JPS6226575U - - Google Patents

Info

Publication number
JPS6226575U
JPS6226575U JP11725285U JP11725285U JPS6226575U JP S6226575 U JPS6226575 U JP S6226575U JP 11725285 U JP11725285 U JP 11725285U JP 11725285 U JP11725285 U JP 11725285U JP S6226575 U JPS6226575 U JP S6226575U
Authority
JP
Japan
Prior art keywords
cryopump
pump case
temperature
heating element
regenerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11725285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037585Y2 (US06272168-20010807-M00014.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985117252U priority Critical patent/JPH037585Y2/ja
Publication of JPS6226575U publication Critical patent/JPS6226575U/ja
Application granted granted Critical
Publication of JPH037585Y2 publication Critical patent/JPH037585Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1985117252U 1985-08-01 1985-08-01 Expired JPH037585Y2 (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985117252U JPH037585Y2 (US06272168-20010807-M00014.png) 1985-08-01 1985-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985117252U JPH037585Y2 (US06272168-20010807-M00014.png) 1985-08-01 1985-08-01

Publications (2)

Publication Number Publication Date
JPS6226575U true JPS6226575U (US06272168-20010807-M00014.png) 1987-02-18
JPH037585Y2 JPH037585Y2 (US06272168-20010807-M00014.png) 1991-02-25

Family

ID=31002592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985117252U Expired JPH037585Y2 (US06272168-20010807-M00014.png) 1985-08-01 1985-08-01

Country Status (1)

Country Link
JP (1) JPH037585Y2 (US06272168-20010807-M00014.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5761188U (US06272168-20010807-M00014.png) * 1980-09-30 1982-04-10

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51118464A (en) * 1975-04-10 1976-10-18 Yaskawa Electric Mfg Co Ltd Multi-functional detector of position, velocity and direction

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5761188U (US06272168-20010807-M00014.png) * 1980-09-30 1982-04-10

Also Published As

Publication number Publication date
JPH037585Y2 (US06272168-20010807-M00014.png) 1991-02-25

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