JPS62257714A - Method and apparatus for manufacturing magnetic disk - Google Patents
Method and apparatus for manufacturing magnetic diskInfo
- Publication number
- JPS62257714A JPS62257714A JP10069286A JP10069286A JPS62257714A JP S62257714 A JPS62257714 A JP S62257714A JP 10069286 A JP10069286 A JP 10069286A JP 10069286 A JP10069286 A JP 10069286A JP S62257714 A JPS62257714 A JP S62257714A
- Authority
- JP
- Japan
- Prior art keywords
- disk
- magnetic
- thin film
- magnetic disk
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000000034 method Methods 0.000 title claims description 11
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 239000010408 film Substances 0.000 claims abstract description 18
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000000853 adhesive Substances 0.000 claims abstract description 10
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 9
- 238000005868 electrolysis reaction Methods 0.000 claims abstract description 9
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 8
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 claims abstract description 8
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000007864 aqueous solution Substances 0.000 claims abstract description 7
- 239000010407 anodic oxide Substances 0.000 claims abstract description 6
- 239000000243 solution Substances 0.000 claims abstract description 3
- 230000003746 surface roughness Effects 0.000 claims abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract 3
- 229920002430 Fibre-reinforced plastic Polymers 0.000 claims abstract 3
- 239000011151 fibre-reinforced plastic Substances 0.000 claims abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract 2
- 238000010030 laminating Methods 0.000 claims abstract 2
- 238000007747 plating Methods 0.000 claims abstract 2
- 229910052710 silicon Inorganic materials 0.000 claims abstract 2
- 239000010703 silicon Substances 0.000 claims abstract 2
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- -1 iron compound salt Chemical class 0.000 claims description 4
- 238000005238 degreasing Methods 0.000 claims description 2
- 150000003839 salts Chemical class 0.000 claims 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims 1
- 239000004327 boric acid Substances 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 230000005389 magnetism Effects 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 abstract description 12
- 235000006408 oxalic acid Nutrition 0.000 abstract description 4
- 239000004411 aluminium Substances 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 8
- 239000003733 fiber-reinforced composite Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 230000005415 magnetization Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000002490 cerebral effect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は磁気円板の製造方法とその装置に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a magnetic disk and an apparatus therefor.
周知のように、磁気記録を利朋した製品は乗車券、キャ
ッシュカード、カセットテープ等の小物から、放送戸録
画や電子計算機の磁気テープ、磁気円板すどの大形のも
のまで数多くみることができ１社会生活にかかせぬ存在
になっている。As is well known, there are many products that utilize magnetic recording, ranging from small items such as train tickets, cash cards, and cassette tapes to large items such as broadcast door recordings, magnetic tapes for computer computers, and magnetic disc slides. It has become an indispensable part of social life.
なかでも磁気円板はコンピューターシステムの大容ｔ＝
ｄ録装置として重要な位置を占めており。Among them, magnetic disks have a large capacity for computer systems.
It occupies an important position as a digital recording device.
最近の情報分野の発展に伴いよシいっそうの高密度記録
化が望まれている。With recent developments in the information field, even higher density recording is desired.
従来のｒ−Ｆｅ２０３の針状粒子を分散させた塗料を塗
布した磁気円板は飽和磁化が低く、薄膜化は０．４５ミ
クロンが限界であシ、これに代わるものが必要となって
いる。Conventional magnetic disks coated with paint in which needle-like particles of r-Fe203 are dispersed have low saturation magnetization, and the thinning of the disk is limited to 0.45 microns, and an alternative to this is needed.
今後の高密度記録化に対応するには磁性層の薄膜化、高
保磁力、高残留磁化、耐熱性、耐摩耗性。To support future high-density recording, the magnetic layer must be made thinner, with higher coercive force, higher residual magnetization, heat resistance, and wear resistance.
耐＠ＭＡ性等が要求される。@MA resistance etc. are required.
又、磁気円板の高速回転による機械的々摩耗を減少させ
るために磁気円板を軽くすることが必要である。Furthermore, it is necessary to make the magnetic disk lighter in order to reduce mechanical wear due to high-speed rotation of the magnetic disk.
これらの要求を満足させるために１種々の製造方法が瑚
えちれているが、未だ確立された技術がなく未踏分野が
残されている。Although various manufacturing methods have been developed to satisfy these demands, there is still no established technology and there remains an unexplored field.
