JPS6226651B2 - - Google Patents
Info
- Publication number
- JPS6226651B2 JPS6226651B2 JP58155909A JP15590983A JPS6226651B2 JP S6226651 B2 JPS6226651 B2 JP S6226651B2 JP 58155909 A JP58155909 A JP 58155909A JP 15590983 A JP15590983 A JP 15590983A JP S6226651 B2 JPS6226651 B2 JP S6226651B2
- Authority
- JP
- Japan
- Prior art keywords
- parts
- groups
- resin
- composition
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920001296 polysiloxane Polymers 0.000 claims description 16
- 239000003822 epoxy resin Substances 0.000 claims description 13
- 229920000647 polyepoxide Polymers 0.000 claims description 13
- 125000005010 perfluoroalkyl group Chemical group 0.000 claims description 11
- 125000001153 fluoro group Chemical group F* 0.000 claims description 7
- 229920001187 thermosetting polymer Polymers 0.000 claims description 7
- 239000011342 resin composition Substances 0.000 claims description 5
- 239000011256 inorganic filler Substances 0.000 claims description 3
- 229910003475 inorganic filler Inorganic materials 0.000 claims description 3
- 239000000203 mixture Substances 0.000 description 23
- 229920005989 resin Polymers 0.000 description 18
- 239000011347 resin Substances 0.000 description 18
- 229920003986 novolac Polymers 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000003795 chemical substances by application Substances 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 4
- -1 benzophenone anhydride Chemical class 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000005350 fused silica glass Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000006082 mold release agent Substances 0.000 description 3
- 239000012778 molding material Substances 0.000 description 3
- 125000000962 organic group Chemical group 0.000 description 3
- 125000005375 organosiloxane group Chemical group 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- DCTOHCCUXLBQMS-UHFFFAOYSA-N 1-undecene Chemical compound CCCCCCCCCC=C DCTOHCCUXLBQMS-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- 239000004203 carnauba wax Substances 0.000 description 2
- 235000013869 carnauba wax Nutrition 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000002075 main ingredient Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- 239000005995 Aluminium silicate Substances 0.000 description 1
- 229910015900 BF3 Inorganic materials 0.000 description 1
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000001246 bromo group Chemical group Br* 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 235000010216 calcium carbonate Nutrition 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229940079865 intestinal antiinfectives imidazole derivative Drugs 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 235000014380 magnesium carbonate Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 235000014692 zinc oxide Nutrition 0.000 description 1
Landscapes
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
本発明は熱硬化性樹脂組成物、特にはエポキシ
樹脂を主剤とする電子部品封止用などに使用され
る熱硬化性樹脂組成物に関するものである。
半導体装置などのような電子部品の封止につい
てはセラミツク、キヤンによるものから、大量生
産性で低価格の樹脂封止方式に移りつつあり、こ
の封止用樹脂としては電気特性、機械的特性にす
ぐれているということからエポキシ樹脂の使用が
増大している。
しかし、この半導体装置については高集積化に
伴なう半導体素子の大型化と共にこれを封止する
パツケージが小型化、薄型化されてきているため
に、大型の素子を樹脂封止したときには樹脂の硬
化時に発生する応力によつて素子の半導体特性が
劣化したり、そのパツシベーシヨン膜や素子が破
壊されるという事故が引き起される不利がある。
また、この封止が特に小型化、薄型化されたとき
にはヒートサイクルにより、あるいはそのハンダ
処理によつて樹脂層に容易にクラツクが入るとい
う欠点もあり、またこの樹脂層を薄くすると湿気
