JPS62256702A - Production of non-oxidized powder - Google Patents
Production of non-oxidized powderInfo
- Publication number
- JPS62256702A JPS62256702A JP61101517A JP10151786A JPS62256702A JP S62256702 A JPS62256702 A JP S62256702A JP 61101517 A JP61101517 A JP 61101517A JP 10151786 A JP10151786 A JP 10151786A JP S62256702 A JPS62256702 A JP S62256702A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- core tube
- powder
- furnace core
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 62
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 45
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- 239000011261 inert gas Substances 0.000 claims abstract description 11
- 230000006698 induction Effects 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims description 20
- 239000011812 mixed powder Substances 0.000 claims description 11
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract 4
- 241000143432 Daldinia concentrica Species 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000006722 reduction reaction Methods 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 4
- 238000005121 nitriding Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000010298 pulverizing process Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000001112 coagulating effect Effects 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0722—Preparation by direct nitridation of aluminium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【発明の詳細な説明】
童栗よ傅肌里圀団
本発明は、Ｓ ｉ３Ｎ４．ＡＩＮ、Ｓ ｉＣ等の非酸化
物粉末を製造する方法に関する。[Detailed Description of the Invention] The present invention is based on the Si3N4. The present invention relates to a method for manufacturing non-oxide powder such as AIN, SiC, etc.
狐−乳Ｊと七二玉
従来より、非酸化物セラミック粉末を製造する方法とし
ては、ａ）Ａ１等の微細な金属単体の粉末をＮ２．Ａｒ
等の不活性ガス中で焼成する直接法、ｂ）ＳｉＨａ等の
ガスをＮ、、Ａｒ等の不活性ガス等と共にグロー放電炉
に入れてグロー放電させるＣＶＤ法、或いは、Ｃ）多数
の通気孔を有するカーボン筒内に酸化物粉末とカーボン
粉末を入れてＮ、、Ａｒ中で反応させる還元窒化法等が
知られている。Fox Milk J and Seven Two Balls Conventionally, the method for producing non-oxide ceramic powder is as follows: a) Fine metal elemental powder such as A1 is heated with N2. Ar
b) CVD method in which a gas such as SiHa is placed in a glow discharge furnace with an inert gas such as N, Ar, etc., and glow discharge is performed, or C) a large number of ventilation holes. A reductive nitriding method is known in which oxide powder and carbon powder are placed in a carbon cylinder having a carbon cylinder and reacted in N, Ar.
明が解゛ しようとする間 点
しかしながら、上記ａ）の直接法は、処理中に金属粉末
同士が凝結して粒径が大きくなり、別途粉砕工程が必要
となって、粉砕時の純度低下が大きな問題である。However, in the direct method (a) above, the metal powders coagulate together during treatment, increasing the particle size, requiring a separate pulverization process, and reducing the purity during pulverization. This is a big problem.
また、上記ｂ）のＣＶＤ法や上記Ｃ）の還元窒化法は、
−回の処理量が制限され、量産性に欠けるといった問題
がある。特に上記Ｃ）の還元窒化法では、ガス拡散が不
均一となって酸化物粉末と一様に接触しないので、均一
な処理が難しいといった問題がある。In addition, the CVD method of b) above and the reduction nitriding method of C) above,
- There is a problem that the amount of processing times is limited and mass productivity is lacking. Particularly, in the reductive nitriding method (C) above, there is a problem that uniform treatment is difficult because gas diffusion becomes non-uniform and the gas does not come into uniform contact with the oxide powder.
本発明は、上記事情に鑑みてなされたもので、その目的
とするところは、均一で細粒質の非酸化物粉末を大量生
産することができる製造方法を提供することにある。The present invention has been made in view of the above circumstances, and its purpose is to provide a manufacturing method capable of mass-producing uniform, fine-grained non-oxide powder.
１ 点を解決するための手
上記問題を解決するため、本発明に係る非酸化物粉末の
製造方法は、金属粉末とカーボン粉末の混合粉末をカー
ボンの玉石と共にカーボン炉芯管に入れ、該カーボン炉
芯管内に不活性ガスを流して非酸化雰囲気に保ちつつ該
カーボン炉芯管を回転させて高周波誘導加熱することを
要旨としている。1. Steps to Solve the Problem In order to solve the above problem, the method for producing non-oxide powder according to the present invention includes putting a mixed powder of metal powder and carbon powder together with carbon boulders into a carbon furnace core tube, The gist of this method is to rotate the carbon furnace core tube and perform high-frequency induction heating while maintaining a non-oxidizing atmosphere by flowing an inert gas into the furnace core tube.