従って、磁性層の薄膜化、高保磁力、高残留磁化、耐熱
性、耐摩耗性、耐食性、および磁気円板の軽量化を考慮
して製造方法、装置を検討することは、今後の高密度化
、大容量化に対処できるものである。Therefore, it is important to consider manufacturing methods and equipment that take into account thinner magnetic layers, higher coercive force, higher residual magnetization, heat resistance, abrasion resistance, corrosion resistance, and lighter weight of magnetic disks in order to achieve higher density in the future. , which can cope with larger capacity.
この発明は上記した磁気円板の製造方法とその装置に係
る技術的諸問題点を解決するためになされたものであり
、その目的は比較的簡便々方法によシ軽量化、耐久性が
よく、高密度の磁気円板を製造する方法とその装置を提
供するにある。This invention was made in order to solve the technical problems associated with the above-mentioned magnetic disk manufacturing method and device, and its purpose is to reduce weight and improve durability through a relatively simple method. The present invention provides a method and apparatus for manufacturing a high-density magnetic disk.
この発明に係る磁気円板の製造方法とその装置は、鋭意
検討を重ねた結果、所袂厚みのアルミニウム、又はアル
ミニウム合金製の円板を脱脂、クロム酸−硫酸の混合水
溶液中で洗浄後、接着剤で繊維強化複合材とを加熱・加
圧・硬化し、その後円板表面を所要の表面粗さの鏡面仕
上げを行って。As a result of extensive research, the method and apparatus for manufacturing a magnetic disk according to the present invention have been developed by degreasing a so-called thick disk made of aluminum or an aluminum alloy, and cleaning it in a mixed aqueous solution of chromic acid and sulfuric acid. The adhesive is used to heat, press, and harden the fiber-reinforced composite material, and then the disk surface is mirror-finished to the desired surface roughness.
クロム酸浴、又はシュウ酸浴で陽極電解して鏡面を損わ
ないようにし、ついで、陽極酸化皮膜の微細孔中に交流
陰極電解によシ鉄、又はコバルト。Anodic electrolysis is performed in a chromic acid bath or oxalic acid bath to prevent damage to the mirror surface, and then iron or cobalt is added to the fine pores of the anodic oxide film by alternating current cathodic electrolysis.
又はニッケルの磁性金属を析出させ、その後、真空容器
の所定の位置に取シ付け、 １０””〜１ｏ−６ＴＯｒ
ｒの範囲迄、真空ポンプによシ脱気し、その後円板表面
及び被膜源を所要の温度迄刃口熱し、被膜源には所要の
エネルギーを有するレーザビームを照射して被膜源を溶
融、蒸発させ円板表面に薄膜を形成できることをみいだ
し１本発明を完成するに到った。Alternatively, deposit a magnetic metal such as nickel, then attach it to a predetermined position in a vacuum container, and apply 10" to 1o-6 TOr.
After degassing with a vacuum pump to a range of It was discovered that a thin film could be formed on the surface of a disk by evaporation, and the present invention was completed.
この発明においては、繊維強化型複合材を接着剤により
／ＪＯ瀉・加圧・硬化させているので、その分重量は軽
くな見軽量化することができる。In this invention, since the fiber-reinforced composite material is subjected to JO, pressure, and curing using an adhesive, the weight can be reduced accordingly.
この発明においては鏡面に仕上げたアルミニウム又はア
ルミニウム合金製の円板にクロム酸浴。In this invention, a mirror-finished aluminum or aluminum alloy disk is bathed in chromic acid.
又はシュウ酸浴によシ陽極電解して所要厚みを得。Alternatively, obtain the required thickness by anodic electrolysis in an oxalic acid bath.
ついで陽極酸化皮膜の微細孔中に磁性金属を析出させ、
その後乾式成膜法により耐摩耗性、耐食性の良好な皮膜
を形成しているので耐摩耗、耐衝撃性がよく、高保磁力
、高残留磁化の薄膜が得られ。Next, magnetic metal is precipitated into the micropores of the anodic oxide film,
After that, a film with good wear resistance and corrosion resistance is formed by a dry film forming method, so a thin film with good wear resistance and impact resistance, high coercive force, and high residual magnetization can be obtained.
しかも鏡面を損うことがない。Moreover, it does not damage the mirror surface.
以下に実施例を掲げ、この発明を更に詳しく説明する。 The present invention will be explained in more detail with reference to Examples below.
第１図（ａ）はこの発明による磁気円板の一実施例を示
すものであシ、同図色）は同図（ａ）のＡ−Ａ’ 面
の断面を示すものである。FIG. 1(a) shows an embodiment of a magnetic disk according to the present invention, and the figure (color) shows a cross section taken along the line AA' in FIG. 1(a).