がこの樹脂層を容易に透過して半導体素子の表面
に到達するためアルミニウム電極などが腐蝕され
るという不利が生じる。
他方、この樹脂封止は量産性、作業性という面
からほとんどがトランスフアー成形で行なわれて
おり、これによつて200〜1000個という多数個取
りが常識化されているが、これには金型からの樹
脂の型離れを良くするために使用される離型剤の
金型表面への蓄積によつて金型が汚染されるとい
う不利があり、この汚染を除去するために金型を
クリーニング樹脂で洗浄するという工程が必要と
されている。
本発明はこのような不利を解決した熱硬化性樹
脂組成物に関するもので、(A)熱硬化性エポキシ樹
脂100重量部、(B)5個以上のフツ素原子を含有す
るパーフルオロアルキル基を少なくとも1個有す
るオルガノポリシロキサン0.1〜20重量部、(C)無
機質充填剤50〜500重量部よりなることを特徴と
するものである。
これを説明すると、本発明者らはエポキシ樹脂
を主剤とする電子部品封止用樹脂組成物の物性改
善策について種々検討した結果、エポキシ樹脂と
無機質充填剤とからなる組成物に、パーフルオロ
アルキル基を有するオルガノポリシロキサンを添
加すると、この組成物で成形される樹脂封止層の
耐衝撃性が改善されると共に、撥水性をもつもの
とされるので耐湿性のすぐれたものとなり、さら
にはその離型効果によつて金型汚染も防止される
ということを見出し、したがつてヒートサイク
ル、ハンダ処理によつてもクラツクの発生がな
く、湿気の侵入による電極の腐蝕も発生しない樹
脂封止層を得ることができることを確認し、この
オルガノシロキサンの種類、添加量などについて
の研究を進め本発明を完成させた。
本発明の組成物を構成する主剤としての熱硬化
性エポキシ樹脂はこの種の組成物に従来から使用
されている公知のものでよく、分子中に少なくと
も1個、好ましくは2個以上のエポキシ基を有す
る、エピクロルヒドリンとビスフエノールAとか
らなるもの、あるいは各種のノボラツク樹脂から
合成される樹脂、脂環式エポキシ樹脂、塩素原
子、臭素原子などのハロゲン原子を含むエポキシ
樹脂などが例示されるが、これはその分子構造、
分子量などに特に制限はなく、またその2種もし
くは2種以上の混合物であつてもよい。
このエポキシ樹脂には当然硬化剤が併用される
が、これにはジアミノジフエニルメタン、ジアミ
ノジフエニルスルホン、メタフエニレンジアミン
などのアミン系硬化剤、無水フタル酸、無水ピロ
メリツト酸、無水ベンゾフエノンテトラカルボン
酸などの酸無水物系硬化剤、フエノールノボラツ
ク、クレゾールノボラツクなどのように分子中に
水酸基を2個以上有するフエノールノボラツク系
硬化剤、各種イミダゾール誘導体、三級アミン誘
導体、シクロアミジン誘導体、ホスフイン化合物
あるいは三フツ化ほう素などの触媒的硬化剤など
が例示される。
つぎに本発明の組成物におけるB)成分として
のオルガノポリシロキサンはその分子中に少なく
とも1個のパーフルオロアルキル基を含むことが
必要とされるが、このパーフルオロアルキル基と
してはフツ素原子を少なくとも5個含むものとす
ることがよく、これには下記のものが例示され
る。
CF3CF2CF2―、CF3(CF2)oCH2CH2―、CF3
(CF2)oCH2CH2S―、CF3(CF2)oCF2CF2COO
―、
C7F15CH2CH2O―、
このパーフルオロアルキル基を有するオルガノ
ポリシロキサンは線状、分枝状、三次元構造物の
いずれであつてもよく、R1 3SiO0.5単位、R2 2SiO
単位、R3 1SiO1.5単位、SiO2単位(こゝにR1、
R2、R3は1価の有機基またはフツ素原子を1個
以上有する有機基)の任意構成比からなるもの
で、この有機基がメチル基、エチル基、プロピル
基、ブチル基などのアルキル基、ビニル基、アリ
ル基などのアルケニル基、フエニル基、トリル基
などのアリール基、シクロヘキシル基などのシク
ロアルキル基、これらの基の炭素原子に結合する
水素原子の1部をハロゲン原子、シアノ基などで
置換した基、さらにはメトキシ基、エトキシ基な
どのアルコキシ基、アミノ基、エポキシ基、チオ
ール基、水酸基、カルボキシル基などの官能基か
ら選ばれるものであればよい。また、このオルガ
ノポリシロキサンの粘度は特に規定されず、低粘
度、高粘度の液状物でも、軟化点を有する固体状
のものでもよく、これには下記のものが例示され
る。
(1) 線状ポリシロキサン
(2) 分技状ポリシロキサン
(3) 三次元構造ポリシロキサン
〔上記におけるRfはパーフルオロアルキル基
を示す〕
なお、このオルガノポリシロキサンの(A)成分に
対する添加量はこれが(A)成分100重量部に対し0.1
重量部以下ではこの組成物から作られる封止樹脂
層の耐湿性向上、金型からの離型性向上効果が少
なく、これを20重量部以上とすると成形物表面に
ブリードしたり、この樹脂界面とリードとの密着
性が低下するようになるので、これは(A)成分とし
てのエポキシ樹脂100重量部当り0.1〜20重量部、
好ましくは0.5〜10重量部とすることがよい。な
お、このパーフルオロアルキル基についてはその
フツ素原子数が5個以下であるとこのオルガノポ
リシロキサンが十分な離型性を示さないので、こ
れはフツ素原子を5個以上有するものとする必要
がある。
また、C)成分としての無機質充填剤は公知の
ものでよく、乾式シリカ、湿式シリカ、溶融石英
粉、結晶性石英粉、ガラス繊維、アルミナ、炭酸
カルシウム、マグネサイト、亜鉛華、クレー、カ
オリン、タルク、マイカ、アスベスト、カーボン
ブラツクなどが例示されるが、これらは単独でも
その2種以上の併用としてもよい。なお、この使
用量はA)成分としてのエポキシ樹脂100重量部
に対し50重量部以上とする必要があるが多量にす
ぎるとその分散が困難となるほか加工性がわるく
なり、この成形品が低応力、耐クラツク性に欠け
たものとなるので、500重量部までとすることが
よい。
本発明の組成物は上記した(A)、(B)、(C)各成分を
ミキサー、ロールなどで均一に混合することによ
つて得ることができるが、必要に応じ着色剤、カ
ツプリング剤、酸化防止剤、難燃剤など公知の添
加剤を加えてもよい。この組成物は上記したフツ
素原子含有々機基をもつオルガノシロキサンを添
加したものであるが、このオルガノシロキサンが
耐熱性のすぐれたもので長時間高温雰囲気におか
れても劣化することがないし、硬化性樹脂の離型
剤として好適なものであり、さらにはすぐれた撥
水性と各種樹脂に対する可撓性付与剤としての作
動性をもつものであることから、これを添加した
本発明の組成物の成形で得られる封止樹脂層はヒ
ートサイクル、ハンダ処理によつてもクラツクの
発生するおそれはなく、またその撥水性によつて
湿度の侵入が防止されるので、電極の腐蝕もな
く、さらにはこの組成物自体が離型性をもつてい
るので金型の離型剤による汚染もなくなるという
有利性が与えられる。
つぎに本発明の実施例をあげるが、例中におけ
る部は重量部を示したものであり、この各種物性
はつぎの方法による測定結果ないし観察結果を示
したものである。
(冷熱サイクル試験)
厚さ0.35mmのシリコンウエハーを16mm×4.5mm
の長方形に切断し、これを14ピンICフレーム
(42アロイ)に接着させたものを、各成形材料を
用いて160℃、2分の成形条件でトランスフアー
成型したのち、180℃で4時間ボストキユアー
し、ついでこれを−55℃での30分間の冷却、180
℃での30分間加熱という冷熱サイクル処理を行な
い成形物のクラツク割れによる不良率が50%にな
るまでのサイクル数を測定した。
(応力測定)
応力により抵抗値の変化するピエゾ抵抗を3mm