詐−一一一一里
上記の構成とすれば、高周波誘導加熱によってカーボン
炉芯管とカーボンの玉石が発熱するため、カーボン炉芯
管内部の金属粉末とカーボン粉末の混合粉末は、カーボ
ン炉芯管の熱によって周囲から加熱されるのみならず、
カーボン粉末およびカーボンの玉石の熱によって内部か
らも加熱されることになる。しかも、混合粉末はカーボ
ン炉芯管の回転によって玉石と共に攪拌されるので、均
−且つ充分に加熱されることになる。従って、多量の混
合粉末がカーボン炉芯管内に入っていても、均−且つ充
分な加熱によって金属粉末は所定の処理温度に昇温され
、一方、カーボン粉末は不活性ガスと共に還元処理雰囲
気をつくるので、金属粉末の還元反応はムラなく進行し
、非酸化物粉末の量産が可能−となる。特に、この反応
中は、上記のように金属粉末が攪拌されて還元処理雰囲
気との接触が均−且つ充分に行われるため、還元反応の
進行は速やかであり、またカーボン炉芯管内を転動する
カーボン粉末とカーボン玉石によって粉末同士の凝結も
阻止されるので、均一で細粒質の非酸化物粉末を効率よ
く量産することができる。With the above configuration, the carbon furnace core tube and carbon boulders generate heat due to high frequency induction heating, so the mixed powder of metal powder and carbon powder inside the carbon furnace core tube is heated by the carbon furnace core. The heat from the tube not only heats up the surrounding area;
The heat from the carbon powder and carbon boulders will also heat it from within. Moreover, since the mixed powder is stirred together with the boulders by the rotation of the carbon furnace tube, it is evenly and sufficiently heated. Therefore, even if a large amount of mixed powder is contained in the carbon furnace tube, the metal powder will be heated to the predetermined processing temperature by uniform and sufficient heating, while the carbon powder will create a reduction processing atmosphere together with the inert gas. Therefore, the reduction reaction of the metal powder proceeds evenly, making it possible to mass-produce non-oxide powder. In particular, during this reaction, the metal powder is stirred as described above and comes into even and sufficient contact with the reduction treatment atmosphere, so the reduction reaction progresses rapidly. Since the carbon powder and carbon cobbles prevent the powder from coagulating with each other, uniform, fine-grained non-oxide powder can be efficiently mass-produced.
ｚ−」Ｌ−貫 以下、図面に基づいて本発明の詳細な説明する。z-"L-kan Hereinafter, the present invention will be described in detail based on the drawings.
第１図は本発明製造装置の一実施例の概略図であって、
１はカーボン炉芯管、２はカーボンの玉石、３は高周波
コイル、Ａは金属粉末及びカーボン粉末の混合粉末を示
している。なお、カーボン粉末は反応に必要な量よりも
過剰に入れてもよい。FIG. 1 is a schematic diagram of an embodiment of the manufacturing apparatus of the present invention,
1 is a carbon furnace core tube, 2 is a carbon boulder, 3 is a high frequency coil, and A is a mixed powder of metal powder and carbon powder. Note that the carbon powder may be added in excess of the amount required for the reaction.
即ち、この実施例の製造装置によれば、カーボン炉芯管
１は大径部１１とその両端の小径部１２．１２を備えた
異径円管に構成されており、この大径部１１の両端が駆
動用ローラ４．４で支持されて処理炉５内に設置されて
いる。従って、このローラを駆動回転させると、カーボ
ン炉芯管１が回転するようになっている。That is, according to the manufacturing apparatus of this embodiment, the carbon furnace core tube 1 is configured as a circular tube with different diameters, including a large diameter section 11 and small diameter sections 12 and 12 at both ends. Both ends are supported by driving rollers 4.4 and installed in the processing furnace 5. Therefore, when this roller is driven to rotate, the carbon furnace core tube 1 is rotated.
また、この処理炉５の内部には、カーボン炉芯管１の大
径部１１を取り巻くように高周波コイル３が配設されて
おり、このコイル３に高周波電流を流すと、カーボン炉
芯管１と該炉芯管１内部のカーボンの玉石２が高周波誘
電加熱されるようになっている。尚、玉石２はこの実施
例では球状のものが使用されているが、角形やその他の
形状の玉石も使用できることは言うまでもない。Further, inside the processing furnace 5, a high frequency coil 3 is arranged so as to surround the large diameter portion 11 of the carbon furnace core tube 1, and when a high frequency current is passed through this coil 3, the carbon furnace core tube 1 The carbon boulders 2 inside the furnace core tube 1 are heated by high-frequency dielectric heating. Although the boulders 2 are spherical in this embodiment, it goes without saying that rectangular or other shaped boulders can also be used.