図において、（１）はアルミニウム又はアルミニウム合
金製の円板、（２）は接着剤、（３）は繊維強化型複合
材、（４）は陽極酸化皮膜層、（５）は磁性金属、（６
）は非金属薄膜層、（））は磁気円板である。In the figure, (1) is a disc made of aluminum or aluminum alloy, (2) is an adhesive, (3) is a fiber reinforced composite material, (4) is an anodized film layer, (5) is a magnetic metal, ( 6
) is a nonmetallic thin film layer, and ()) is a magnetic disk.
なお、ここでアルミニウム又はアルミニウム合金製の円
板（１）を用いて磁気円板（））の製造工程を第２図を
用いて簡単に説明する。Here, the manufacturing process of the magnetic disk (2) using a disk (1) made of aluminum or aluminum alloy will be briefly explained with reference to FIG.
アルミニウム又はアルミニウム合金製の円板ｆｉｌを脱
脂し、ついでクロム酸−硫酸の混合水溶液で洗浄を行っ
た後９円板（１）と、接着剤（２）と、繊維強化型複合
材（３）とを積層し、所要の温度と圧力とで加熱・カロ
圧・硬化させる。After degreasing the aluminum or aluminum alloy disc fil and then cleaning it with a mixed aqueous solution of chromic acid and sulfuric acid, 9 discs (1), adhesive (2), and fiber-reinforced composite material (3) are prepared. are laminated and heated, heated and cured at the required temperature and pressure.
かかる装置にはヒート・プレス装置を用いるとよい。A heat press device may be used as such device.
繊維強化型複合材で積層、硬化さした円板（１）の表面
を研磨などの手段によって鏡面に仕上げ、鏡面に仕上げ
た表面を損わないように洗浄後、クロム酸浴、又はシュ
ウ酸浴で陽極酸化処理（４）を行うのである。The surface of the disc (1) laminated and hardened with fiber-reinforced composite material is finished to a mirror finish by polishing or other means, and after cleaning to avoid damaging the mirror finished surface, it is placed in a chromic acid bath or an oxalic acid bath. Then, anodizing treatment (4) is performed.
かかる処理において、磁気円板の耐衝撃性、耐食性を確
保するために、皮膜重量として５ ｍ９７ｄｍ２以上得
ることが必要である。In this treatment, in order to ensure the impact resistance and corrosion resistance of the magnetic disk, it is necessary to obtain a coating weight of 5 m97 dm2 or more.
ついで、陽極酸化皮膜の微細孔に鉄、又はコバルト、又
はニッケルの磁性金属（５）を交流℃解によシ析出させ
るのである。Next, a magnetic metal (5) of iron, cobalt, or nickel is deposited in the micropores of the anodic oxide film by AC solution.
次に磁性めっきをした円板（８）だ非金属系薄膜を形成
するのであるが、その装置を第３図に示した。Next, a nonmetallic thin film is formed on the magnetically plated disk (8), and the apparatus is shown in FIG.
磁性めっきした円板（８）を真空容器（９）に入れ、そ
の後容器（９）内の空気を１０ ”” ’ｒｏｒｒに
なる迄脱気し、ヒーター（ｉｌ−１）、（１）−２）に
よシ円板と被膜源ＯＩとを約１００℃前後に刀口熱する
。The magnetically plated disk (8) is placed in a vacuum container (9), and then the air inside the container (9) is degassed until the pressure becomes 10'''rorr, and the heater (il-1), (1)-2 ) The disk and the coating source OI are heated to about 100°C.
その次にエネルギー源（１９からレーザ光を発生させ、
ミラー（１３−１）、（１３−２”ｌ、（１３−３）に
てビーム１）α４を反射させて、集光レンズα２により
収束され。Next, a laser beam is generated from the energy source (19),
Beam 1) α4 is reflected by mirrors (13-1), (13-2″l, and (13-3)), and is converged by a condenser lens α2.
被膜源０１のみにレーザ光を照射させて、被膜源α１を
）ＪＤ熱して溶融・蒸発させることによって鏡面の磁性
めっきした円板（８）の表面に非金属で尚硬度。By irradiating only the coating source 01 with a laser beam and heating the coating source α1 to melt and evaporate it, a nonmetallic yet hard surface is formed on the surface of the mirror-like magnetically plated disc (8).