角のシリコンチツプに形成して14ピンICフレー
ムに金線でワイヤボンドし、外部電極に接続して
初期の抵抗値(Ro)を測定し、ついでこの素子
を160℃、70Kg/cm2、成形時間3分の成形条件で
樹脂封止した後の抵抗値(R)を測定して、この
R―Ro/Ro値を算出し、これを樹脂応力とし
た。
(熱時硬度)
曲げ試験片成形用金型を用いて各成形材料を
175℃、2分の条件で成形し、金型を解体した直
後の硬度をバーコール硬度計JYZ―935で測定し
た。
(金型汚染)
100mmφ×2mm厚さの円板を成形する金型を用
いて、175℃、2分の条件で100回の連続成形を行
なつたのちの金型表面のくもり具合を肉眼でしら
べた。
(耐湿性=アルミニウム電極腐蝕性)
アルミ腐蝕測定用のテスト素子を14ピンICリ
ードフレームにボンデイングし、これに各種成形
材料をモールドし、180℃で4時間ポストキユア
ーしてから、140℃、3.1気圧の水蒸気雰囲気中に
放置してアルミニウム電極の腐蝕をしらべた。
(一般物性)
冷熱サイクル試験用に作成した成形品につい
て、その曲げ強さ、曲げ弾性率、ガラス転移点、
体積抵抗率を測定した。なお、この体積抵抗率は
100℃での測定値()と水蒸気雰囲気に100時間
放置後の測定値()を示した。
実施例 1
オルソクレゾールエポキシノボラツク樹脂63部
とフエノールノボラツク樹脂32部およびプロム化
エポキシノボラツク樹脂5部とからなるエポキシ
樹脂組成物に、下記に示すオルガノポリシロキサ
ンA〜Gの第1表に示した量と溶融シリカ粉250
部、および第1表に示した量の三酸化アンチモ
ン、γ―グリシドキシトリメトキシシラン、カー
ボンブラツク、トリフエニルホスフイン、ジアジ
ビシクロ〔5,4,0〕ウンデセン(D.B.U.)、
カルナバワツクスを添加して組成物を作り、これ
についての物性テストを行なつたところ、第2表
に示したとおりの結果が得られ、この耐湿性につ
いては第1図に示したとおりの結果が得られた。
なお、試料No.13は比較例を示したものである。
The present invention relates to a thermosetting resin composition, and particularly to a thermosetting resin composition containing an epoxy resin as a main ingredient and used for encapsulating electronic components. The encapsulation of electronic components such as semiconductor devices is shifting from ceramics and cans to resin encapsulation methods, which are mass-producible and low-cost. The use of epoxy resins is increasing because of their superior properties. However, with regard to these semiconductor devices, as semiconductor elements have become larger due to higher integration, the packages that seal them have become smaller and thinner. There are disadvantages in that the stress generated during curing deteriorates the semiconductor properties of the device and causes accidents such as destruction of the passivation film and the device.
Another drawback is that when this seal is made particularly compact and thin, cracks can easily form in the resin layer due to heat cycles or soldering, and if the resin layer is made thinner, moisture can Since it easily passes through the layers and reaches the surface of the semiconductor element, there is a disadvantage that aluminum electrodes and the like are corroded. On the other hand, most of this resin sealing is done by transfer molding in terms of mass production and workability, and as a result, it has become common practice to mold a large number of 200 to 1,000 pieces, but this is not possible with money. The disadvantage is that mold release agents, which are used to improve the release of resin from the mold, can accumulate on the mold surface, contaminating the mold, and the mold must be cleaned to remove this contamination. A process of cleaning with resin is required. The present invention relates to a thermosetting resin composition that solves these disadvantages, and includes (A) 100 parts by weight of a thermosetting epoxy resin, and (B) a perfluoroalkyl group containing 5 or more fluorine atoms. It is characterized by comprising 0.1 to 20 parts by weight of at least one organopolysiloxane and 50 to 500 parts by weight of (C) an inorganic filler. To explain this, the present inventors have conducted various studies on measures to improve the physical properties of resin compositions for encapsulating electronic components that have epoxy resin as the main ingredient. When an organopolysiloxane having a group is added, the impact resistance of the resin sealing layer molded