JPS6226036U - - Google Patents
Info
- Publication number
- JPS6226036U JPS6226036U JP11648285U JP11648285U JPS6226036U JP S6226036 U JPS6226036 U JP S6226036U JP 11648285 U JP11648285 U JP 11648285U JP 11648285 U JP11648285 U JP 11648285U JP S6226036 U JPS6226036 U JP S6226036U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating shaft
- platens
- fixing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985116482U JPH0648852Y2 (ja) | 1985-07-31 | 1985-07-31 | イオン注入装置におけるプラテン装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985116482U JPH0648852Y2 (ja) | 1985-07-31 | 1985-07-31 | イオン注入装置におけるプラテン装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226036U true JPS6226036U (sl) | 1987-02-17 |
| JPH0648852Y2 JPH0648852Y2 (ja) | 1994-12-12 |
Family
ID=31001113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985116482U Expired - Lifetime JPH0648852Y2 (ja) | 1985-07-31 | 1985-07-31 | イオン注入装置におけるプラテン装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648852Y2 (sl) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5984838U (ja) * | 1982-11-30 | 1984-06-08 | 日本電気ホームエレクトロニクス株式会社 | ウエ−ハ加熱装置 |
-
1985
- 1985-07-31 JP JP1985116482U patent/JPH0648852Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5984838U (ja) * | 1982-11-30 | 1984-06-08 | 日本電気ホームエレクトロニクス株式会社 | ウエ−ハ加熱装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648852Y2 (ja) | 1994-12-12 |