耐食性の良好な皮膜（６）を被覆するのである。It is coated with a film (6) having good corrosion resistance.
この場合のレーザ光の強度は１０２Ｗ／α２ないし１ｏ
７ｗ／α２のビーム線Ｉを提供するのが好ましい。The intensity of the laser beam in this case is 102W/α2 to 1o
Preferably, a beam line I of 7w/α2 is provided.
第４図はイ１）られた皮膜の硬度の測定結果を示した図
である。FIG. 4 is a diagram showing the results of measurement of the hardness of the coated film.
第４図から明らかなように、アルミニウム又はアルミニ
ウム合金製の素材（１）に対して、皮膜の形成順に従っ
て硬度が高く々っているので、耐摩耗性、耐衝撃性に優
れている。しかも、最上層は皮膜の硬度が高く、耐食性
にも優れている保護膜で被覆している。As is clear from FIG. 4, the hardness of the material (1), which is made of aluminum or aluminum alloy, increases in accordance with the order in which the film is formed, so it has excellent abrasion resistance and impact resistance. Moreover, the top layer is coated with a protective film that has high hardness and excellent corrosion resistance.
第５図は磁性薄膜の磁気特性を示す図である。FIG. 5 is a diagram showing the magnetic properties of the magnetic thin film.
高保磁力を示している。It shows high coercive force.
以上の説明から明らかなように１本発明の磁気円板の製
造方法とその装置によれば、繊維強化型複合材を接着剤
により刀口温・加圧・硬化させているので、その分重址
は軽くなシ＠址化しており。As is clear from the above explanation, according to the method and apparatus for manufacturing a magnetic disk of the present invention, the fiber-reinforced composite material is cured by heating, pressurizing, and curing the adhesive using an adhesive. has become a light shi @ site.
鏡面に仕上げたアルミニウム又はアルミニウム合金製の
円板表面を損うことなく耐熱性、耐衝撃性のよい薄膜を
形成でき、しかも薄膜化、高保磁力。A thin film with good heat resistance and impact resistance can be formed without damaging the surface of a mirror-finished aluminum or aluminum alloy disk, and it is also thin and has high coercive force.
高残留磁化の脳性薄膜が安定して得られる。Cerebral thin films with high residual magnetization can be stably obtained.
また１本発明は将来の磁気記録の高密度化に対応するこ
とが可能であシ、有望視されている垂直磁気薄膜の製造
方法およびその装置にも適用が可能である。Furthermore, the present invention can cope with future high-density magnetic recording, and can also be applied to a method and apparatus for producing perpendicular magnetic thin films, which are considered promising.
第１図（ａ）は磁気円板の正面図、第１図（ｂ）は第１
図（ａ）のＡ −Ａ’ 線断面図、第２図は磁気円板の
製造工程を示す図、第３図は薄膜の製造装置、第４図は
皮膜の硬度を示す図、第５図は磁性薄膜の磁気特性を示
す図である。
図中、（１）はアルミニウム又はアヤミュウ１合金製の
円板、（２）は接着剤、（３）は繊維強化型複合材。
（４）は陽極酸化皮膜層、（５）は磁性金属、（Ｇ１は
非金属薄膜層、（７）は磁気円板、（８）は磁性めっき
した円板。
（９）は真空容器、 Ｑ（Ｉは被膜源、 （１）−１
）、（１）−２）はヒーター、αａは集光レンズ、
（１３−１）、（１３−２）。
（１３−５）はミラー、（Ｉ４はビーム線、ａりはエネ
ルギー源である。
なお１図中同一あるいは相当部分には同一符号を付して
示しである。Figure 1 (a) is a front view of the magnetic disk, Figure 1 (b) is the first
A cross-sectional view taken along line A-A' in Figure (a), Figure 2 is a diagram showing the magnetic disk manufacturing process, Figure 3 is a thin film manufacturing apparatus, Figure 4 is a diagram showing the hardness of the film, and Figure 5 is a diagram showing the manufacturing process of the magnetic disk. FIG. 2 is a diagram showing the magnetic properties of a magnetic thin film. In the figure, (1) is a disc made of aluminum or Ayamiu 1 alloy, (2) is an adhesive, and (3) is a fiber-reinforced composite material. (4) is an anodized film layer, (5) is a magnetic metal, (G1 is a non-metallic thin film layer, (7) is a magnetic disk, (8) is a magnetically plated disk. (9) is a vacuum container, Q (I is the coating source, (1)-1
), (1)-2) are heaters, αa is a condensing lens,
(13-1), (13-2). (13-5) is a mirror, (I4 is a beam line, and a is an energy source. In FIG. 1, the same or corresponding parts are designated by the same reference numerals.