with this composition is improved, and since it is said to have water repellency, it has excellent moisture resistance. It was discovered that the mold release effect prevents mold contamination, and therefore resin sealing that does not cause cracks even during heat cycles and soldering, and does not cause electrode corrosion due to moisture intrusion. After confirming that a layer could be obtained, the present invention was completed by conducting research on the type and amount of organosiloxane added. The thermosetting epoxy resin as the main component constituting the composition of the present invention may be a known one conventionally used in this type of composition, and has at least one, preferably two or more epoxy groups in the molecule. Examples include those consisting of epichlorohydrin and bisphenol A, or resins synthesized from various novolak resins, alicyclic epoxy resins, and epoxy resins containing halogen atoms such as chlorine atoms and bromine atoms. This is its molecular structure,
There is no particular restriction on the molecular weight, and it may be two or a mixture of two or more thereof. Naturally, a curing agent is used in conjunction with this epoxy resin, and these include amine-based curing agents such as diaminodiphenylmethane, diaminodiphenyl sulfone, and metaphenylenediamine, phthalic anhydride, pyromellitic anhydride, and benzophenone anhydride. Acid anhydride curing agents such as tetracarboxylic acid, phenol novolak curing agents having two or more hydroxyl groups in the molecule such as phenol novolak and cresol novolak, various imidazole derivatives, tertiary amine derivatives, cycloamidine Examples include derivatives, phosphine compounds, and catalytic curing agents such as boron trifluoride. Next, the organopolysiloxane as component B) in the composition of the present invention is required to contain at least one perfluoroalkyl group in its molecule, and this perfluoroalkyl group contains a fluorine atom. It is preferable to include at least five, and examples thereof include the following. CF 3 CF 2 CF 2 ―, CF 3 (CF 2 ) o CH 2 CH 2 ―, CF 3
(CF 2 ) o CH 2 CH 2 S―, CF 3 (CF 2 ) o CF 2 CF 2 COO
--, C 7 F 15 CH 2 CH 2 O—, this organopolysiloxane having a perfluoroalkyl group may have a linear, branched , or three-dimensional structure, R 13 SiO 0.5 units, R22SiO _
Units, R 3 1 SiO 1.5 units, SiO 2 units (where R 1 ,
R 2 and R 3 are composed of an arbitrary composition ratio of a monovalent organic group or an organic group having one or more fluorine atoms, and this organic group is an alkyl group such as a methyl group, an ethyl group, a propyl group, a butyl group, etc. Alkenyl groups such as vinyl groups and allyl groups, aryl groups such as phenyl groups and tolyl groups, cycloalkyl groups such as cyclohexyl groups, and some of the hydrogen atoms bonded to the carbon atoms of these groups are replaced by halogen atoms or cyano groups. It may be selected from groups substituted with such as methoxy groups, alkoxy groups such as ethoxy groups, and functional groups such as amino groups, epoxy groups, thiol groups, hydroxyl groups, and carboxyl groups. Further, the viscosity of this organopolysiloxane is not particularly defined, and it may be a low-viscosity or high-viscosity liquid or a solid having a softening point, and examples thereof include the following. (1) Linear polysiloxane (2) Granulated polysiloxane (3) Three-dimensional structure polysiloxane [R f in the above represents a perfluoroalkyl group] The amount of this organopolysiloxane added to component (A) is 0.1 parts by weight per 100 parts by weight of component (A).
