the magnetic flux generated by the protrusion 21 of the stator 2.

Winding W11. W12. W21. Configure 4 phases with W22,
The induced voltage (emf) of each winding is: e11=Ecos 0xxcosθy 6 =Esinθ x cos θy21
A mutual difference is given so that Xe=Ecosθxsinθy12Xe22−ESinOXxSinθy.

Here, 2π θ = X 8 λ 2π θ = y ゞ　　λ E is the peak value of the induced voltage, λ is the grating protrusion pitch.

Therefore, the tooth profile of the lattice protrusion is caused by the magnetic field B created by the electromagnet.
The distribution of B +KB cosθ −cosθyQ Q
It is intended to be X.

Note that Bo is a constant magnetic flux density is a constant It is.

FIG. 3 is a plan view showing the relative relationship between the movable element and the stator in another embodiment of the present invention. N and S are the polarities of the electromagnet magnetic pole faces.

FIG. 4 shows the pattern and layout of the printed coil (secondary winding).

FIG. 5 is a plan view showing the configuration of a movable element in another embodiment of the present invention.

51.52 is a resolver consisting of an electromagnet equipped with the aforementioned printed coil secondary winding, 53.54 is a Safei pulse motor, 55, 56, 57°58 is a two-way support mechanism that supports magnetic levitation, air pressure ( It is supported at four locations by floating (static pressure) so that it can move freely on the stator surface.

In addition, a Teflon film or the like is pasted on the opposing gap surfaces of the stator 2 and mover 1, which creates an IF with less friction.
J-dynamic lubrication may also be performed.

Furthermore, the following means can be considered as a modification/application example of the present invention.

1) This surface resolver can also be applied to cylindrical surfaces.

2) The printed coil can be multilayered to reduce phase errors due to air gap imbalance.

3) It is also possible to use the printed coil as the excitation winding and the electromagnetic coil as the detection winding.

4) When the mover rotates around an axis perpendicular to the stator (yawing), this rotation angle is the difference in θ8 obtained from windings W12 and W22 or winding W11.
and W129 winding W2. and θ obtained from W22.

〔Effect of the invention〕

Thus, according to the present invention, many of the following remarkable effects can be obtained.

■ It is economical because the stator (grid) of the surface pulse motor is used as the stator of the resolver.

■Printed coils can be made accurately, resulting in low cost and high precision.

■ The structure is simple because no guide is required.

■ Yawing can be detected.

■ Accuracy can be improved by using multiple layers of printed coils.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing the configuration of one embodiment of the present invention, Fig. M2 is a pattern and arrangement of the detection winding 1 (printed coil), and Figs. FIG. 5 is a plan view showing the relative relationship between the mover and the stator, a pattern and arrangement of printed coils, and a plan view of the mover in another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Mover, 11... Printed coil (secondary winding), 2... Stator, 21... Grid-like convex part (Il-like body), 22... Four parts, 51. 52...Resolver, 5
3.54...Surface motor, 55-58...
Two-way support mechanism (LA magnetic levitation aerostatic levitation means, etc.). Applicant's agent Mr. Sato Figure 3 Figure 4 Figure 5

Claims (1)

[Claims] 1. The stator is provided with a lattice-shaped magnetic protrusion on the surface facing the movable element, and the movable element is movably supported on the stator surface with a certain gap therebetween. means comprising an electromagnet excited by alternating current, such that the magnetic flux it creates enters the stator from a magnetic pole face of the electromagnet and returns from the stator through another magnetic pole face of the electromagnet; and means facing the stator; Four-phase printed coils are attached to the magnetic pole surface to form a grid-like magnetomotive force with the same pole pair pitch as the grid-like magnetic protrusions on the stator. means for providing a phase difference of 4/4 lattice-shaped pole pair pitch, which excites the mover electromagnet with a harmonic excitation current and generates magnetic flux with the lattice-shaped magnetic convex portion as the number of pole pairs. A surface resolver characterized in that the magnetic flux intersects with a four-phase printed coil to generate an induced electromotive force having a four-phase phase difference, and detects this to obtain two-dimensional position information.