Claims (5)
の円板に所要の脱脂を行い、クロム酸−硫酸の混合水溶
液で所要時間洗浄を行つた後、上記円板と、接着剤と、
炭素系、又はホウ素、又はケイ素系の繊維強化型プラス
チックとを積層・加熱・加圧・硬化させた後、上記積層
した円板に所要の面粗さの鏡面仕上げを行い、所定の前
処理、金属塩を含む水溶液中で陽極電解し、皮膜重量を
５ｍｇ／ｄｍ＾２以上得るようにし、ついで磁性めつき
液中で交流陰極電解を行つて上記陽極酸化皮膜の微細孔
中に磁性薄膜を形成し、その後非金属系薄膜を形成する
ことを特徴とする磁気円板の製造方法。(1) After degreasing an aluminum or aluminum alloy disc of a required thickness and cleaning it with a mixed aqueous solution of chromic acid and sulfuric acid for a required period of time, the disc and an adhesive are removed.
After laminating, heating, pressurizing, and curing carbon-based, boron-based, or silicon-based fiber-reinforced plastic, the laminated disks are mirror-finished to the required surface roughness, and pre-treated, Perform anodic electrolysis in an aqueous solution containing a metal salt to obtain a film weight of 5 mg/dm^2 or more, and then perform AC cathodic electrolysis in a magnetic plating solution to form a magnetic thin film in the micropores of the anodic oxide film. A method for manufacturing a magnetic disk, comprising: forming a non-metallic thin film thereon.
を含む水溶液中で、印加電圧２０〜８０Ｖで陽極電解す
ることを特徴とする特許請求の範囲第（１）項記載の磁
気円板の製造方法。(2) Magnetism according to claim (1), characterized in that anodic electrolysis is carried out at an applied voltage of 20 to 80 V in an aqueous solution containing 0.5 to 1.0 moles of chromic anhydride as the metal salt. Method of manufacturing a disc.
合物塩又はコバルト化合物塩又はニッケル化合物塩とホ
ウ酸とを含有する水溶液中で印加電圧１０〜２０Ｖにて
交流電解することを特徴とする特許請求の範囲第（１）
項記載の磁気円板の製造方法。(3) A patent characterized in that AC electrolysis is performed at an applied voltage of 10 to 20 V in an aqueous solution containing an iron compound salt, a cobalt compound salt, or a nickel compound salt as a metal salt, and boric acid in forming a magnetic thin film. Claim No. (1)
1. Method for manufacturing a magnetic disk as described in Section 1.
ボン系又は、アモルファスダイヤモンド系、又は酸化ケ
イ素であることを特徴とする特許請求の範囲第（１）項
記載の磁気円板の製造方法。(4) The method for manufacturing a magnetic disk according to claim (1), wherein the nonmetallic thin film is ceramic-based, carbon-based, amorphous diamond-based, or silicon oxide.
、被膜源を収納する容器と、容器を回転させる駆動部と
、レーザー光ビームを取り入れる窓口と、レーザー光を
発生させるエネルギ源と、レーザービーム線の導波路と
、レーザービーム線を収束させる集光レンズとを特徴と
する磁気円板の製造装置。(5) a vacuum container, a vacuum pump, a heater for heating, a container that houses the coating source, a drive unit that rotates the container, a window that takes in the laser beam, and an energy source that generates the laser beam; A magnetic disk manufacturing device characterized by a waveguide for a laser beam line and a condensing lens that converges the laser beam line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10069286A JPS62257714A (en) | 1986-04-30 | 1986-04-30 | Method and apparatus for manufacturing magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10069286A JPS62257714A (en) | 1986-04-30 | 1986-04-30 | Method and apparatus for manufacturing magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62257714A true JPS62257714A (en) | 1987-11-10 |
Family
ID=14280778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10069286A Pending JPS62257714A (en) | 1986-04-30 | 1986-04-30 | Method and apparatus for manufacturing magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62257714A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014122031A (en) * | 2012-12-21 | 2014-07-03 | Campagnolo Spa | Component of bicycle including aluminum body and composite material body, and production method of component |
-
1986
- 1986-04-30 JP JP10069286A patent/JPS62257714A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014122031A (en) * | 2012-12-21 | 2014-07-03 | Campagnolo Spa | Component of bicycle including aluminum body and composite material body, and production method of component |
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