If it is less than 20 parts by weight, the effect of improving the moisture resistance of the sealing resin layer made from this composition and the releasability from the mold will be small; if it is more than 20 parts by weight, it may bleed onto the surface of the molded product or the resin interface This will reduce the adhesion between the lead and the lead, so this should be 0.1 to 20 parts by weight per 100 parts by weight of the epoxy resin as component (A).
The amount is preferably 0.5 to 10 parts by weight. Note that if the perfluoroalkyl group has 5 or less fluorine atoms, this organopolysiloxane will not exhibit sufficient mold release properties, so it is necessary to have 5 or more fluorine atoms. There is. Further, the inorganic filler as component C) may be a known one, such as dry silica, wet silica, fused silica powder, crystalline quartz powder, glass fiber, alumina, calcium carbonate, magnesite, zinc white, clay, kaolin, Examples include talc, mica, asbestos, carbon black, etc., and these may be used alone or in combination of two or more thereof. The amount used should be 50 parts by weight or more per 100 parts by weight of the epoxy resin as component A), but if it is too large, it will be difficult to disperse it and the processability will be poor, making it difficult for the molded product to have low quality. Since it will lack stress and crack resistance, it is preferable to limit it to 500 parts by weight. The composition of the present invention can be obtained by uniformly mixing the above-mentioned components (A), (B), and (C) using a mixer, roll, etc., and if necessary, colorants, coupling agents, Known additives such as antioxidants and flame retardants may also be added. This composition contains the above-mentioned organosiloxane containing a fluorine atom-containing functional group, and this organosiloxane has excellent heat resistance and will not deteriorate even if left in a high-temperature atmosphere for a long time. is suitable as a mold release agent for curable resins, and furthermore has excellent water repellency and works as a flexibility imparting agent for various resins, so the composition of the present invention contains it. The sealing resin layer obtained by molding the product is free from cracks even during heat cycles and soldering, and its water repellency prevents moisture from entering, so there is no corrosion of the electrodes. Furthermore, since this composition itself has mold releasability, it is advantageous in that there is no contamination of the mold by the mold release agent. Next, examples of the present invention will be given, in which parts are by weight, and the various physical properties are the results of measurements or observations made by the following methods. (Cold heat cycle test) 0.35mm thick silicon wafer 16mm x 4.5mm
This was cut into rectangles and glued to a 14-pin IC frame (42 alloy), which was then transfer molded using each molding material at 160°C for 2 minutes, and then post-cured at 180°C for 4 hours. This was then cooled at −55°C for 30 minutes at 180°C.