更に、この処理炉５一端の材料投入口５１の近傍には不
活性ガスの導入管６１が接続され、処理炉５の他端には
不活性ガスの排出管６２と脱気管６３が接続されている
。そして、導入管６１には開閉バルブ７１と流量形８１
が、排出管６２には開閉バルブ７２と圧力計８２が、脱
気管６３には開閉バルブ７３と真空ポンプ８３がそれぞ
れ取付られており、また、処理炉５にはオプティカルサ
ーモメータ８４が取付られている。従って、導入管６１
の開閉バルブ７１と排出管６２の開閉バルブ７２を開け
ば、導入管６１より流入する不活性ガスがカーボン炉芯
管１内を流れて排出管６２より排出されるようになって
おり、不活性ガスの流量と圧力は、流量計８１と圧力計
８２を見ながら開閉バルブ７１．７２の開き具合を加減
することによって自由に調節できるようになっている。Furthermore, an inert gas introduction pipe 61 is connected to one end of the processing furnace 5 near the material input port 51, and an inert gas discharge pipe 62 and a degassing pipe 63 are connected to the other end of the processing furnace 5. There is. The introduction pipe 61 includes an on-off valve 71 and a flow type 81.
However, an on-off valve 72 and a pressure gauge 82 are attached to the discharge pipe 62, an on-off valve 73 and a vacuum pump 83 are attached to the deaeration pipe 63, and an optical thermometer 84 is attached to the processing furnace 5. There is. Therefore, the introduction pipe 61
When the on-off valve 71 of The flow rate and pressure of the gas can be freely adjusted by adjusting the degree of opening of the on-off valves 71 and 72 while watching the flow meter 81 and the pressure gauge 82.
また、炉内の温度はオプティカルサーモメータ８４によ
ってただちに判別できるようになっている。Further, the temperature inside the furnace can be immediately determined by an optical thermometer 84.
本発明の製造方法は、上記のような製造装置を用いて次
のように行われる。The manufacturing method of the present invention is carried out as follows using the manufacturing apparatus as described above.
まず、処理炉５の開閉蓋５２を開け、金属粉末とカーボ
ン粉末の混合粉末Ａをカーボンの玉石２と共に材料投入
口５１からカーボン炉芯管ｌの大径部１１へ投入し、開
閉蓋５２を閉じる。金属粉末としては、ｋｌ、Ｔｉ、Ｓ
ｉ等が使用される。First, open the lid 52 of the processing furnace 5, charge the mixed powder A of metal powder and carbon powder together with the carbon boulders 2 from the material input port 51 into the large diameter portion 11 of the carbon furnace core tube l, and then close the lid 52. close. Metal powders include kl, Ti, S
i etc. are used.
次いで、導入管６１と排出管６２の各開閉バルブ７１゜
７２を閉じたまま、脱気管６３の開閉バルブ７３を開き
、真空ポンプ８３でカーボン炉芯管１ （処理炉５）の
内部空気を脱気してから開閉バルブ７３を閉じる。Next, while keeping the on-off valves 71 and 72 of the inlet pipe 61 and the discharge pipe 62 closed, the on-off valve 73 of the degassing pipe 63 is opened, and the internal air of the carbon furnace core tube 1 (processing furnace 5) is degassed with the vacuum pump 83. After that, close the on-off valve 73.
そして、導入管６１の開閉バルブ６１を開いて不活性ガ
スをカーボン炉芯管１内（処理炉５内）に導入し、圧力
計８２を見ながら圧力１ｋｇ／ｃｊＧになると排出管６
２の開閉バルブ７２を開き、流量計８１を見ながら不活
性ガスがカーボン炉芯管１内を所定量流れるように調節
する。不活性ガスとしてはＮ２゜Ａｒ等が使用されるが
、これらは金属粉末の還元反応の種類に応じて適宜使い
分けされることは言うまでもない。Then, open the on-off valve 61 of the inlet pipe 61 to introduce inert gas into the carbon furnace core tube 1 (inside the processing furnace 5), and while watching the pressure gauge 82, when the pressure reaches 1 kg/cjG, the discharge pipe 6
Open the on-off valve 72 of No. 2, and adjust so that a predetermined amount of inert gas flows through the carbon furnace core tube 1 while watching the flow meter 81. As the inert gas, N2°Ar or the like is used, but it goes without saying that these can be used appropriately depending on the type of reduction reaction of the metal powder.
