JPS62259433A - Jig with wheel for treating semiconductor wafer - Google Patents

Abstract

PURPOSE:To reduce dusts by using a wheel unit in which wheels and an axle are integrated, and eliminating looseness of the wheels to improve the straight travelling property. CONSTITUTION:A wheel unit 16 provided integrally with wheels 15 near both ends of an axle 14 having a length substantially equal to the width of a bearing housing 11 is contained removably from the hole 12 of a bottom wall in the housing 11, and the both ends of the axis 14 are rotatably engaged with the bearings 13 at both side walls. The unit 16 contained in the housing 11 is prevented from removing from the housing 11 by a wheel removal preventive plate 18 removably inserted from the square-shaped hole 17 provided at the lower side wall at the rear of the housing 11, and a projection 19 engaged partly with the hole 12 is provided to prevent it from horizontally moving. Since the wheels and the axle are integrated in the wheel unit, excellent straight traveling property is provided, and dusts can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a wheeled jig used when performing diffusion furnace treatment or the like on semiconductor wafers.

[Prior art] Conventionally, in order to perform diffusion furnace treatment on semiconductor wafers (hereinafter simply referred to as "wafers"), multiple wafers are placed directly or indirectly and transported into a furnace core tube, etc. As a wheeled jig, Japanese Patent Application Laid-Open No. 56-42333, Japanese Patent Application Laid-open No. 60
−142513 or U.S. Patent No. 3.70
The one published in Publication No. 5.714 is known.

The former Japanese Patent Application Publication No. 56-42333 and Japanese Patent Application Publication No. 60-1
As shown in FIG. 2, the wheeled jig disclosed in Publication No. 42513 has a jig main body 10 with an arcuate cross section on both ends (one end in the figure) on which a plurality of wafers (not shown) are placed directly or indirectly. A rectangular parallelepiped-shaped bearing block 2 is integrally installed in the bearing block 2 (only part shown), an axle 4 is inserted into the shaft hole 3 provided through the bearing block 2, an axle 5 is fitted near both ends of the axle 4, and these axles are A wheel holder 6 to prevent the wheel 5 from falling off is fitted onto the axle 4, the wheel holder 6 is fixed to the axle 4 with a pin 7, and a box-shaped cover 8 covering the wheel 5, etc. is attached to the bearing block 2. It is configured.

The latter wheeled jig disclosed in U.S. Pat. It is configured to engage with.

[Problems to be Solved by the Invention] However, since the former wheeled jig consists of a large number of constituent members, high accuracy is required in processing each constituent member. If the machining accuracy of each component is not high enough, looseness will occur when they are combined, reducing the straightness when transporting into the furnace core tube etc., increasing friction between the furnace core tube etc. and the wheels, and causing dust. There are problems that occur.

Further, although the box-shaped cover 8 prevents dust from scattering, the contact area between the constituent members is large, and the amount of dust generated increases, making the box-shaped cover 8 less effective.

Furthermore, acid cleaning or the like is performed as a pretreatment for wafers such as diffusion furnace treatment, but there is a problem that cleaning is complicated due to the complicated structure.

Furthermore, according to the latter type of jig with wheels, since the wheels and axle are integrated, the problem of straightness is alleviated, but the contact area between the axle and the jig body is large, which increases the generation of dust. There's a problem.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a wheeled jig for processing wafers that has excellent straightness, reduces dust generation, and facilitates cleaning.

[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention provides a jig main body on which a plurality of wafers are placed directly or indirectly, and a jig main body provided at both ends of the jig main body and provided on the bottom wall. A wheel comprising: a bearing housing having an open hollow part; and a wheel integrally mounted on an axle which is housed in the bearing housing from the opening and is rotatably engaged with the bearing provided in the bearing housing. It consists of a unit and a wheel fall prevention plate removably provided on the bottom wall.

[Function] In the jig of the present invention, since the wheel and the axle are integrated into a wheel unit, there is no play in the wheel, and the contact between the wheel unit and the bearing housing is prevented, and the axle and the bearing are separated. Since this occurs only between the two, the contact area between the two becomes extremely small. In addition, there are only 3 parts involved in running: the bearing housing, the wheel unit, and the wheel fall prevention plate, and the structure is simple, and the wheel unit can be accommodated in the bearing housing through the opening in the bottom wall of the bearing housing. The running part is assembled by engaging the axle with the axle bearing and inserting the wheel fall prevention plate into the bearing housing through an opening provided in the side wall or bottom wall, and handling the wheel fall prevention plate. By doing so, the wheel unit can be removed.