A cold/hot cycle treatment of heating at ℃ for 30 minutes was performed, and the number of cycles until the defective rate due to cracking of the molded product decreased to 50% was measured. (Stress measurement) Piezoresistance whose resistance value changes due to stress is 3mm.
It is formed on a square silicon chip, wire-bonded to a 14-pin IC frame with gold wire, connected to an external electrode to measure the initial resistance value (Ro), and then molded at 160℃ and 70Kg/cm 2 . The resistance value (R) after resin sealing under molding conditions of 3 minutes was measured, and the R-Ro/Ro value was calculated, which was taken as the resin stress. (Hardness when heated) Each molding material was
It was molded at 175°C for 2 minutes, and the hardness was measured immediately after disassembling the mold using a Barcol hardness tester JYZ-935. (Mold contamination) Using a mold for molding a 100mmφ x 2mm thick disc, we performed 100 continuous moldings at 175°C for 2 minutes, and then checked with the naked eye the degree of cloudiness on the mold surface. Examined. (Moisture resistance = aluminum electrode corrosion resistance) A test element for aluminum corrosion measurement was bonded to a 14-pin IC lead frame, various molding materials were molded onto this, post-cured at 180℃ for 4 hours, and then 140℃ and 3.1 atm. The corrosion of the aluminum electrode was examined by leaving it in a steam atmosphere. (General physical properties) The bending strength, bending modulus, glass transition point,
Volume resistivity was measured. Note that this volume resistivity is
The measured values at 100°C () and the measured values after being left in a steam atmosphere for 100 hours () are shown. Example 1 An epoxy resin composition consisting of 63 parts of orthocresol epoxy novolac resin, 32 parts of phenol novolac resin and 5 parts of prominated epoxy novolac resin was added with the following organopolysiloxanes A to G in Table 1. Fused silica powder with the indicated amount 250
parts, and antimony trioxide, γ-glycidoxytrimethoxysilane, carbon black, triphenylphosphine, diazibicyclo[5,4,0]undecene (DBU), in the amounts shown in Table 1.
When a composition was prepared by adding carnauba wax and the physical properties were tested, the results shown in Table 2 were obtained, and the results regarding moisture resistance were as shown in Figure 1. was gotten.
Note that sample No. 13 shows a comparative example.
【表】【table】
【表】【table】
【表】【table】
【表】
実施例 2
エポキシノボラツク樹脂、テトラヒドロ無水フ
タル酸およびジアミノジフエニルメタンとからな
るエポキシ樹脂組成物に、実施例1で使用したオ
ルガノポリシロキサンC、Fと溶融シリカ、およ
びγ―グリシドキシトリメトキシシラン、カーボ
ンブラツク、イミダゾール、カルナバワツクスを
第3表に示したとおりの量で配合して組成物を作
り、これらについての諸物性をしらべたところ、
第3表に併記したとおりの結果が得られた。
なお、試料No.16,17はオルガノポリシロキサン
を添加しない比較例を示したものである。[Table] Example 2 Organopolysiloxanes C and F used in Example 1, fused silica, and γ-glycidoxysiloxane were added to an epoxy resin composition consisting of epoxy novolak resin, tetrahydrophthalic anhydride, and diaminodiphenylmethane. A composition was prepared by blending citrimethoxysilane, carbon black, imidazole, and carnauba wax in the amounts shown in Table 3, and various physical properties of these were investigated.