次いで、駆動用ローラ４，４を作動させてカーボン炉芯
管１を回転させ、高周波コイル３に高周波電流を流して
カーボン炉芯管１とカーボンの玉石２を高周波誘電加熱
により発熱させ、カーボン炉芯管１の内部温度を所定の
反応温度まで昇温させて所定時間処理する。反応温度や
反応時間は、金属粉末の還元反応に応じて、１２００〜
１７００℃の温度範囲及び３〜１０時間の時間範囲内で
適宜決定される。Next, the driving rollers 4, 4 are operated to rotate the carbon furnace core tube 1, and a high frequency current is passed through the high frequency coil 3 to generate heat in the carbon furnace core tube 1 and the carbon cobblestones 2 by high frequency dielectric heating. The internal temperature of the core tube 1 is raised to a predetermined reaction temperature and the treatment is carried out for a predetermined time. The reaction temperature and reaction time vary from 1,200 to
It is appropriately determined within the temperature range of 1700°C and the time range of 3 to 10 hours.
上記のように処理すると、カーボン炉芯管１内部の金属
粉末とカーボン粉末の混合粉末Ａは、カーボン炉芯管１
の熱によって周囲から加熱されるのみならず、カーボン
粉末およびカーボン玉石２の熱によって内部からも加熱
されることになり、しかも、該混合粉末Ａはカーボン炉
芯管１の回転によって玉石２と共にＰＡ ｔｌされるの
で、均−且つ充分な加熱が行われるようになる。従って
、多量の混合粉末Ａがカーボン炉芯管１内に入っていて
も、充分な加熱によって金属粉末は所定の反応温度に維
持されると共に、カーボン粉末は不活性ガスと共に還元
処理雰囲気をつくるので、低酸素濃度下において金属粉
末のとカーボンあるいはガスとの存在するカーボン粉末
は、金属粉末粒子間の融着を防止し、また、金属粉末間
に均一微細な非酸化物を得ることができる。When processed as described above, the mixed powder A of metal powder and carbon powder inside the carbon furnace core tube 1 becomes
Not only is it heated from the surroundings by the heat of tl, so that uniform and sufficient heating can be performed. Therefore, even if a large amount of mixed powder A enters the carbon furnace core tube 1, the metal powder is maintained at a predetermined reaction temperature by sufficient heating, and the carbon powder creates a reduction treatment atmosphere together with the inert gas. Carbon powder in which metal powder and carbon or gas are present under low oxygen concentration can prevent fusion between metal powder particles and can obtain uniform fine non-oxide between metal powder particles.
すなわち、例えば
Ａｌ＋Ｃ＋Ｎ、→、ｌ’Ｎ＋ｃ
Ｓ ｉ ＋Ｃ＋Ｎ２−３１ｉＮ４＋ｃ
Ｓｉ十過剰のＣ＋Ａｒ−５ｓｉｃ−Ｌ−ＣＴｉ＋Ｃ＋Ｎ
、→ＴｉＮ＋Ｃ
Ｔｉ＋過剰のＣ＋Ａｒ−ＴｉＣ＋Ｃ
の如き反応が遂行され、Ｎｚ、Ａｒ等の還元雰囲気中に
て金属粉末がカーボンまたは還元ガスと反応し、Ａ ｉ
ｔ Ｎ、 Ｓ ｔ ２Ｎ４． Ｓ ｉＣ等の所望の
非酸化物粉末が量産されるのである。
４゜さらに、この反応中は、上記のように金属粉
末が攪拌されてカーボンまたはガスとの接触や加熱が均
−且つ充分に行われるため、処理される混合粉末へが多
量であっても還元反応の進行は速やかであり、従ってカ
ーボン炉芯管１の内容積を大きく設計して大量処理すれ
ば、前述の如き３〜１０時間程時間比較的短い処理時間
で数ｋｇから数十ｋｇの非酸化物粉末を一度に得ること
も可能となる。That is, for example, Al+C+N, →, l'N+c Si +C+N2-31iN4+c C+Ar-5sic-L-CTi+C+N
, →TiN+C Ti+excess C+Ar-TiC+C reactions are carried out, and the metal powder reacts with carbon or reducing gas in a reducing atmosphere such as Nz, Ar, etc., and A i
t N, S t 2N4. Desired non-oxide powders such as SiC are mass-produced.
4゜Furthermore, during this reaction, as mentioned above, the metal powder is stirred and brought into contact with the carbon or gas and heated evenly and sufficiently, so that even if the amount is reduced to the mixed powder being treated, it will not be reduced. The reaction progresses quickly, so if the inner volume of the carbon furnace core tube 1 is designed to be large and large quantities are processed, several kg to several tens of kg of waste can be produced in a relatively short processing time of about 3 to 10 hours as described above. It also becomes possible to obtain oxide powder at once.