Examples] An embodiment of the present invention will be described below with reference to FIG.

In the figure, reference numeral 10 denotes a jig body that directly or indirectly supports a plurality of wafers (not shown). ing. A box-shaped bearing housing 11 made of the same material as the jig body 10 is integrally provided at both ends of the jig body 10 (only one end is shown in the figure). The bearing housing 11 is for accommodating a small wheel unit (rear), and has an H-shaped opening 12 in its bottom wall, and U-shaped openings 12 in the lower parts of the opposite side walls. The bearing is provided with a section 13.

A wheel unit 16 is housed in the bearing housing 11 and is removable from the opening 12 in the bottom wall. and axle 14
Both ends of the bearing are rotatably engaged with bearing portions 13 on both side walls. The wheel unit 16 housed in the bearing housing 11 is located at the rear of the bearing housing 11 (first
The wheel drop-off prevention plate 18 is removably inserted from a rectangular opening 17 provided in the lower part of the side wall (left side in the figure) to prevent the wheel from falling off the bearing housing 11. is provided with a convex portion 19 that engages with a portion of the opening 12 in the bottom wall in order to prevent its horizontal movement.

Note that the wheel unit 16 and the wheel fall prevention plate 18 are made of the same material as the jig main body 10, as is the bearing housing 11.

In addition, the wheel unit 16 is made by cutting out the axle 14 by grinding a bar material having an outer diameter that is approximately the same as the outer diameter of the wheel 15,
It is manufactured by bonding the axle 14 and wheel 15, which were formed separately, into an integral body.

The above-mentioned combined wheeled jig accommodates the wheel unit 16 in the bearing housing 11 through the opening 12 in the bottom wall, and
4 are engaged with the bearing parts 13 on both side walls, and the wheel fall prevention plate 18 is inserted into the bearing housing 11 through the opening 17 in the side wall, and the convex part 19 is inserted into the opening 12 in the bottom wall. By engaging, the assembly of the running part is completed, and the wheel fall prevention plate 18 is handled in the reverse order of the above procedure, and the wheel unit 16 is assembled.
The traveling part is disassembled by taking it out.

It should be noted that the present invention is not limited to the above-mentioned embodiments. For example, the shape of the bearing housing may be cylindrical or other shapes, and the bearing housing may have a bearing portion that rotatably supports the axle. It may also be an arch-shaped member provided on the bottom wall within the housing. Furthermore, the shape and mounting method of the wheel fall prevention plate can be selected as appropriate.

[Effects of the Invention] As described above, according to the present invention, a wheel unit in which the wheel and the axle are integrated is used, and there is no play in the wheel, so straight running performance can be improved, and the relationship between the wheel and the furnace core tube, etc. can be improved. By reducing the friction with the furnace wall, it is possible to reduce the generation of dust due to contact between the wheels and the furnace wall. In addition, since the contact area between the wheel unit and the bearing housing is extremely small, dust generated by contact between the two can be significantly reduced, and since the entire wheel unit is housed within the bearing housing, dust generated by the contact between the two can be significantly reduced. This prevents the dust from scattering and adversely affecting the wafer. Furthermore, since the number of constituent members of the traveling portion is small and the structure is simple, assembly, disassembly and cleaning of the traveling portion can be easily performed.

[Brief explanation of drawings]

FIG. 1 is an exploded perspective view showing an embodiment of a wheeled jig according to the present invention, and FIG. 2 is an exploded perspective view of a conventional wheeled jig.

Claims (1)

[Claims] A jig main body on which a plurality of semiconductor wafers are directly or indirectly placed; a bearing housing provided at both ends of the jig main body and having a hollow portion opening in the bottom wall; and a bearing housing that is accommodated from the opening into the bearing housing. and a wheel unit in which a wheel is integrally provided on an axle that is rotatably engaged with a bearing portion provided in the bearing housing, and a wheel drop-off prevention plate that is detachably provided on the bottom wall. Features: A jig with wheels for processing semiconductor wafers.