JPS6226575U - - Google Patents
Info
- Publication number
- JPS6226575U JPS6226575U JP11725285U JP11725285U JPS6226575U JP S6226575 U JPS6226575 U JP S6226575U JP 11725285 U JP11725285 U JP 11725285U JP 11725285 U JP11725285 U JP 11725285U JP S6226575 U JPS6226575 U JP S6226575U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- pump case
- temperature
- heating element
- regenerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は従来例の説明線図、第２図は本考案の
実施例の截断側面図、第３図は面状発熱体の斜視
図、第４図はその―線断面図、第５図は面状
発熱ヒータ素子の平面図、第６図はその―線
断面図である。 １…クライオポンプ、２…ポンプケース、６…
面状発熱体。
実施例の截断側面図、第３図は面状発熱体の斜視
図、第４図はその―線断面図、第５図は面状
発熱ヒータ素子の平面図、第６図はその―線
断面図である。 １…クライオポンプ、２…ポンプケース、６…
面状発熱体。
Claims (1)
- クライオポンプのポンプケースの外周に、該ポ
ンプケース内に凝縮、吸着された気体分子の加熱
蒸発用に所定温度に自己制御する自己温度制御型
の面状発熱体を取付けて成る再生装置付クライオ
ポンプ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117252U JPH037585Y2 (ja) | 1985-08-01 | 1985-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117252U JPH037585Y2 (ja) | 1985-08-01 | 1985-08-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226575U true JPS6226575U (ja) | 1987-02-18 |
| JPH037585Y2 JPH037585Y2 (ja) | 1991-02-25 |
Family
ID=31002592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985117252U Expired JPH037585Y2 (ja) | 1985-08-01 | 1985-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037585Y2 (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5761188U (ja) * | 1980-09-30 | 1982-04-10 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51118464A (en) * | 1975-04-10 | 1976-10-18 | Yaskawa Electric Mfg Co Ltd | Multi-functional detector of position, velocity and direction |
-
1985
- 1985-08-01 JP JP1985117252U patent/JPH037585Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5761188U (ja) * | 1980-09-30 | 1982-04-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037585Y2 (ja) | 1991-02-25 |