光−ｍ呆
以上の説明から明らかなように、本発明によれば、金属
粉末と、カーボンが非酸化雰囲気中において、極めて、
効率がよく混合、加熱されるので短時間の反応にて所望
の非酸化物が合成される。As is clear from the above explanation, according to the present invention, when metal powder and carbon are in a non-oxidizing atmosphere,
Since mixing and heating are carried out efficiently, the desired non-oxide can be synthesized in a short reaction time.
さらに、カーボン炉芯管内を転動するカーボン粉末およ
びカーボン玉石によって粉末同士の凝結が阻止されるの
で、合成後の粉砕工程が省略可能となり、不純物の混入
も防げ、均一かつ細粒質な非酸化物の粉末を大量生産す
ることができるという顕著な効果がある。Furthermore, since the carbon powder and carbon cobbles rolling in the carbon furnace core tube prevent the powder from coagulating with each other, the pulverization process after synthesis can be omitted, preventing the contamination of impurities, and producing a uniform, fine-grained, non-oxidized product. It has the remarkable effect of being able to mass-produce powders of substances.
第１図は本発明製造装置の一実施例の概略図である。
１・・・カーボン炉芯管、２・・・カーボンの玉石、３
・・・高周波コイル、４・・・金属粉末及びカーボン粉
末の混合粉末。FIG. 1 is a schematic diagram of an embodiment of the manufacturing apparatus of the present invention. 1... Carbon furnace core tube, 2... Carbon boulder, 3
... High frequency coil, 4... Mixed powder of metal powder and carbon powder.
Claims (1)
玉石と共にカーボン炉芯管に入れ、該カーボン炉芯管内
に不活性ガスを流して非酸化雰囲気に保ちつつ該カーボ
ン炉芯管を回転させて高周波誘導加熱することを特徴と
する非酸化物粉末の製造方法。(1) Put a mixed powder of metal powder and carbon powder into a carbon furnace core tube together with carbon boulders, and rotate the carbon furnace core tube while keeping a non-oxidizing atmosphere by flowing an inert gas into the carbon furnace core tube. A method for producing non-oxide powder, characterized by high-frequency induction heating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61101517A JPS62256702A (en) | 1986-04-30 | 1986-04-30 | Production of non-oxidized powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61101517A JPS62256702A (en) | 1986-04-30 | 1986-04-30 | Production of non-oxidized powder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62256702A true JPS62256702A (en) | 1987-11-09 |
Family
ID=14302716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61101517A Pending JPS62256702A (en) | 1986-04-30 | 1986-04-30 | Production of non-oxidized powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62256702A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0470749A2 (en) * | 1990-08-10 | 1992-02-12 | Naraseiki Kabushiki Kaisha | Electronic combustion furnace |
| FR2727108A1 (en) * | 1994-11-18 | 1996-05-24 | Cernix | ALUMINUM NITRIDE GRANULES |
| JP2002274818A (en) * | 2001-03-16 | 2002-09-25 | Toyo Aluminium Kk | Method of preparing nitrogen-containing inorganic compound |
| KR101132285B1 (en) * | 2009-12-28 | 2012-04-05 | 재단법인대구경북과학기술원 | Powder heat treatment equipment |
-
1986
- 1986-04-30 JP JP61101517A patent/JPS62256702A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0470749A2 (en) * | 1990-08-10 | 1992-02-12 | Naraseiki Kabushiki Kaisha | Electronic combustion furnace |
| US5254822A (en) * | 1990-08-10 | 1993-10-19 | Naraseiki Kabushiki Kaisha | Electronic combustion furnace |
| FR2727108A1 (en) * | 1994-11-18 | 1996-05-24 | Cernix | ALUMINUM NITRIDE GRANULES |
| WO1996015982A1 (en) * | 1994-11-18 | 1996-05-30 | Cernix | Aluminium nitride granules |
| JP2002274818A (en) * | 2001-03-16 | 2002-09-25 | Toyo Aluminium Kk | Method of preparing nitrogen-containing inorganic compound |
| JP4578009B2 (en) * | 2001-03-16 | 2010-11-10 | 東洋アルミニウム株式会社 | Method for producing nitrogen-containing inorganic compound |
| KR101132285B1 (en) * | 2009-12-28 | 2012-04-05 | 재단법인대구경북과학기술원 | Powder heat treatment equipment |
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