The results shown in Table 3 were obtained. Note that Samples Nos. 16 and 17 are comparative examples in which no organopolysiloxane was added.
【表】【table】
【表】
比較例
クレゾールエポキシノボラツク樹脂63部、フエ
ノールノボラツク樹脂32部、プロム化エポキシノ
ボラツク樹脂5部、式
で示されるパーフルオロアルキル基含有オルガノ
ポリシロキサン2部、溶融シリカ粉250部、三酸
化アンチモン10部、γ―グリシドキシトリメトキ
シシラン1.2部、カーボンブラツク1.0部、および
トリフエニルホスフイン1.0部とを混練して組成
物No.18を作り、またこの組成物No.18の上記したパ
ーフルオロアルキル基含有オルガノポリシロキサ
ンを下記の式
で示されるパーフルオロアルキル基含有シリコー
ン生ゴムとしたほかは上記と同様にして組成物No.
19を作つた。
つぎにこの組成物No.18,19を使用しての耐湿性
をしらべたところ、これは第2図のとおりであ
り、これらはパーフルオロアルキル基中のフツ素
含有量が5個以下であるから、これが5個以上の
パーフルオロアルキル基を含む組成物No.4にくら
べて耐湿性のわるいことが確認された。[Table] Comparative example: 63 parts of cresol epoxy novolac resin, 32 parts of phenol novolac resin, 5 parts of prominated epoxy novolac resin, formula 2 parts of perfluoroalkyl group-containing organopolysiloxane shown by, 250 parts of fused silica powder, 10 parts of antimony trioxide, 1.2 parts of γ-glycidoxytrimethoxysilane, 1.0 part of carbon black, and 1.0 part of triphenylphosphine. Composition No. 18 was prepared by kneading, and the perfluoroalkyl group-containing organopolysiloxane of Composition No. 18 was mixed with the following formula: Composition No.
I made 19. Next, we examined the moisture resistance of compositions No. 18 and 19, as shown in Figure 2, and found that these compositions had a fluorine content of 5 or less in the perfluoroalkyl group. It was confirmed that this composition had poorer moisture resistance than Composition No. 4 containing 5 or more perfluoroalkyl groups.
第1図、第2図はいずれも本発明の組成物から
作られた電子部品封止用成形体の耐湿性を示すア
ルミニウム電極腐蝕性の試験結果線図を示したも
のである。
FIG. 1 and FIG. 2 both show test results diagrams of the corrosion resistance of aluminum electrodes showing the moisture resistance of molded articles for encapsulating electronic components made from the composition of the present invention.
Claims (1)
ロアルキル基を少なくとも1個有するオルガノ
ポリシロキサン 0.1〜20重量部 C 無機質充填剤 50〜500重量部 とからなることを特徴とする熱硬化性樹脂組成
物。[Scope of Claims] 1 A. Thermosetting epoxy resin 100 parts by weight B. Organopolysiloxane having at least one perfluoroalkyl group containing 5 or more fluorine atoms 0.1 to 20 parts by weight C. Inorganic filler 50 to 20 parts by weight 500 parts by weight of a thermosetting resin composition.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15590983A JPS6049023A (en) | 1983-08-26 | 1983-08-26 | Thermosetting resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15590983A JPS6049023A (en) | 1983-08-26 | 1983-08-26 | Thermosetting resin composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6049023A JPS6049023A (en) | 1985-03-18 |
JPS6226651B2 true JPS6226651B2 (en) | 1987-06-10 |
Family
ID=15616159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15590983A Granted JPS6049023A (en) | 1983-08-26 | 1983-08-26 | Thermosetting resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6049023A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0723425B2 (en) * | 1986-07-14 | 1995-03-15 | 株式会社東芝 | Resin-sealed semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5869244A (en) * | 1981-10-21 | 1983-04-25 | Toray Silicone Co Ltd | Epoxy resin composition for molding |
-
1983
- 1983-08-26 JP JP15590983A patent/JPS6049023A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5869244A (en) * | 1981-10-21 | 1983-04-25 | Toray Silicone Co Ltd | Epoxy resin composition for molding |
Also Published As
Publication number | Publication date |
---|---|
JPS6049023A (en) | 1985-03-18 |
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